Record high extreme-ultraviolet efficiency at near-normal incidence from a multilayer-coated polymer-overcoated blazed ion-etched holographic grating.
We have measured the extreme-ultraviolet (EUV) efficiency of a polymer-overcoated blazed ion-etched holographic test grating. The grating had a magnetron-sputtered Mo2C/Si multilayer coating matched to the grating blaze angle of 2.78 degrees. At an angle of incidence of 5.6 degrees and a wavelength of 15.79 nm, the measured efficiency peaks in the second outside order at 29.9%. The derived groove efficiency is 53.0%. To the best of our knowledge these are the highest values obtained yet at EUV wavelengths from a holographic ion-etched blazed grating.
Kowalski
M P
MP
Naval Research Laboratory, Code 7655, 4555 Overlook Avenue, SW, Washington, DC 20375, USA. michael.kowalski@nrl.navy.mil
Cruddace
R G
RG
Heidemann
K F
KF
Lenke
R
R
Kierey
H
H
Barbee
T W
TW
Hunter
W R
WR