Minimizing artifact formation in magnetorheological finishing of chemical vapor deposition ZnS flats.
The polishing performance of magnetorheological (MR) fluids prepared with a variety of magnetic and nonmagnetic ingredients was studied on four types of initial surface for chemical vapor deposition (CVD) ZnS flats from domestic and foreign sources. The results showed that it was possible to greatly improve smoothing performance of magnetorheological finishing (MRF) by altering the fluid composition, with the best results obtained for nanoalumina abrasive used with soft carbonyl iron and altered MR fluid chemistry. Surface roughness did not exceed 20 nm peak to valley and 2 nm rms after removal of 2 microm of material. The formation of orange peel and the exposure of a pebblelike structure inherent in ZnS from the CVD process were suppressed.
Kozhinova
Irina A
IA
University of Rochester, 240 East River Road, Rochester, New York 14623, USA. ikoz@lle.rochester.edu
Romanofsky
Henry J
HJ
Maltsev
Alexander
A
Jacobs
Stephen D
SD
Kordonski
William I
WI
Gorodkin
Sergei R
SR