Easy-to-prepare assembly array of Tungsten microelectrodes.
This paper provides a detailed process flow for fabricating an easy-to-prepare, inexpensive, dense array of tungsten microelectrodes. We designed the process flow to minimize routine tasks by separating an initial preparation of a master mold from a routine preparation of substrate replication, array assembly and tip processing. Sandblast processing first produced a glass mold with a pattern of a series of protruding lines at a requested interval of a few hundred micrometers. Copying the groove pattern onto polystyrene mass-produced a replica substrate. Tungsten probes were then aligned on the substrate, and the tips of probes were finely processed in the block.
Takahashi
Hirokazu
H
Department of Engineering Synthesis, Graduate School of Engineering, The University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo, Japan. hiro@hnl.t.u-tokyo.ac.jp
Suzurikawa
Jun
J
Nakao
Masayuki
M
Mase
Fumio
F
Kaga
Kimitaka
K
D000200:Action Potentials / Q000502:physiology*; D000818:Animals; D001303:Auditory Cortex / Q000502:physiology*; D004567:Electrodes, Implanted; D004569:Electroencephalography / Q000295:instrumentation* / Q000379:methods; D004867:Equipment Design; D019544:Equipment Failure Analysis; D005072:Evoked Potentials, Auditory / Q000502:physiology; D008839:Microelectrodes; D051381:Rats; D017208:Rats, Wistar; D014414:Tungsten
D014414:Tungsten