Mechanical scanning of the specimen in the scanning electron microscope.
A scanning electron microscope (SEM) system equipped with a motor drive specimen stage fully controlled with a personal computer (PC) has been utilized for obtaining ultralow magnification SEM images. This modem motor drive stage works as a mechanical scanning device. To produce ultra-low magnification SEM images, we use a successful combination of the mechanical scanning, electronic scanning, and digital image processing techniques. This new method is extremely labor and time saving for ultra-low magnification and wide-area observation. The option of ultra-low magnification observation (while maintaining the original SEM functions and performance) is important during a scanning electron microscopy session.
Oho
Eisaku
E
Department of Electrical Engineering, Kogakuin University, Tokyo, Japan. oho@cc.kogakuin.ac.jp
Miyamoto
Makoto
M