Sacrificial adhesion promotion layers for copper metallization of device structures.
The adhesion of copper films to adjacent device layers including TiN, Ta, and TaN diffusion barriers is a crucial reliability issue for integrated circuits. We report that ultrathin layers of poly(acrylic acid) (PAA) prepared on barrier surfaces or on the native oxide of Si wafers dramatically increase the interfacial adhesion of Cu films deposited by the H2 assisted reduction of bis(2,2,7-trimethyloctane-3,5-dionato)copper in supercritical carbon dioxide. Similar improvements were achieved on Si wafers using a simple vapor phase exposure of the substrate to acrylic acid prior to metallization. The deposited films and the substrate/Cu interfaces were analyzed by X-ray photoelectron spectroscopy (XPS), electron microscopy, atomic force microscopy, and variable-angle spectroscopic ellipsometry. No trace of the adhesion layer was detected at the interface, indicating it was sacrificial at the deposition conditions used. Moreover, the presence and subsequent decomposition of the PAA layer during deposition substantially reduced or eliminated metal oxides at the substrate interface. For depositions on PAA-treated Si wafers, copper was present primarily as Cu0 at the interface and Si was present only as Si0. On PAA-treated Ta substrates, XPS analysis indicated Ta was present primarily as Ta0 at the metallized interface whereas Ta2O5 dominated the interface of samples prepared without the adhesion layers. The technique can be extended to patterned substrates using adsorption of acrylic acid or thermal/UV polymerization of acrylic acid.
Zong
Yinfeng
Y
Department of Chemical Engineering, University of Massachusetts, Amherst, Massachusetts 01003, USA.
Shan
Xiaoying
X
Watkins
James J
JJ
D000180:Acrylic Resins / Q000737:chemistry*; D002245:Carbon Dioxide / Q000737:chemistry; D003300:Copper / Q000737:chemistry*; D008567:Membranes, Artificial; D009584:Nitrogen / Q000737:chemistry; D009942:Organometallic Compounds / Q000737:chemistry*; D010316:Particle Size; D012680:Sensitivity and Specificity; D012825:Silicon / Q000737:chemistry; D013052:Spectrometry, X-Ray Emission / Q000379:methods; D013499:Surface Properties; D013635:Tantalum / Q000737:chemistry; D000267:Tissue Adhesions; D014025:Titanium / Q000737:chemistry
D000180:Acrylic Resins; D008567:Membranes, Artificial; D009942:Organometallic Compounds; D002245:Carbon Dioxide; C006903:carbopol 940; D013635:Tantalum; D003300:Copper; D014025:Titanium; D009584:Nitrogen; D012825:Silicon