Molecular-dynamics simulations of sputtering.
The use of molecular-dynamics simulations to understand the ejection processes of particles from surfaces after energetic ion bombardment is discussed. Substrates considered include metals, covalent and ionic materials, polymers and molecular solids. It is shown how the simulations can be used to aid interpretation of experimental results by providing the underlying mechanisms behind the ejection processes.
Department of Mathematical Sciences, Loughborough University, Loughborough LE11 3TU, UK. r.smith@lboro.ac.uk
Roger
R
Smith
Steven D
SD
Kenny
Deerajen
D
Ramasawmy