title: Development of a femtosecond micromachining workstation by use of spectral interferometry.
abstract: A workstation that permits real-time measurement of ablation depth while micromachining with femtosecond laser pulses is demonstrated. This method incorporates the unamplified pulse train that is available in a chirped-pulse amplification system as the probe in an arrangement that uses spectral interferometry to measure the ablation depth while cutting with the amplified pulse in thin metal films.
authors.affiliation: Department of Physics, Colorado School of Mines, Golden, Colorado 80401, USA. sbera@mines.edu
authors.forename: Sudipta
authors.initials: S
authors.lastname: Bera
authors.forename: A J
authors.initials: AJ
authors.lastname: Sabbah
authors.forename: Charles G
authors.initials: CG
authors.lastname: Durfee
authors.forename: Jeff A
authors.initials: JA
authors.lastname: Squier
mesh_terms: D004867:Equipment Design / Q000295:instrumentation* / Q000379:methods; D019544:Equipment Failure Analysis; D007221:Industry / Q000295:instrumentation* / Q000379:methods; D007368:Interferometry / Q000295:instrumentation* / Q000379:methods; D007834:Lasers; D008420:Manufactured Materials; D013057:Spectrum Analysis / Q000295:instrumentation* / Q000379:methods