Low-temperature growth of single-walled carbon nanotubes by water plasma chemical vapor deposition.
Preferential growth of pure single-walled carbon nanotubes (SWNTs) over multi-walled carbon nanotubes (MWNTs) was demonstrated at low temperature by water plasma chemical vapor deposition. Water plasma lowered the growth temperature down to 450 degrees C, and the grown nanotubes were single-walled without carbonaceous impurities and MWNTs. The preferential growth of pure SWNTs over MWNTs was proven with micro-Raman spectroscopy, high-resolution transmission electron microscopy, and electrical characterization of the grown nanotube networks.
Min
Yo-Sep
YS
Materials & Devices Research Center, Samsung Advanced Institute of Technology, Yong-In, Kyeongki-Do, 449-712 Korea.
Bae
Eun Ju
EJ
Oh
Byung Seok
BS
Kang
Donghun
D
Park
Wanjun
W
D003460:Crystallization; D037742:Nanotubes, Carbon / Q000737:chemistry*; D012666:Semiconductors; D013059:Spectrum Analysis, Raman; D013499:Surface Properties; D013696:Temperature; D014835:Volatilization; D014867:Water / Q000737:chemistry
D037742:Nanotubes, Carbon; D014867:Water