Modeling of microwave-sustained plasmas at atmospheric pressure with application to discharge contraction.
The modeling of microwave-sustained discharges at atmospheric pressure is much less advanced than at reduced pressure (<10 Torr) because of the greater complexity of the mechanisms involved. In particular, discharge contraction, a characteristic feature of high-pressure discharges, is not well understood. To describe adequately this phenomenon, one needs to consider that the charged-particle balance in atmospheric-pressure discharges relies on the kinetics of molecular ions, including their dissociation through electron impact. Nonuniform gas heating plays a key role in the radial distribution of the density of molecular ions. The onset of contraction is shown to depend only on radially nonuniform gas heating. The radial nonuniformity of the electric field intensity also plays an important role allowing one, for instance, to explain the lower degree of contraction observed in microwave discharges compared to dc discharges. We present a numerical fluid-plasma model that aims to bring into relief the main features of discharge contraction in rare gases. It calls for surface-wave discharges because of their wide range of operating conditions, enabling a closer check between theory and experiment.
Castaños Martinez
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E
Groupe de Physique des Plasmas, Université de Montréal, Montréal, Québec, Canada H3C 3J7.
Kabouzi
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Y
Makasheva
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K
Moisan
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M