Role of the thermophoretic force on the transport of nanoparticles in dusty silane plasmas.
A comparison, based on numerical modeling, is made between the different forces experienced by nanoparticles present in a low pressure capacitively coupled parallel-plate silane (Si H4 ) discharge. We investigate in particular the influence of the thermophoretic force on the spatial distribution of the nanoparticle density profiles, due to a thermal gradient in gas temperature induced by heating or cooling of the electrodes. A series of simulations with a one-dimensional fluid model are performed with asymmetrical variation of the electrode temperatures. It appears that the resulting density profile of the nanoparticles experiences a significant shift towards the cooler electrode as soon as a temperature difference is applied. Thus thermophoresis is capable of influencing the force balance of suspended nanoparticles in the plasma, even at relatively small electrode temperature differences.
De Bleecker
Kathleen
K
PLASMANT, Department of Chemistry, University of Antwerp, Universiteitsplein 1, 2610 Wilrijk, Belgium. kathleen.debleeker@ua.ac.be
Bogaerts
Annemie
A
Goedheer
Wim
W