title: Supported particle track etched polyimide membranes: a grazing incidence small-angle X-ray scattering study.
abstract: Particle track etched polyimide membranes on silicon substrates covered with a native oxide layer are investigated. Preparation steps similar to the common classical particle track etched membrane production, giving rise to free-standing membranes, are successfully applied to the supported membranes. Polyimide films are used as a starting material for a template preparation based on high energy ion irradiation. The film/membrane structure is probed at different length scales by grazing incidence small-angle X-ray scattering at each individual preparation step. In addition, characterization with atomic force microscopy, variable-angle spectroscopic ellipsometry, Fourier transform infrared transmission, and attenuated total reflection spectroscopy is performed. An amount of 6 +/- 1 vol % pores inside the polyimide film is detected. The pores are oriented perpendicular to the substrate surface and have a conical shape, yielding a slightly reduced pore size at the substrate/film interface.
authors.affiliation: Leibniz Institut für Polymerforschung Dresden, Hohe Strasse 6, 01069 Dresden, Germany.
authors.forename: N
authors.initials: N
authors.lastname: Hermsdorf
authors.forename: K
authors.initials: K
authors.lastname: Sahre
authors.forename: P
authors.initials: P
authors.lastname: Volodin
authors.forename: M
authors.initials: M
authors.lastname: Stamm
authors.forename: K J
authors.initials: KJ
authors.lastname: Eichhorn
authors.forename: S
authors.initials: S
authors.lastname: Cunis
authors.forename: R
authors.initials: R
authors.lastname: Gehrke
authors.forename: P
authors.initials: P
authors.lastname: Panagiotou
authors.forename: T
authors.initials: T
authors.lastname: Titz
authors.forename: P
authors.initials: P
authors.lastname: Müller-Buschbaum