title: Microwave plasma treatment of polymer surface for irreversible sealing of microfluidic devices.
abstract: Microwave plasma was generated in a glass bottle containing 2-3 Torr of oxygen for plasma treatment of a polymer surface. A "kitchen microwave oven" and a dedicated microwave digestion oven were used as the power source. Poly(dimethylsiloxane)(PDMS) slabs treated by a 30 W plasma for 30-60 s sealed irreversibly to form microfluidic devices that can sustain solution flow of an applied pressure of 42 psi without leaking. Experimental set up and conditions for the production of a homogeneous plasma to activate the PDMS surface for irreversible sealing are described in detail. The surface of a microwave plasma-treated PDMS slab was characterized using atomic force microscopy (AFM) and attenuated total reflection-Fourier Transform infrared spectroscopy (ATR-FTIR). The plasma-treated surface bears silica characteristics.
authors.affiliation: Department of Chemistry, The University of Hong Kong, Hong Kong SAR, PR China.
authors.forename: Alex Y N
authors.initials: AY
authors.lastname: Hui
authors.forename: Gang
authors.initials: G
authors.lastname: Wang
authors.forename: Bingcheng
authors.initials: B
authors.lastname: Lin
authors.forename: Wing-Tat
authors.initials: WT
authors.lastname: Chan
mesh_terms: D004129:Dimethylpolysiloxanes; D046210:Microfluidic Analytical Techniques / Q000295:instrumentation* / Q000379:methods*; D044085:Microfluidics; D018625:Microscopy, Atomic Force; D008872:Microwaves; D011108:Polymers / Q000737:chemistry*; D011312:Pressure; D012825:Silicon; D017550:Spectroscopy, Fourier Transform Infrared; D013499:Surface Properties; D013997:Time Factors
chemical_list: D004129:Dimethylpolysiloxanes; D011108:Polymers; D012825:Silicon