title: Large-size liftable inverted-nanobowl sheets as reusable masks for nanolithiography.
abstract: A low-cost procedure is introduced for fabricating large-area, liftable, ordered TiO2 nanobowl sheets. The sheet is made using the template of self-assembled polystyrene spheres, followed by atomic layer deposition (ALD), ion milling, and etching. By introducing a thin organic layer between the nanobowls and the substrate, the whole sheet can be lifted-off in full size. The dimension of the holes at the bottom of the nanobowls is controlled by additional ALD; thus, the sheet has been applied as a reusable mask for producing nanodot patterns with designed sizes. This technique demonstrates a simple and economic nanolithiography approach for producing various designed patterns without using a clean room, and it has a great potential for scale-up, mass production, and commercial applications.
authors.affiliation: School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332-0245, USA.
authors.forename: Xudong
authors.initials: X
authors.lastname: Wang
authors.forename: Changshi
authors.initials: C
authors.lastname: Lao
authors.forename: Elton
authors.initials: E
authors.lastname: Graugnard
authors.forename: Christopher J
authors.initials: CJ
authors.lastname: Summers
authors.forename: Zhong L
authors.initials: ZL
authors.lastname: Wang