Growth of silicon nanowires on H-terminated Si {111} surface templates studied by transmission electron microscopy.
We have studied the growth of silicon nanowires (SiNWs) by means of transmission electron microscopy. SiNWs are grown from nanocatalysts via the Vapor-Liquid-Solid (VLS) mechanism using silane (SiH4) gas as a source gas. The nanocatalysts are prepared on a hydrogen (H)-terminated Si surface. We have examined the formation mechanism of nanocatalysts on H-terminated surface and have observed several structural variants of SiNWs. According to the study we have suggested that many structural variations of SiNWs are possible, which modify the structural properties of SiNWs to great extents.
Ozaki
Nobuhiko
N
Department of Physics, Graduate School of Science, Osaka University, 1-1 Machikane-yama, Toyonaka, Osaka 560-0043, Japan. ozaki@ims.tsukuba.ac.jp
Ohno
Yutaka
Y
Kikkawa
Jun
J
Takeda
Seiji
S