title: Electron-acoustic and surface electron beam induced voltage signal formation in scanning electron microscopy analysis of semiconducting samples.
authors.affiliation: Department of Electrical & Computer Engineering, National University of Singapore, 4 Engineering Drive 3, Singapore 117576, Singapore. elewwk@nus.edu.sg
authors.forename: W K
authors.initials: WK
authors.lastname: Wong
authors.forename: E I
authors.initials: EI
authors.lastname: Rau
authors.forename: J T L
authors.initials: JT
authors.lastname: Thong
mesh_terms: D000162:Acoustics; D004583:Electrons; D008855:Microscopy, Electron, Scanning / Q000295:instrumentation* / Q000379:methods*; D012666:Semiconductors; D014057:Tomography, X-Ray Computed