[Biochip micromachining technology adopting laser technology].
This paper deals with the manufacturing state of the art of biochip, and introduces a new method--laser microtechnology, including its developing procedure, characteristics and function in biochip production.
Zhang
Yu
Y
Beijing Polytechnic University, Beijing 100022, China.
Wang
Shengqi
S
Zuo
Tiechuan
T
Chen
Tao
T
D015374:Biosensing Techniques / Q000295:instrumentation / Q000379:methods; D017076:Computer-Aided Design; D004867:Equipment Design; D056656:Lab-On-A-Chip Devices; D007834:Lasers; D046208:Microchip Analytical Procedures / Q000379:methods*; D008846:Micromanipulation