title: Application of FIB with micro pick-up to microstructural study of irradiated SiC/SiC composites.
abstract: The combination of focused ion beam (FIB) micro-processing and the lift-out technique using the micro pick-up system was applied to the preparation of TEM specimens of irradiated SiC/SiC composites. The deformation caused by microstructural evolution was observed in the pyrolitic carbon interphase, and several helium bubbles and cavities were detected in the CVI matrix.
authors.affiliation: Graduate School of Energy Science, Kyoto University, Uji, Kyoto 611-0011, Japan. kazumi@iae.kyoto-u.ac.jp
authors.forename: Kazumi
authors.initials: K
authors.lastname: Ozawa
authors.forename: Sosuke
authors.initials: S
authors.lastname: Kondo
authors.forename: Hirotatsu
authors.initials: H
authors.lastname: Kishimoto
authors.forename: Akira
authors.initials: A
authors.lastname: Kohyama
mesh_terms: D002516:Ceramics; D046529:Microscopy, Electron, Transmission; D017655:Silicon Compounds; D013048:Specimen Handling / Q000379:methods*
chemical_list: D017655:Silicon Compounds