[The experiment study on the resolution of electro-optical imaging system at EUV wave band].
An imaging system based on a Microchannel Plate (MCP) detector was designed to image the Extreme Ultraviolet (EUV) light. The images of a 3 mm-width-slit were presented by this imaging system at the wavelengths of 13, 17.1, 19.5 and 30.4 nm respectively. Their corresponding spatial resolutions are 85, 120, 182 and 495 microm respectively. The best is 85 microm, corresponding to 13 nm. Moreover, the shorter the wavelength, the better the spatial resolution. So is the brightness of the image.
Xue
Ling-ling
LL
State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Science, Changchun 130022, China.
Chen
Bo
B
Li
Yu-min
YM