title: Two-photon optical-beam-induced current solid-immersion imaging of a silicon flip chip with a resolution of 325 nm.
abstract: We report high-resolution subsurface imaging of a silicon flip chip by detection of the photocurrent generated by the two-photon absorption of 1530-nm light from a femtosecond Er:fiber laser. The technique combines the focal sensitivity of two-photon excitation with the enhanced optical resolution of high-numerical-aperture solid-immersion imaging. Features on a sub-1-microm scale are clearly resolvable with high contrast, showing a resolution of 325 nm.
authors.affiliation: Ultrafast Optics Group, School of Engineering and Physical Sciences, Heriot-Watt University, Edinburgh EH14 4AS, UK. e.ramsay@hw.ac.uk
authors.forename: E
authors.initials: E
authors.lastname: Ramsay
authors.forename: N
authors.initials: N
authors.lastname: Pleynet
authors.forename: D
authors.initials: D
authors.lastname: Xiao
authors.forename: R J
authors.initials: RJ
authors.lastname: Warburton
authors.forename: D T
authors.initials: DT
authors.lastname: Reid