Saturated 13.2 nm high-repetition-rate laser in nickellike cadmium.
We report gain-saturated operation of a 13.2 nm table-top laser in Ni-like Cd at a 5 Hz repetition rate. A gain-length product G x L = 17.6 was obtained by heating a precreated plasma with 8 ps duration Ti:sapphire laser pulses with an energy of only 1 J impinging at a grazing angle of 23 degrees. With an average power of approximately 1 muW [corrected] this laser is an attractive coherent source for at-wavelength metrology of extreme UV lithography optics and other applications.
Rocca
J J
JJ
National Science Foundation ERC for Extreme Ultraviolet Science and Technology, and Electrical and Computer Engineering Department, Colorado State University, Fort Collins, Colorado 80523, USA.
Wang
Y
Y
Larotonda
M A
MA
Luther
B M
BM
Berrill
M
M
Alessi
D
D