title: Two-wavelength phase-shifting interferometry with a superimposed grating displayed on an electrically addressed spatial light modulator.
abstract: A two-wavelength moire phase-shifting interferometer that uses a superimposed grating has been developed. The optical phase shifts for the two wavelengths are given by digital phase shifts of a superimposed grating displayed on a liquid-crystal spatial light modulator. A phase shift of the moire fringe is achieved by equal phase shifts with opposite signs in the two gratings. A moire phase-shifting interferometer with no moving parts and no requirement for calibration of the value of the phase shifts was obtained. Our experimental result shows measurements of the profile of a step object with a 2.65-microm synthetic wavelength.
authors.affiliation: National Institute of Advanced Industrial Science and Technology, Tsukuba Central 3, 1-1-1 Umezono, Tsukuba, Ibaraki 305-8563, Japan. y-bitou@aist.go.jp
authors.forename: Youichi
authors.initials: Y
authors.lastname: Bitou