title: Electro-acoustical characterization procedure for cMUTs.
abstract: A procedure for the electro-acoustical characterization in air of cMUTs is reported. First, the measured input electrical impedance of the transducer is used to calculate the transducer parameters at different bias voltages by fitting it with the Mason model. Then, the single membrane equivalent circuit can be calculated. Second, the cMUT impulse response is obtained through a send-and-receive experiment to be compared with the one predicted by the Mason model. In order to minimize the influence of the emitter in the obtained impulse response an ad hoc broadband piezoelectric transducer centered at the resonant frequency of the cMUT was fabricated. Using this transducer, no deconvolution of the impulse response of the emitter in the cMUT reception pulse is necessary. The procedure is tested for two cMUTs with silicon-rich nitride as structural layer and different membrane diameters (60 and 70 microm).
authors.affiliation: GDS, Universitat Politècnica de Catalunya, UPC-Campus Nord, Ed. C4, Jordi Girona 1-3, 08034 Barcelona, Spain.
authors.forename: Marta
authors.initials: M
authors.lastname: Buigas
authors.forename: Francisco Montero de
authors.initials: FM
authors.lastname: Espinosa
authors.forename: Georg
authors.initials: G
authors.lastname: Schmitz
authors.forename: Iñaki
authors.initials: I
authors.lastname: Ameijeiras
authors.forename: Pedro
authors.initials: P
authors.lastname: Masegosa
authors.forename: Manuel
authors.initials: M
authors.lastname: Domínguez
mesh_terms: D025802:Electric Capacitance; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008904:Miniaturization; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D014159:Transducers; D014463:Ultrasonography / Q000295:instrumentation* / Q000379:methods