Tantalum complexes with all nitrogen coordination sphere: mixed amido-, imido-, guanidinato complexes of tantalum and their thermal behaviour.
Novel mixed amido-/imido-/guanidinato-complexes of tantalum are reported. The complexes were synthesised by insertion reactions of carbodiimides of the type C(NR)2(R =iso-propyl (i-Pr)) into the M-N bonds of tantalum mixed amido/imido complexes. Three representative complexes were synthesised and fully characterised by 1H-NMR, 13C-NMR, CHN-analysis and mass spectroscopy. The crystal structure of the complex [Ta(NMe2){(i-Pr-N)2C(NMe2)}2(N-t-Bu)](1)(Me = methyl, t-Bu =tert-butyl) is presented and discussed. The complexes are solids that can be quantitatively sublimed at moderate temperatures (120-130 degrees C) without any sign of decomposition. The thermal properties of the new compounds were studied (TGA) and preliminary MOCVD-experiments were performed. TaN films were deposited and characterised by XRD and XPS.
Baunemann
Arne
A
Lehrstuhl für Anorganische Chemie II-Organometallics and Materials Chemistry, Ruhr-University Bochum, Bochum, Germany.
Rische
Daniel
D
Milanov
Andrian
A
Kim
Younsoo
Y
Winter
Manuela
M
Gemel
Christian
C
Fischer
Roland A
RA
D000577:Amides / Q000737:chemistry*; D018360:Crystallography, X-Ray; D006146:Guanidines / Q000737:chemistry*; D007094:Imides / Q000737:chemistry*; D009682:Magnetic Resonance Spectroscopy / Q000379:methods; D008958:Models, Molecular; D008968:Molecular Conformation; D009584:Nitrogen / Q000737:chemistry*; D009942:Organometallic Compounds / Q000138:chemical synthesis / Q000737:chemistry; D012680:Sensitivity and Specificity; D013237:Stereoisomerism; D013635:Tantalum / Q000737:chemistry*; D013696:Temperature
D000577:Amides; D006146:Guanidines; D007094:Imides; D009942:Organometallic Compounds; D013635:Tantalum; D009584:Nitrogen