title: Microsystem technology as a road from macro to nanoworld.
abstract: Tremendous progress of microelectronic technology observed within last 40 years is closely related to even more remarkable progress of technological tools. It is important to note however, that these new tools may be used for fabrication of diverse multifunctional structures as well. Such devices, called MEMS (Micro-Electro-Mechanical-System) and MOEMS (Micro-Electro-Opto-Mechanical-System) integrate microelectronic and micromechanical structures in one system enabling interdisciplinary application, with most interesting and prospective being bio-medical investigations. Development of these applications requires however cooperation of multidisciplinary team of specialists, covering broad range of physics, (bio) chemistry and electronics, not mentioning medical doctors and other medical specialists. Thus, dissemination, of knowledge about existing processing capabilities is of key importance. In this paper, examples of various applications of microelectronic technology for fabrication of Microsystems which may be used for medicine and chemistry, will be presented. Besides, information concerning a design and technology potential available in poland and new, emerging opportunities will be given.
authors.affiliation: Silicon Microsystem and Nanostructure Technology Department, Institute of Electron Technology, Al. Lotników 32/46, Warsaw 02-668, Poland. grabiec@ite.waw.pl
authors.forename: Piotr
authors.initials: P
authors.lastname: Grabiec
authors.forename: Krzysztof
authors.initials: K
authors.lastname: Domański
authors.forename: Paweł
authors.initials: P
authors.lastname: Janus
authors.forename: Michał
authors.initials: M
authors.lastname: Zaborowski
authors.forename: Bogdan
authors.initials: B
authors.lastname: Jaroszewicz
mesh_terms: D008832:Microchemistry / Q000295:instrumentation*; D008839:Microelectrodes; D008855:Microscopy, Electron, Scanning; D036103:Nanotechnology / Q000379:methods; D013499:Surface Properties