title: Dielectric properties of high-kappa oxides: theory and experiment for Lu2O3.
abstract: We present a combined experimental and theoretical analysis of the dielectric and vibrational properties of crystalline lutetium oxide in its ground-state bixbyite structure. The vibrational dielectric function of Lu2O3 thin films grown by atomic-layer deposition was studied by infrared transmission and reflection-absorption spectroscopies, selectively accessing transverse and longitudinal optical frequencies. The static dielectric constant is extracted analyzing the infrared response. We also present first-principles density-functional linear-response calculations, which are in close agreement with experiment, and provide insight into the microscopic nature of vibrational spectra and dielectric properties.
authors.affiliation: Laboratorio Nazionale Materiali e Dispositivi per la Microelettronica MDM-INFM, via Olivetti 2, 20041 Agrate Brianza (MI), Italy.
authors.forename: Emiliano
authors.initials: E
authors.lastname: Bonera
authors.forename: Giovanna
authors.initials: G
authors.lastname: Scarel
authors.forename: Marco
authors.initials: M
authors.lastname: Fanciulli
authors.forename: Pietro
authors.initials: P
authors.lastname: Delugas
authors.forename: Vincenzo
authors.initials: V
authors.lastname: Fiorentini