[Determination of Sn/In in the ITO film by emission spectral method].
In the film sample analysis, the consstence within standard sample and analytical sample is discussed by emission spectral method. Using spark light source and moving electrode, the content of Sn/In in the ITO film is obtained by repeatedly exposing four samples. The accuracy and precision are satisfying.
Guo
Q
Q
Department of Physics, Hebei University, 071002 Baoding.
Zhang
J
J
Yang
Z
Z