Design and fabrication of continuous-profile diffractive micro-optical elements as a beam splitter.
An optimization algorithm that combines a rigorous electromagnetic computation model with an effective iterative method is utilized to design diffractive micro-optical elements that exhibit fast convergence and better design quality. The design example is a two-dimensional 1-to-2 beam splitter that can symmetrically generate two focal lines separated by 80 microm at the observation plane with a small angle separation of +/- 16 degrees. Experimental results are presented for an element with continuous profiles fabricated into a monocrystalline silicon substrate that has a width of 160 microm and a focal length of 140 microm at a free-space wavelength of 10.6 microm.
Feng
Di
D
Tsinghua University, Beijing 100084, China. fengdi@mail.tsinghua.edu.cn
Yan
Yingbai
Y
Jin
Guofan
G
Fan
Shoushan
S