title: Versatile micromirror with a multimovement mode.
abstract: A 3 x 3 micromirror array has been designed and successfully fabricated by multilayer silicon surface micromaching technology. It is composed of a bottom electrode, a supporting part, and a mirror plate and can modulate both phase and amplitude of incident light. The maximum deflection length along the vertical direction of the mirror plate is 2 microm, and the rotation angles about the Y and X axes are +/-2.3 degrees and +/-1.45 degrees, respectively; one can obtain an even larger deflection by simply increasing the thickness of the sacrificial layers.
authors.affiliation: Department of Optoelectronics Engineering, Huazhong University of Science and Technology, Wuhan 430074, China. yhb_hust@yahoo.com
authors.forename: Hongbin
authors.initials: H
authors.lastname: Yu
authors.forename: Haiqing
authors.initials: H
authors.lastname: Chen
authors.forename: Sai
authors.initials: S
authors.lastname: Fu