title: Near-infrared spectroscopy for monitoring wafer etchant solution using a teflon tube.
authors.affiliation: Department of Chemistry, College of Natural Sciences, Hanyang University, Haengdang-Dong, Seongdong-Gu, Seoul, Korea 133-791.
authors.forename: Youngbok
authors.initials: Y
authors.lastname: Lee
authors.forename: Sanghee
authors.initials: S
authors.lastname: Nah
authors.forename: Hankyu
authors.initials: H
authors.lastname: Namkung
authors.forename: Hoeil
authors.initials: H
authors.lastname: Chung
mesh_terms: D045424:Complex Mixtures / Q000032:analysis / Q000737:chemistry; D006858:Hydrofluoric Acid / Q000032:analysis* / Q000737:chemistry; D011138:Polytetrafluoroethylene; D012666:Semiconductors; D012996:Solutions; D012997:Solvents / Q000032:analysis / Q000737:chemistry; D013048:Specimen Handling / Q000295:instrumentation / Q000379:methods*; D017550:Spectroscopy, Fourier Transform Infrared / Q000295:instrumentation / Q000379:methods*; D014867:Water / Q000032:analysis* / Q000737:chemistry
chemical_list: D045424:Complex Mixtures; D012996:Solutions; D012997:Solvents; D014867:Water; D011138:Polytetrafluoroethylene; D006858:Hydrofluoric Acid