title: Specimen preparation for high-resolution transmission electron microscopy using focused ion beam and Ar ion milling.
abstract: We have developed a focused ion beam (FIB)-Ar ion-milling technique for high-resolution transmission electron microscopy. A micrometresized specimen was mounted on a cross section of metal foil of a few micrometres thick, using FIB microsampling. Following this, a 2 degrees wedgeshaped part was made in the specimen using FIB. Finally, the specimen was milled using an Ar ion beam to remove the FIB-damaged layers. We applied the FIB-Ar ion milling technique to a CeO(2)/Gd(2)Zr(2)O(7) multilayer specimen, resulting in the crystal lattice fringes of both layers being clearly observable in comparison to a specimen finished using a Ga ion beam at an accelerating voltage of 10 kV.
authors.forename: Hirokazu
authors.initials: H
authors.lastname: Sasaki
authors.forename: Takeyoshi
authors.initials: T
authors.lastname: Matsuda
authors.forename: Takeharu
authors.initials: T
authors.lastname: Kato
authors.forename: Takemi
authors.initials: T
authors.lastname: Muroga
authors.forename: Yasuhiro
authors.initials: Y
authors.lastname: Iijima
authors.forename: Takashi
authors.initials: T
authors.lastname: Saitoh
authors.forename: Fusako
authors.initials: F
authors.lastname: Iwase
authors.forename: Yutaka
authors.initials: Y
authors.lastname: Yamada
authors.forename: Teruo
authors.initials: T
authors.lastname: Izumi
authors.forename: Yuh
authors.initials: Y
authors.lastname: Shiohara
authors.forename: Tsukasa
authors.initials: T
authors.lastname: Hirayama
mesh_terms: D001128:Argon; D046529:Microscopy, Electron, Transmission; D013048:Specimen Handling / Q000379:methods*
chemical_list: D001128:Argon