title: Three-dimensional photonic devices fabricated in glass by use of a femtosecond laser oscillator.
abstract: Three-dimensional photonic waveguide devices are fabricated in glass by use of femtosecond pulses from an extended-cavity laser oscillator. Three-dimensional devices, including a symmetric three-waveguide directional coupler and a three-dimensional microring resonator, are fabricated and tested. Waveguides can be fabricated at depths of approximately 1 mm inside a glass substrate, thus demonstrating the capability of achieving dramatic increases in device density. These results demonstrate the potential to fabricate new classes of devices that are not possible in two dimensions.
authors.affiliation: Department of Electrical Engineering and Computer Science and Research Laboratory of Electronics, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139, USA.
authors.forename: A M
authors.initials: AM
authors.lastname: Kowalevicz
authors.forename: V
authors.initials: V
authors.lastname: Sharma
authors.forename: E P
authors.initials: EP
authors.lastname: Ippen
authors.forename: J G
authors.initials: JG
authors.lastname: Fujimoto
authors.forename: K
authors.initials: K
authors.lastname: Minoshima