Experimental evaluation of a spherical aberration-corrected TEM and STEM.
We have successfully developed a spherical aberration (Cs)-corrected electron microscope for probe- and image-forming systems using hexapole correctors. The performance of the microscope has been evaluated experimentally. The point resolution attained using the image-forming Cs-corrector is better than 0.12 nm. For scanning transmission electron microscopy, the Ronchigram flat area was >40 mrad in half-angle using the probe-forming Cs-corrector.
Hidetaka
H
Sawada
Takeshi
T
Tomita
Mikio
M
Naruse
Toshikazu
T
Honda
Paul
P
Hambridge
Peter
P
Hartel
Maximilian
M
Haider
Crispin
C
Hetherington
Ron
R
Doole
Angus
A
Kirkland
John
J
Hutchison
John
J
Titchmarsh
David
D
Cockayne