The mechanism of chemical vapor deposition of cubic boron nitride films from fluorine-containing species.
Zhang
W J
WJ
Center Of Super-Diamond and Advanced Films (COSDAF) and Department of Physics and Materials Science, City University of Hong Kong, Kowloon, Hong Kong SAR, China. apwjzh@cityu.edu.hk
Chan
C Y
CY
Meng
X M
XM
Fung
M K
MK
Bello
I
I
Lifshitz
Y
Y
Lee
S T
ST
Jiang
X
X