Application of FIB with micro pick-up to microstructural study of irradiated SiC/SiC composites.
The combination of focused ion beam (FIB) micro-processing and the lift-out technique using the micro pick-up system was applied to the preparation of TEM specimens of irradiated SiC/SiC composites. The deformation caused by microstructural evolution was observed in the pyrolitic carbon interphase, and several helium bubbles and cavities were detected in the CVI matrix.
Ozawa
Kazumi
K
Graduate School of Energy Science, Kyoto University, Uji, Kyoto 611-0011, Japan. kazumi@iae.kyoto-u.ac.jp
Kondo
Sosuke
S
Kishimoto
Hirotatsu
H
Kohyama
Akira
A
D002516:Ceramics; D046529:Microscopy, Electron, Transmission; D017655:Silicon Compounds; D013048:Specimen Handling / Q000379:methods*
D017655:Silicon Compounds