Measuring the surface roughness of sputtered coatings by microgravimetry.
A novel application of quartz crystal microgravimetry is described to enable determination of the roughness of native and sputtered oxide coatings. The technique is applicable to coatings that may be too rough for accurate atomic force microscopic imaging where measurements may be limited by the dimensions of the probe tip.
Carolus
Michael D
MD
Department of Chemistry, Princeton University, Princeton, NJ 08544-1009, USA.
Bernasek
Steven L
SL
Schwartz
Jeffrey
J