Wide-range length metrology by dual-imaging-unit atomic force microscope based on porous alumina.
Zhang
Dongxian
D
State Key Laboratory of Modern Optical Instruments, Zhejiang University, Hangzhou 310027, People's Republic of China. zhangdx@zju.edu.cn
Zhang
Haijun
H
Lin
Xiaofeng
X
D000537:Aluminum Oxide / Q000737:chemistry*; D018625:Microscopy, Atomic Force / Q000295:instrumentation*; D036103:Nanotechnology
D000537:Aluminum Oxide