Employing oxygen-plasma posttreatment to improve the laser-induced damage threshold of ZrO2 films prepared by the electron-beam evaporation method.
ZrO2 films are deposited by the electron-beam evaporation method. Parts of the prepared samples are post-treated with oxygen plasma at the environment temperature. The laser-induced damage threshold (LIDT) of the films increases from 15.9 to 23.1 J/cm2 after treatment with oxygen plasma. Compared with that of the as-grown samples, significant reduction of the average microdefect density and absorption are found after oxygen-plasma posttreatment. These results indicate that the oxygen-plasma posttreatment technique is an effective and simple method for reducing the microdefect density and absorption to improve the LIDT.
Zhang
Dongping
D
R&D Center of Optical Thin Film Coatings, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China. zdp@siom.ac.cn
Shao
Jianda
J
Zhang
Dawei
D
Fan
Shuhai
S
Tan
Tianya
T
Fan
Zhengxiu
Z