[Studies on the general properties of a novel microwave plasma enhanced glow discharge source].
This paper introduced a novel microwave plasma enhanced glow descharge source, the structure design and operation were decribed, and the mutual effects of the main characters, such as pressure, current, voltage, microwave power and sputtering rates were also investigated in details.
Li
Y
Y
Department of Chemisrty, Jilin University, 130023 Changchun.
Du
Z
Z
Duan
Y
Y
Zhang
H
H
Jin
Q
Q
Liu
H
H