title: Line-addressable digital-deflection programmable micromirror array.
abstract: We report a novel digital-deflection programmable micromirror array driven by micromechanical digital-to-analog converters that eliminates the need for electrical digital-to-analog converters for analog displacement control, thus simplifying the driving circuitry and reducing the overall system cost. Furthermore, owing to the bistable and hysteretic characteristics of parallel-plate electrostatic actuators, an array of micromirrors can be controlled by means of row- and column-addressing lines, which drastically reduce the number of routing wires and allow array sizes to increase while they maintain high array quality.
authors.affiliation: Microsystems Technology Initiative, Department of Mechanical Engineering, National University of Singapore, 10 Kent Ridge Crescent, Singapore 119260. mpezgy@nus.edu.sg
authors.forename: Guangya
authors.initials: G
authors.lastname: Zhou
authors.forename: Logeeswaran
authors.initials: L
authors.lastname: VJ
authors.forename: Fook Siong
authors.initials: FS
authors.lastname: Chau
authors.forename: Francis E H
authors.initials: FE
authors.lastname: Tay