[Determination of chlorosilanes by gas chromatography].
Chlorosilanes are the essential raw material of SiC fibre made by "CVD (chemical vapour deposition)" method. The purity of chlorosilane affects the quality of SiC fibre obtained. Therefore, a simple and reliable method for the determination of the constituent of chlorosilane is needed. A gas chromatographic method for quantitative analysis of chlorosilane is described in this paper. The gas chromatographic conditions were as follows: column, 10% diethyl phthalate on 6201 support (60-80 mesh), 3m x 5mm i.d. stainless-steel column; column temp., 60 degrees C; injection temp., 110 degrees C; thermal conductivity detector temp., 140 degrees C carrier gas H2 with flow rate of 60 mL/min. The results show that the method is simple and rapid, and has good precision and reproducibility. The coefficient of variation of the method was less than 1% (n = 6).
Shen
Y
Y
Institute of Metal Research, the Chinese Academy of Sciences, Shenyang, 110015.
Qu
J
J
Zhang
H
H