title: A new method for preparing plan-view TEM specimen of multilayered films using focused ion beam.
abstract: A new method is proposed for preparing plan-view specimens of a CeO(2)/Gd(2)Zr(2)O(7) multilayer on a metal substrate using focused ion beam milling. In the plan-view specimen, a membrane from the surface region of the CeO(2) to the Gd(2)Zr(2)O(7) layer was thinned to electron transparence so that the entire span of the multilayer can be observed in a single sample. The in-plane alignments of the CeO(2) layer and the Gd(2)Zr(2)O(7) layer were analysed using selected-area diffraction patterns (SADPs). The boundaries between the CeO(2) grains were also examined using SADPs.
authors.affiliation: Materials R&D Laboratory, Japan Fine Ceramics Center, Atsuta-ku, Nagoya 456-8587, Japan.
authors.forename: Takeharu
authors.initials: T
authors.lastname: Kato
authors.forename: Takemi
authors.initials: T
authors.lastname: Muroga
authors.forename: Yasuhiro
authors.initials: Y
authors.lastname: Iijima
authors.forename: Takashi
authors.initials: T
authors.lastname: Saitoh
authors.forename: Yutaka
authors.initials: Y
authors.lastname: Yamada
authors.forename: Teruo
authors.initials: T
authors.lastname: Izumi
authors.forename: Yuh
authors.initials: Y
authors.lastname: Shiohara
authors.forename: Tsukasa
authors.initials: T
authors.lastname: Hirayama
authors.forename: Yuichi
authors.initials: Y
authors.lastname: Ikuhara
mesh_terms: D046529:Microscopy, Electron, Transmission; D013048:Specimen Handling / Q000379:methods*