Nanoimaging with a compact extreme-ultraviolet laser.
Images with a spatial resolution of 120-150 nm were obtained with 46.9 nm light from a compact capillary-discharge laser by use of the combination of a Sc-Si multilayer-coated Schwarzschild condenser and a free-standing imaging zone plate. The results are relevant to the development of compact extreme-ultraviolet laser-based imaging tools for nanoscience and nanotechnology.
Vaschenko
G
G
National Science Foundation Engineering Research Center for Extreme Ultraviolet Science and Technology, and Department of Electrical and Computer Engineering, Colorado State University, Fort Collins, Colorado 80523, USA. vaschen@engr.colostate.edu
Brizuela
F
F
Brewer
C
C
Grisham
M
M
Mancini
H
H
Menoni
C S
CS
Marconi
M C
MC
Rocca
J J
JJ
Chao
W
W
Liddle
J A
JA
Anderson
E H
EH
Attwood
D T
DT
Vinogradov
A V
AV
Artioukov
I A
IA
Pershyn
Y P
YP
Kondratenko
V V
VV
D004867:Equipment Design; D019544:Equipment Failure Analysis; D007089:Image Enhancement / Q000295:instrumentation* / Q000379:methods; D007090:Image Interpretation, Computer-Assisted / Q000295:instrumentation / Q000379:methods*; D007834:Lasers; D018613:Microscopy, Confocal / Q000295:instrumentation* / Q000379:methods; D036103:Nanotechnology / Q000295:instrumentation* / Q000379:methods; D012815:Signal Processing, Computer-Assisted / Q000295:instrumentation*; D014466:Ultraviolet Rays