title: Improvements in performance of focused ion beam cross-sectioning: aspects of ion-sample interaction.
abstract: A gallium (Ga) focused ion beam (FIB) has been applied increasingly to 'site-specific' preparation of cross-sectional samples for transmission electron microscopy (TEM), scanning TEM, scanning electron microscopy and scanning ion microscopy. It is absolutely required for FIB cross-sectioning to prepare higher-quality samples in a shorter time without sacrificing the site specificity. The present paper clarifies the parameters that impose limitation on the following performances of the FIB cross-sectioning: milling rate, cross-sectioning at a right angle with respect to the sample surface, curtain structures formed on the cross sections, ion implantation and ion damage. All of these are discussed from the viewpoint of ion-sample interaction. Improvements for these performances achieved by diminishing their limiting origins or by correcting the resultants are described. Especially, the FIB scanning speed is significantly utilizable to improve the milling rate. A microsampling method, which allows the FIB incidence in a sidewards or upwards direction as well as downwards with respect to the microsample surface, is very effective to minimize the curtain structures.
authors.affiliation: Naka Division, Hitachi High-Technologies Corporation, Hitachinaka-shi, Ibaraki-ken 312-8504, Japan. ishitani-tohru@naka.hitachi-hitec.com
authors.forename: Tohru
authors.initials: T
authors.lastname: Ishitani
authors.forename: Kaoru
authors.initials: K
authors.lastname: Umemura
authors.forename: Tsuyoshi
authors.initials: T
authors.lastname: Ohnishi
authors.forename: Toshie
authors.initials: T
authors.lastname: Yaguchi
authors.forename: Takeo
authors.initials: T
authors.lastname: Kamino
mesh_terms: D005708:Gallium; D008854:Microscopy, Electron / Q000379:methods; D013048:Specimen Handling / Q000379:methods*
chemical_list: D005708:Gallium