title: Record high extreme-ultraviolet efficiency at near-normal incidence from a multilayer-coated polymer-overcoated blazed ion-etched holographic grating.
abstract: We have measured the extreme-ultraviolet (EUV) efficiency of a polymer-overcoated blazed ion-etched holographic test grating. The grating had a magnetron-sputtered Mo2C/Si multilayer coating matched to the grating blaze angle of 2.78 degrees. At an angle of incidence of 5.6 degrees and a wavelength of 15.79 nm, the measured efficiency peaks in the second outside order at 29.9%. The derived groove efficiency is 53.0%. To the best of our knowledge these are the highest values obtained yet at EUV wavelengths from a holographic ion-etched blazed grating.
authors.affiliation: Naval Research Laboratory, Code 7655, 4555 Overlook Avenue, SW, Washington, DC 20375, USA. michael.kowalski@nrl.navy.mil
authors.forename: M P
authors.initials: MP
authors.lastname: Kowalski
authors.forename: R G
authors.initials: RG
authors.lastname: Cruddace
authors.forename: K F
authors.initials: KF
authors.lastname: Heidemann
authors.forename: R
authors.initials: R
authors.lastname: Lenke
authors.forename: H
authors.initials: H
authors.lastname: Kierey
authors.forename: T W
authors.initials: TW
authors.lastname: Barbee
authors.forename: W R
authors.initials: WR
authors.lastname: Hunter