Synthesis of high purity silicon nanoparticles in a low pressure microwave reactor.
The formation of pure single crystalline silicon nanoparticles by microwave induced decomposition of silane in a low pressure flow reactor is reported. The morphology and crystal structure of the particles are characterized in situ by particle mass spectrometry (PMS) and ex situ by means of X-ray diffraction, high resolution transmission electron microscopy, electron energy loss spectroscopy, and infrared spectroscopy. The preparation method allows for the adjustment of the mean particle diameter in the range 6 nm < or = dPM < or = 11 nm by controlling the precursor concentration, gas pressure, and microwave power. Spectroscopic investigations reveal that the particles are single crystal silicon. The potential on n- or p-type doping is in progress.
Knipping
Jörg
J
Institut für Verbrennung und Gasdynamik, Universität Duisburg-Essen, D-47048 Duisburg, Germany.
Wiggers
Hartmut
H
Rellinghaus
Bernd
B
Roth
Paul
P
Konjhodzic
Denan
D
Meier
Cedrik
C
D003460:Crystallization / Q000379:methods*; D017022:Flow Injection Analysis / Q000379:methods; D008422:Materials Testing; D008872:Microwaves; D008968:Molecular Conformation; D036103:Nanotechnology / Q000379:methods*; D043942:Nanotubes / Q000032:analysis / Q000737:chemistry* / Q000648:ultrastructure*; D010316:Particle Size; D011312:Pressure; D012825:Silicon / Q000032:analysis* / Q000737:chemistry*
D012825:Silicon