title: Transient topographies of ion patterned Si(111).
abstract: The surface of high fluence ion-sputtered Si(111) was found to exhibit a rich variety of transient one- and two-dimensional topographies that may be exploited as tunable self-organized arrays of nanostructures. Such transient effects are only partially described by analytical models of sputter patterning. However, a discrete atom kinetic Monte Carlo simulation model incorporating curvature-dependent sputtering and surface diffusion reproduces many aspects of the transient morphological evolution, and clarifies the minimal model of sputter patterning.
authors.affiliation: Department of Materials Science and Engineering, Johns Hopkins University, Baltimore, Maryland 21218, USA.
authors.forename: Ari-David
authors.initials: AD
authors.lastname: Brown
authors.forename: Jonah
authors.initials: J
authors.lastname: Erlebacher
authors.forename: Wai-Lun
authors.initials: WL
authors.lastname: Chan
authors.forename: Eric
authors.initials: E
authors.lastname: Chason