An improved thick-film piezoelectric material by powder blending and enhanced processing parameters.
This paper details improvements of the d33 co-efficient for thick-film lead zirconate titanate (PZT) layers. In particular, the effect of blending ball and attritor milled powders has been investigated. Mathematical modeling of the film structure has produced initial experimental values for powder combination percentages. A range of paste formulations between 8:1 and 2:1 ball to attritor milled PZT powders by weight have been mixed into a screen-printable paste. Each paste contains 10% by weight of lead borosilicate glass and an appropriate quantity of solvent to formulate a screen printable thixotropic paste. A d33 of 63.5 pC/N was obtained with a combination of 4:1 ball milled to attritor milled powder by weight. The improved paste combines the high d33 values of ball and the consistency of attritor milled powder. The measured d33 coefficient was further improved to 131 pC/N by increasing the furnace firing profile to 1000 degrees C, increasing the poling temperature to 200 degrees C, and using gold cermet and polymer electrodes that avoid silver migration effects and repeated firing of the PZT film.
Torah
Russel
R
Department of Electronics and Computer Science, University of Southampton, Southampton, Hampshire, UK.
Beeby
Steve P
SP
White
Neil M
NM