[Development of soft X-ray and vacuum ultraviolet spectrum sources].
The soft X-ray and vacuum ultraviolet sources developed in CIOMP are presented. The wall-stabilized argon arc source with spectrum stability and repeatability of +/-0.3% is applied to the calibration of spectrum intensity distribution of the vacuum ultraviolet instruments as an absolute standard source. The Penning source, duobplasma source and hollow cathode source are able to produce atomic and ionic line spectra as a wavelength standard source, which covers a few nanometers to several tens nanometers with spectrum radiation stability and repeatability of +/-1.0%. In particular, the low debris laser produced plasma source with liquid aerosol spray target recently developed can emit stronger soft X-ray for soft X-ray lithography and metrology, which has a transfer efficiency as high as 0.75%/2pi x sr/2% bandwidth.
Chen
Bo
B
State Key Lab of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130022, China.
Ni
Qi-liang
QL
Cao
Jian-lin
JL
Li
Fu-tian
FT
Chen
Xing-dan
XD
D000535:Aluminum / Q000737:chemistry; D001128:Argon / Q000737:chemistry; D055664:Electrochemical Techniques / Q000295:instrumentation / Q000379:methods; D004566:Electrodes; D007834:Lasers; D013052:Spectrometry, X-Ray Emission / Q000295:instrumentation / Q000379:methods*; D013056:Spectrophotometry, Ultraviolet / Q000295:instrumentation / Q000379:methods*; D014466:Ultraviolet Rays; D014618:Vacuum; D014965:X-Rays
D001128:Argon; D000535:Aluminum