title: Employing oxygen-plasma posttreatment to improve the laser-induced damage threshold of ZrO2 films prepared by the electron-beam evaporation method.
abstract: ZrO2 films are deposited by the electron-beam evaporation method. Parts of the prepared samples are post-treated with oxygen plasma at the environment temperature. The laser-induced damage threshold (LIDT) of the films increases from 15.9 to 23.1 J/cm2 after treatment with oxygen plasma. Compared with that of the as-grown samples, significant reduction of the average microdefect density and absorption are found after oxygen-plasma posttreatment. These results indicate that the oxygen-plasma posttreatment technique is an effective and simple method for reducing the microdefect density and absorption to improve the LIDT.
authors.affiliation: R&D Center of Optical Thin Film Coatings, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. zdp@siom.ac.cn
authors.forename: Dongping
authors.initials: D
authors.lastname: Zhang
authors.forename: Jianda
authors.initials: J
authors.lastname: Shao
authors.forename: Dawei
authors.initials: D
authors.lastname: Zhang
authors.forename: Shuhai
authors.initials: S
authors.lastname: Fan
authors.forename: Tianya
authors.initials: T
authors.lastname: Tan
authors.forename: Zhengxiu
authors.initials: Z
authors.lastname: Fan