title: Nanoimaging with a compact extreme-ultraviolet laser.
abstract: Images with a spatial resolution of 120-150 nm were obtained with 46.9 nm light from a compact capillary-discharge laser by use of the combination of a Sc-Si multilayer-coated Schwarzschild condenser and a free-standing imaging zone plate. The results are relevant to the development of compact extreme-ultraviolet laser-based imaging tools for nanoscience and nanotechnology.
authors.affiliation: National Science Foundation Engineering Research Center for Extreme Ultraviolet Science and Technology, and Department of Electrical and Computer Engineering, Colorado State University, Fort Collins, Colorado 80523, USA. vaschen@engr.colostate.edu
authors.forename: G
authors.initials: G
authors.lastname: Vaschenko
authors.forename: F
authors.initials: F
authors.lastname: Brizuela
authors.forename: C
authors.initials: C
authors.lastname: Brewer
authors.forename: M
authors.initials: M
authors.lastname: Grisham
authors.forename: H
authors.initials: H
authors.lastname: Mancini
authors.forename: C S
authors.initials: CS
authors.lastname: Menoni
authors.forename: M C
authors.initials: MC
authors.lastname: Marconi
authors.forename: J J
authors.initials: JJ
authors.lastname: Rocca
authors.forename: W
authors.initials: W
authors.lastname: Chao
authors.forename: J A
authors.initials: JA
authors.lastname: Liddle
authors.forename: E H
authors.initials: EH
authors.lastname: Anderson
authors.forename: D T
authors.initials: DT
authors.lastname: Attwood
authors.forename: A V
authors.initials: AV
authors.lastname: Vinogradov
authors.forename: I A
authors.initials: IA
authors.lastname: Artioukov
authors.forename: Y P
authors.initials: YP
authors.lastname: Pershyn
authors.forename: V V
authors.initials: VV
authors.lastname: Kondratenko
mesh_terms: D004867:Equipment Design; D019544:Equipment Failure Analysis; D007089:Image Enhancement / Q000295:instrumentation* / Q000379:methods; D007090:Image Interpretation, Computer-Assisted / Q000295:instrumentation / Q000379:methods*; D007834:Lasers; D018613:Microscopy, Confocal / Q000295:instrumentation* / Q000379:methods; D036103:Nanotechnology / Q000295:instrumentation* / Q000379:methods; D012815:Signal Processing, Computer-Assisted / Q000295:instrumentation*; D014466:Ultraviolet Rays