Crystallographic analysis of thin specimens.
Electron backscattering diffraction (EBSD) is commonly used on bulk samples for crystallographic material characterization. In this work, the technique was applied on transmission electron microscopy (TEM)-type thin specimens, prepared with a focused ion beam. Orientation maps were successfully collected on specimens made of a Cu3Au copper-gold alloy. As compared to EBSD analysis on a bulk specimen, an improved pattern quality and a high spatial resolution (well below 10 nm) were obtained. Furthermore, a clear improvement of the signal-to-noise ratio with decreasing sample thickness was observed.
Sivel
V G M
VG
Netherlands Institute for Metals Research, Rotterdamseweg 137, 2628 AL Delft, The Netherlands. V.G.M.sivel@tnw.tudelft.nl
Tichelaar
F D
FD
Mohdadi
H
H
Alkemade
P F A
PF
Zandbergen
H W
HW