Enhanced readout signal of superresolution near-field structure disks by control of the size and distribution of metal nanoclusters.
We present a study in which we enhance the carrier-to-noise ratio of a superresolution near-field structure (super-RENS) disk to read below 100-nm marks by implementing a mask layer comprising a Au nanocluster-embedded dielectric film. Various Au nanocluster-embedded mask layers are fabricated by a radio-frequency cosputtering process, and the size and distribution of Au nanoclusters are controlled. To verify the enhancement of the various films for super-RENS disk applications, the sensitivity enhancement of plasmonic gas sensing is demonstrated.
Yih
Jenq-Nan
JN
Institute of Optical Sciences, National Central University, Chung-Li 320, Taiwan.
Hsu
Wei-Chih
WC
Tsai
Song-Yeu
SY
Chen
Shean-Jen
SJ