title: Investigation of oxide tunnel barriers by atom probe tomography (TAP).
authors.affiliation: Institut für Materialphysik, Tammannstr. 1, 37077 Göttingen, Germany. mkuduz@ump.gwdg.de
authors.forename: Mario
authors.initials: M
authors.lastname: Kuduz
authors.forename: Guido
authors.initials: G
authors.lastname: Schmitz
authors.forename: Reiner
authors.initials: R
authors.lastname: Kirchheim
mesh_terms: D000537:Aluminum Oxide; D008839:Microelectrodes; D008853:Microscopy / Q000295:instrumentation / Q000379:methods*; D036103:Nanotechnology / Q000295:instrumentation / Q000379:methods; D010087:Oxides / Q000737:chemistry*; D014054:Tomography / Q000295:instrumentation* / Q000379:methods*
chemical_list: D010087:Oxides; D000537:Aluminum Oxide