[Effect of oxygen partial pressure on the band-gap of the TiO2 films prepared by DC reactive sputtering].
TiO2 films have been deposited on glass substrates using DC reactive magnetron sputtering at different oxygen partial pressures from 0.10 to 0.65 Pa. The photoluminescence (PL) spectra of the films were recorded. The results of the PL spectra showed that there were three emission peaks at 370, 472 and 514 nm for the films sputtered at 0.35 and 0.65 Pa, and there were two peaks at 370 and 490 nm for the films sputtered at 0.10 and 0.15 Pa. The band-gap for the films was 3.35 eV. For the films sputtered at 0.35 and 0.65 Pa there were two defect energy levels at 2.63 and 2.41 eV, corresponding to 0.72 and 0.94 eV below conduction band for the band-gap, respectively. For the films sputtered at 0.10 and 0.15 Pa, there was an energy band formed between 3.12 and 2.06 eV, corresponding to 0.23 and 1.29 eV below the conduction band. With increasing the oxygen partial pressure, the defect energy band changed to two energy levels, and the energy levels nearly disappeared for the film sputtered at 0.65 Pa of oxygen partial pressure.
Zhao
Qing-nan
QN
The Key Laboratory of Silicate Materials Science and Engineering, Ministry of Education, Wuhan University of Technology, Wuhan 430070, China.
Li
Chun-ling
CL
Liu
Bao-shun
BS
Zhao
Xiu-jian
XJ