[Determination of electron density in Ar-air mixed coolant gas ICP].
The lateral distribution of electron number density at 0, 2, 5, 10 mm above the load coil in Ar-air mixed coolant gas ICP was measured with Stark broadening method of Hbeta line (486.1 nm) and some of the lateral distribution was converted into radial distribution by Abel inversion under the condition similar to that in the low power Ar-ICP. The results show that the distribution of electron number in Ar-air mixed coolant gas ICP is similar to that in Ar-ICP and exhibit off axis maxima. When a lot of air was added to the coolant, the positions of the off axis maxima would near the axis. The electron number density reached maximum and was higher than that in Air-ICP as 5%-10% air was added to the coolant.
Li
Y
Y
Department of Chemistry, Trace Elements Institute of Tongji University, 200092 Shanghai.
Zeng
X
X
Wang
S
S
Lei
L
L
Ni
Y
Y