Wafer-scale periodic nanohole arrays templated from two-dimensional nonclose-packed colloidal crystals.
This communication reports a simple yet versatile nonlithographic approach for fabricating wafer-scale periodic nanohole arrays from a large variety of functional materials, including metals, semiconductors, and dielectrics. Spin-coated two-dimensional (2D) nonclose-packed colloidal crystals are used as first-generation shadow masks during physical vapor deposition to produce isolated nanohole arrays. These regular nanoholes can then be used as second-generation etching masks to create submicrometer void arrays in the substrates underneath. Complex patterns with micrometer-scale resolution can be made by standard microfabrication techniques for potential device applications. These 2D-ordered nanohole arrays may find important technological applications ranging from subwavelength optics to interferometric biosensors.
Jiang
Peng
P
Corning Science and Technology, Corning Incorporated, Corning, New York 14831, USA. pjiang@princeton.edu
McFarland
Michael J
MJ
D015374:Biosensing Techniques; D003102:Colloids / Q000737:chemistry*; D003460:Crystallization; D036103:Nanotechnology / Q000295:instrumentation / Q000379:methods*
D003102:Colloids