Simple, real-time method for removing the cyclic error of a homodyne interferometer with a quadrature detector system.
The cyclic error of a homodyne interferometer is caused mainly by phase mixing due to the imperfection of polarizing optical components such as polarizing beam splitters. In Appl. Opt. 43, 2443 (2004), we concentrated on the relationship between these imperfect optical characteristics and the cyclic error and found the preamplifier-gains condition for removing the cyclic error. Here we demonstrate the cyclic error correction method experimentally and show that the method can be applied in real time. We obtained 0.04-nm cyclic errors, with a standard deviation above 5 microm.
Keem
Taeho
T
National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology, AIST Tsukuba Central 3, 1-1-1 Umezona, Tsukuba, Ibaraki 305-8563, Japan. t-kimu@aist.go.jp
Gonda
Satoshi
S
Misumi
Ichiko
I
Huang
Qianxiang
Q
Kurosawa
Tomizo
T
D000465:Algorithms; D016477:Artifacts; D003199:Computer Systems; D004867:Equipment Design; D019544:Equipment Failure Analysis; D007368:Interferometry / Q000295:instrumentation* / Q000379:methods*; D017711:Nonlinear Dynamics