The mechanism of chemical vapor deposition of cubic boron nitride films from fluorine-containing species.
Center Of Super-Diamond and Advanced Films (COSDAF) and Department of Physics and Materials Science, City University of Hong Kong, Kowloon, Hong Kong SAR, China. apwjzh@cityu.edu.hk
W J
WJ
Zhang
C Y
CY
Chan
X M
XM
Meng
M K
MK
Fung
I
I
Bello
Y
Y
Lifshitz
S T
ST
Lee
X
X
Jiang