A new method for preparing plan-view TEM specimen of multilayered films using focused ion beam.
A new method is proposed for preparing plan-view specimens of a CeO(2)/Gd(2)Zr(2)O(7) multilayer on a metal substrate using focused ion beam milling. In the plan-view specimen, a membrane from the surface region of the CeO(2) to the Gd(2)Zr(2)O(7) layer was thinned to electron transparence so that the entire span of the multilayer can be observed in a single sample. The in-plane alignments of the CeO(2) layer and the Gd(2)Zr(2)O(7) layer were analysed using selected-area diffraction patterns (SADPs). The boundaries between the CeO(2) grains were also examined using SADPs.
Kato
Takeharu
T
Materials R&D Laboratory, Japan Fine Ceramics Center, Atsuta-ku, Nagoya 456-8587, Japan.
Muroga
Takemi
T
Iijima
Yasuhiro
Y
Saitoh
Takashi
T
Yamada
Yutaka
Y
Izumi
Teruo
T
Shiohara
Yuh
Y
Hirayama
Tsukasa
T
Ikuhara
Yuichi
Y
D046529:Microscopy, Electron, Transmission; D013048:Specimen Handling / Q000379:methods*