Off-axis electron holography with a dual-lens imaging system and its usefulness in 2-D potential mapping of semiconductor devices.
Wang
Y Y
YY
IBM Microelectronic Division, Zip 40E, Hudson Valley Research Park, 2070 Route 52, Hopewell Jct., NY 12533, USA. wangyy@us.ibm.com
Kawasaki
M
M
Bruley
J
J
Gribelyuk
M
M
Domenicucci
A
A
Gaudiello
J
J
D003952:Diagnostic Imaging / Q000295:instrumentation* / Q000379:methods*; D006696:Holography / Q000295:instrumentation* / Q000379:methods*; D007909:Lenses; D008854:Microscopy, Electron / Q000295:instrumentation / Q000379:methods; D055095:Optics and Photonics; D012666:Semiconductors; D012825:Silicon / Q000737:chemistry
D012825:Silicon