Investigation of oxide tunnel barriers by atom probe tomography (TAP).
Kuduz
Mario
M
Institut für Materialphysik, Tammannstr. 1, 37077 Göttingen, Germany. mkuduz@ump.gwdg.de
Schmitz
Guido
G
Kirchheim
Reiner
R
D000537:Aluminum Oxide; D008839:Microelectrodes; D008853:Microscopy / Q000295:instrumentation / Q000379:methods*; D036103:Nanotechnology / Q000295:instrumentation / Q000379:methods; D010087:Oxides / Q000737:chemistry*; D014054:Tomography / Q000295:instrumentation* / Q000379:methods*
D010087:Oxides; D000537:Aluminum Oxide