Development of a femtosecond micromachining workstation by use of spectral interferometry.
A workstation that permits real-time measurement of ablation depth while micromachining with femtosecond laser pulses is demonstrated. This method incorporates the unamplified pulse train that is available in a chirped-pulse amplification system as the probe in an arrangement that uses spectral interferometry to measure the ablation depth while cutting with the amplified pulse in thin metal films.
Bera
Sudipta
S
Department of Physics, Colorado School of Mines, Golden, Colorado 80401, USA. sbera@mines.edu
Sabbah
A J
AJ
Durfee
Charles G
CG
Squier
Jeff A
JA
D004867:Equipment Design / Q000295:instrumentation* / Q000379:methods; D019544:Equipment Failure Analysis; D007221:Industry / Q000295:instrumentation* / Q000379:methods; D007368:Interferometry / Q000295:instrumentation* / Q000379:methods; D007834:Lasers; D008420:Manufactured Materials; D013057:Spectrum Analysis / Q000295:instrumentation* / Q000379:methods