title: From MEMS to NEMS with carbon.
abstract: Our work in carbon-microelectromechanical systems (C-MEMS) suggests that C-MEMS might provide a very interesting material and microfabrication approach to battery miniaturization, active DNA arrays and a wide variety of chemical and biological sensors. In C-MEMS, photoresist is patterned by photolithography and subsequently pyrolyzed at high-temperatures in an oxygen-free environment. We established that it is possible to use C-MEMS to create very high-aspect ratio carbon structures (e.g. posts with an aspect ratio >10), suspended carbon plates and suspended carbon nanowires (C-NEMS). By changing the lithography conditions, soft and hard baking times and temperatures, additives to the resist, pyrolysis time, temperature and environment, C-MEMS permits a wide variety of interesting new MEMS and NEMS applications that employ structures having a wide variety of shapes, resistivities and mechanical properties. We also demonstrate that arrays of high-aspect ratio carbon posts can be charged/discharged with Li and this enables the fabrication of a smart switchable array of batteries.
authors.affiliation: Department of Mechanical and Aerospace Engineering, University of California at Irvine, Irvine, CA 92697, USA. chunleiw@uci.edu
authors.forename: Chunlei
authors.initials: C
authors.lastname: Wang
authors.forename: Marc
authors.initials: M
authors.lastname: Madou
mesh_terms: D001672:Biocompatible Materials / Q000032:analysis / Q000737:chemistry*; D015374:Biosensing Techniques / Q000295:instrumentation / Q000379:methods; D002244:Carbon / Q000737:chemistry*; D003460:Crystallization / Q000379:methods*; D004563:Electrochemistry / Q000295:instrumentation / Q000379:methods*; D036103:Nanotechnology / Q000295:instrumentation / Q000379:methods*; D037742:Nanotubes, Carbon / Q000737:chemistry* / Q000648:ultrastructure*; D010781:Photography / Q000379:methods*; D013499:Surface Properties
chemical_list: D001672:Biocompatible Materials; D037742:Nanotubes, Carbon; D002244:Carbon