title: Influence of fluorination on surface and dielectric characteristics of polyimide thin film.
abstract: In this study, the effects of fluorine treatment on surface properties, surface free energies, and dielectric constants of polyimide thin films were studied using X-ray photoelectron spectroscopy, contact angles, and dielectric characteristics, respectively. The glass transition temperature of fluorinated polyimide film gradually decreases with increasing fluorine pressure. The surface free energies and dielectric constants of the film decreased with increasing amount of the treatment fluorine gas. It was explained that the replacement of fluorine led to a decrease of the local electron polarization of polyimide and an increase of the free volume, which could be attributed to the relatively large volume of fluorine.
authors.affiliation: Advanced Materials Division, Korea Research Institute of Chemical Technology, PO Box 107, Yusong, Daejon 305-600, South Korea. psjin@krict.re.kr
authors.forename: Soo-Jin
authors.initials: SJ
authors.lastname: Park
authors.forename: Hyun-Suk
authors.initials: HS
authors.lastname: Kim
authors.forename: Fan-Long
authors.initials: FL
authors.lastname: Jin