Line-addressable digital-deflection programmable micromirror array.
We report a novel digital-deflection programmable micromirror array driven by micromechanical digital-to-analog converters that eliminates the need for electrical digital-to-analog converters for analog displacement control, thus simplifying the driving circuitry and reducing the overall system cost. Furthermore, owing to the bistable and hysteretic characteristics of parallel-plate electrostatic actuators, an array of micromirrors can be controlled by means of row- and column-addressing lines, which drastically reduce the number of routing wires and allow array sizes to increase while they maintain high array quality.
Zhou
Guangya
G
Microsystems Technology Initiative, Department of Mechanical Engineering, National University of Singapore, 10 Kent Ridge Crescent, Singapore 119260. mpezgy@nus.edu.sg
VJ
Logeeswaran
L
Chau
Fook Siong
FS
Tay
Francis E H
FE