Multilayer optical thin films for use at terahertz frequencies: method of fabrication.
A new method of fabricating multilayer optical coatings used at terahertz frequencies has been developed. Using plasma-enhanced chemical-vapor deposition, a multilayer antireflection coating for germanium optics at terahertz frequencies was fabricated. The coating consists of amorphous silicon and silicon-oxide layers. The transmittance and structure of the coating were experimentally investigated. The transmittance spectrum of the coating on the Ge substrate shows a wideband antireflection behavior in the 40-120 cm(-1) region.
Hosako
Iwao
I
National Institute of Information and Communications Technology, 4-2-1 Numuikita, Koganei 184-8795, Japan. hosako@nict.go.jp