title: GaAs-based multiple-quantum-well spatial light modulators fabricated by a wafer-scale process.
abstract: The design, fabrication, and characterization of large, two-dimensional multiple-quantum-well modulator arrays are presented. Such arrays present a speed advantage compared with competing technologies such as liquid crystals and micromirrors, which are intrinsically limited to the kilohertz range. We discuss the design compromises to reach high-contrast, low-voltage swing optical structures compatible with complementary metal-oxide semiconductor-based integrated circuits and present experimental results. Contrast ratio of 5:1 (limited by the fill factor), variations in uniformity below 1nm, and frame rates in excess of 10kHz are demonstrated. Technology maturity for volume production is also discussed.
authors.affiliation: Acreo AB, Isafjordsgatan 22, Electrun 236, Kista 16440, Sweden. stephane.junique@acreo.se
authors.forename: Stéphane
authors.initials: S
authors.lastname: Junique
authors.forename: Qin
authors.initials: Q
authors.lastname: Wang
authors.forename: Susanne
authors.initials: S
authors.lastname: Almqvist
authors.forename: Jianhua
authors.initials: J
authors.lastname: Guo
authors.forename: Henk
authors.initials: H
authors.lastname: Martijn
authors.forename: Bertrand
authors.initials: B
authors.lastname: Noharet
authors.forename: Jan Y
authors.initials: JY
authors.lastname: Andersson