title: Crystallographic analysis of thin specimens.
abstract: Electron backscattering diffraction (EBSD) is commonly used on bulk samples for crystallographic material characterization. In this work, the technique was applied on transmission electron microscopy (TEM)-type thin specimens, prepared with a focused ion beam. Orientation maps were successfully collected on specimens made of a Cu3Au copper-gold alloy. As compared to EBSD analysis on a bulk specimen, an improved pattern quality and a high spatial resolution (well below 10 nm) were obtained. Furthermore, a clear improvement of the signal-to-noise ratio with decreasing sample thickness was observed.
authors.affiliation: Netherlands Institute for Metals Research, Rotterdamseweg 137, 2628 AL Delft, The Netherlands. V.G.M.sivel@tnw.tudelft.nl
authors.forename: V G M
authors.initials: VG
authors.lastname: Sivel
authors.forename: F D
authors.initials: FD
authors.lastname: Tichelaar
authors.forename: H
authors.initials: H
authors.lastname: Mohdadi
authors.forename: P F A
authors.initials: PF
authors.lastname: Alkemade
authors.forename: H W
authors.initials: HW
authors.lastname: Zandbergen