title: Enhanced readout signal of superresolution near-field structure disks by control of the size and distribution of metal nanoclusters.
abstract: We present a study in which we enhance the carrier-to-noise ratio of a superresolution near-field structure (super-RENS) disk to read below 100-nm marks by implementing a mask layer comprising a Au nanocluster-embedded dielectric film. Various Au nanocluster-embedded mask layers are fabricated by a radio-frequency cosputtering process, and the size and distribution of Au nanoclusters are controlled. To verify the enhancement of the various films for super-RENS disk applications, the sensitivity enhancement of plasmonic gas sensing is demonstrated.
authors.affiliation: Institute of Optical Sciences, National Central University, Chung-Li 320, Taiwan.
authors.forename: Jenq-Nan
authors.initials: JN
authors.lastname: Yih
authors.forename: Wei-Chih
authors.initials: WC
authors.lastname: Hsu
authors.forename: Song-Yeu
authors.initials: SY
authors.lastname: Tsai
authors.forename: Shean-Jen
authors.initials: SJ
authors.lastname: Chen