Design and fabrication of a microlens on the sidewall of an optical fiber with a metallized 45 degrees end face.
We propose a method for designing a self-aligned microlens. We have improved its fabrication by employing metallization on a 45 degrees angled surface of the optical fiber. We designed the focal length of the microlens to be 14.0 microm, considering the dimensions of a scanning near-field optical microscopy (SNOM) probe, and we calculated possible dimensions of diameter and height by the ray-tracing method. The modeling of lens formation was also carried out with two assumptions: no volume change and no movement of peripheral parts of the photoresist (PR) on the substrate during reflow. To fabricate a microlens of diameter 16.0 microm and height 5.0 microm we exposed a coated PR to UV light guided into the optical fiber, followed by optimized reflow of 150 degrees C for 2 min. For this microlens the focal length and the beam waist were 14.0 and 1.4 microm, respectively. This lens can be used for compact optical data storage.
Kim
Myun-Sik
MS
MEMS Laboratory, Department of Mechanics, Gwangju Institute of Science and Technology, 1 Oryong-dong, Buk-gu, Gwangju 500-712, Korea.
Jo
Kyoung-Woo
KW
Lee
Jong-Hyun
JH