title: Aging and thermal stability of Mg/SiC and Mg/Y2O3 reflection multilayers in the 25-35 nm region.
abstract: Reflection measurements in the 25-35 nm region were made for Mg/SiC and Mg/Y2O3 multilayers kept in a low-humidity atmosphere for 4 or 5 years. Aged Mg/SiC multilayers keep their reflectances, and the reflectance value at 31.2 nm is 0.44 at 10 degrees of the normal angle of incidence. Aged Mg/Y2O3 multilayers change reflectance as top layer materials, and the best value at 30.1 nm is 0.40 at 10 degrees. Reflection measurements are also made for Mg-based multilayers that are annealed from room temperature to 400 degrees C at 50 degrees C intervals. Both multilayers keep their reflectance at annealing temperatures of 200 degrees C. These results suggest that both Mg-based multilayers can be applied to practical optics.
authors.affiliation: Institute of Multidisciplinary Research for Advanced Materials, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan. ejima@tagen.tohoku.ac.jp
authors.forename: Takeo
authors.initials: T
authors.lastname: Ejima
authors.forename: Atsushi
authors.initials: A
authors.lastname: Yamazaki
authors.forename: Takanori
authors.initials: T
authors.lastname: Banse
authors.forename: Katsuhiko
authors.initials: K
authors.lastname: Saito
authors.forename: Yuji
authors.initials: Y
authors.lastname: Kondo
authors.forename: Satoshi
authors.initials: S
authors.lastname: Ichimaru
authors.forename: Hisataka
authors.initials: H
authors.lastname: Takenaka