Transport theories of sputtering.
The use of linear transport theory to calculate several observable quantities in the sputtering process is reviewed. The basic equations previously solved in the literature to obtain the sputtering yield and the energy spectra of sputtered atoms are re-derived and briefly analysed. Comparison with experiments and comments on limitations of theoretical models are included.
Departamento de Física Fundamental y Experimental, Universidad de La Laguna, 38202 La Laguna, Tenerife, Spain. mmateo@ull.es
Mario M
MM
Jakas