title: Nanofabrication of cylindrical STEM specimen of InGaAs/GaAs quantum dots for 3D-STEM observation.
authors.affiliation: RIKEN (The Institute of Physical and Chemical Research), 2-1 Hirosawa, Wako, Saitama 351-0198, Japan. ozasa@postman.riken.go.jp
authors.forename: Kazunari
authors.initials: K
authors.lastname: Ozasa
authors.forename: Yoshinobu
authors.initials: Y
authors.lastname: Aoyagi
authors.forename: Masaya
authors.initials: M
authors.lastname: Iwaki
authors.forename: Masahiko
authors.initials: M
authors.lastname: Hara
authors.forename: Mizuo
authors.initials: M
authors.lastname: Maeda
mesh_terms: D001152:Arsenicals / Q000737:chemistry*; D003952:Diagnostic Imaging / Q000379:methods*; D005708:Gallium / Q000737:chemistry*; D008855:Microscopy, Electron, Scanning; D036103:Nanotechnology / Q000379:methods*; D045663:Quantum Dots
chemical_list: D001152:Arsenicals; C043055:gallium arsenide; D005708:Gallium