title: Recent advances in characterization of CaCu3Ti4O12 thin films by spectroscopic ellipsometric metrology.
abstract: CaCu3Ti4O12 (CCTO) thin films were successfully grown on LaAlO3(100) and Pt/TiO2/SiO2/Si(100) substrates by a novel MOCVD approach. Epitaxial CCTO(001) thin films have been obtained on LaAlO3(100) substrates, while polycrystalline CCTO films have been grown on Pt/TiO2/SiO2/Si(100) substrates. Surface morphology and grain size of the different nanostructured deposited films were examined by AFM, and spectroscopic ellipsometry has been used to investigate the electronic part of the dielectric constant (epsilon2). Looking at the epsilon2 curves, it can be seen that by increasing the film structural order, a greater dielectric response has been obtained. The measured dielectric properties accounted for the ratio between grain volumes and grain boundary areas, which is very different in the different structured films.
authors.affiliation: Istituto per la Microelettonica e Microsistemi, IMM-CNR Stradale Primosole 50, 95121 Catania, Italy.
authors.forename: Raffaella
authors.initials: R
authors.lastname: Lo Nigro
authors.forename: Graziella
authors.initials: G
authors.lastname: Malandrino
authors.forename: Roberta G
authors.initials: RG
authors.lastname: Toro
authors.forename: Maria
authors.initials: M
authors.lastname: Losurdo
authors.forename: Giovanni
authors.initials: G
authors.lastname: Bruno
authors.forename: Ignazio L
authors.initials: IL
authors.lastname: Fragalà
mesh_terms: D002118:Calcium / Q000737:chemistry*; D003300:Copper / Q000737:chemistry*; D008567:Membranes, Artificial; D018625:Microscopy, Atomic Force / Q000379:methods*; D010100:Oxygen / Q000737:chemistry*; D014025:Titanium / Q000737:chemistry*; D014961:X-Ray Diffraction
chemical_list: D008567:Membranes, Artificial; D003300:Copper; D014025:Titanium; D010100:Oxygen; D002118:Calcium