Directed assembly of block copolymer blends into nonregular device-oriented structures.
Self-assembly is an effective strategy for the creation of periodic structures at the nanoscale. However, because microelectronic devices use free-form design principles, the insertion point of self-assembling materials into existing nanomanufacturing processes is unclear. We directed ternary blends of diblock copolymers and homopolymers that naturally form periodic arrays to assemble into nonregular device-oriented structures on chemically nanopatterned substrates. Redistribution of homopolymer facilitates the defect-free assembly in locations where the domain dimensions deviate substantially from those formed in the bulk. The ability to pattern nonregular structures using self-assembling materials creates new opportunities for nanoscale manufacturing.
Stoykovich
Mark P
MP
Department of Chemical and Biological Engineering and Center for Nanotechnology, University of Wisconsin (UW), Madison, WI 53706, USA.
Müller
Marcus
M
Kim
Sang Ouk
SO
Solak
Harun H
HH
Edwards
Erik W
EW
de Pablo
Juan J
JJ
Nealey
Paul F
PF