GaAs-based multiple-quantum-well spatial light modulators fabricated by a wafer-scale process.
The design, fabrication, and characterization of large, two-dimensional multiple-quantum-well modulator arrays are presented. Such arrays present a speed advantage compared with competing technologies such as liquid crystals and micromirrors, which are intrinsically limited to the kilohertz range. We discuss the design compromises to reach high-contrast, low-voltage swing optical structures compatible with complementary metal-oxide semiconductor-based integrated circuits and present experimental results. Contrast ratio of 5:1 (limited by the fill factor), variations in uniformity below 1nm, and frame rates in excess of 10kHz are demonstrated. Technology maturity for volume production is also discussed.
Junique
Stéphane
S
Acreo AB, Isafjordsgatan 22, Electrun 236, Kista 16440, Sweden. stephane.junique@acreo.se
Wang
Qin
Q
Almqvist
Susanne
S
Guo
Jianhua
J
Martijn
Henk
H
Noharet
Bertrand
B
Andersson
Jan Y
JY