title: Development of a diffraction-type optical triangulation sensor.
abstract: We propose a diffraction-type optical triangulation sensor based on the diffraction theorem and the laser triangulation method. The advantage of the proposed sensor is that it obtains not only the linear displacement of a moving object but also its three angular motion errors. The developed sensor is composed mainly of a laser source, two quadrant detectors, and a reflective diffraction grating. The reflective diffraction grating can reflect the incident laser beam into several diffractive rays, and two quadrant detectors were set up for detecting the position of 0- and + 1-order diffraction rays. According to the optical triangulation relationship between the spatial incident angles of a laser beam and the output coordinates of two quadrant detectors, the displacement and the three angular motion errors of a moving object can be obtained simultaneously.
authors.affiliation: Institute of Electro-Optical and Materials Science, National Huwei University of Science and Technology, Huwei, Yunlin 632, Taiwan. carus@ckit.edu.tw
authors.forename: Chien-Hung
authors.initials: CH
authors.lastname: Liu
authors.forename: Wen-Yuh
authors.initials: WY
authors.lastname: Jywe
authors.forename: Chao-Kwai
authors.initials: CK
authors.lastname: Chen