Micro magnetic stir-bar mixer integrated with parylene microfluidic channels.
Previously, we reported a micro magnetic stir-bar mixer driven by an external rotating magnetic field and its rapid mixing performance in polydimethyl-siloxane (PDMS) channels. The PDMS piece with embedded fluid channels were manually aligned to a glass substrate and assembled. In this paper, we report the fabrication and testing results of a micro magnetic stir-bar monolithically integrated in parylene surface-micromachined channels with improved design features, including small tolerance of the stir-bar to channel wall (10 microm). Using of parylene based microchannels with improved design not only provides improved mixing, but also eliminates certain problems associated with PDMS-based channels. For example, porosity of PDMS causes evaporation and absorption of chemicals and thus channels made of PDMS are prone to cross-contamination. We have also demonstrated that the magnetic stir-bar can be used to pump liquid in micro channels.
Ryu
Kee Suk
KS
Micro Actuators, Sensors and Systems Group, Micro and Nanotechnology Laboratory, Department of Electrical and Computer Engineering, University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA.
Shaikh
Kashan
K
Goluch
Edgar
E
Fan
Zhifang
Z
Liu
Chang
C
D004129:Dimethylpolysiloxanes / Q000737:chemistry*; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008280:Magnetics / Q000295:instrumentation*; D046210:Microfluidic Analytical Techniques / Q000295:instrumentation* / Q000379:methods; D044085:Microfluidics / Q000295:instrumentation* / Q000379:methods; D009038:Motion; D009757:Nylons / Q000737:chemistry*; D011108:Polymers / Q000737:chemistry*; D014992:Xylenes / Q000737:chemistry*
D004129:Dimethylpolysiloxanes; D009757:Nylons; D011108:Polymers; D014992:Xylenes; C085707:poly(dimethylsiloxane)-polyamide copolymer; C011055:parylene