Electron-acoustic and surface electron beam induced voltage signal formation in scanning electron microscopy analysis of semiconducting samples.
Wong
W K
WK
Department of Electrical & Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore 117576, Singapore. elewwk@nus.edu.sg
Rau
E I
EI
Thong
J T L
JT
D000162:Acoustics; D004583:Electrons; D008855:Microscopy, Electron, Scanning / Q000295:instrumentation* / Q000379:methods*; D012666:Semiconductors; D014057:Tomography, X-Ray Computed