Experimental evaluation of a spherical aberration-corrected TEM and STEM.
We have successfully developed a spherical aberration (Cs)-corrected electron microscope for probe- and image-forming systems using hexapole correctors. The performance of the microscope has been evaluated experimentally. The point resolution attained using the image-forming Cs-corrector is better than 0.12 nm. For scanning transmission electron microscopy, the Ronchigram flat area was >40 mrad in half-angle using the probe-forming Cs-corrector.
Sawada
Hidetaka
H
Tomita
Takeshi
T
Naruse
Mikio
M
Honda
Toshikazu
T
Hambridge
Paul
P
Hartel
Peter
P
Haider
Maximilian
M
Hetherington
Crispin
C
Doole
Ron
R
Kirkland
Angus
A
Hutchison
John
J
Titchmarsh
John
J
Cockayne
David
D