[Studies on the spectral characteristics of argon in a novel microwave plasma enhanced glow discharge source].
This paper describes a investigation about the spectral characteristics of argon in a novel microwave plasma enhanced glow discharge source. In different discharge conditions, such as glow discharge, microwave plasma and microwave plasma enhanced glow discharge, there are different distributions of argon spectral lines.
Li
Y
Y
Department of Chemistry, Jilin University, 130023 Changchun.
Du
Z
Z
Duan
Y
Y
Zhang
H
H
Jin
Q
Q
Liu
H
H