title: Oriented mesoporous organosilicate thin films.
abstract: Coassemblies of block copolymers and inorganic precursors offer a path to ordered inorganic nanostructures. In thin films, these materials combined with domain alignment provide highly robust nanoscopic templates. We report a simple path to control the morphology, scaling, and orientation of ordered mesopores in organosilicate thin films through the coassembly of a diblock copolymer, poly(styrene-b-ethylene oxide) (PS-b-PEO), and an oligomeric organosilicate precursor that is selectively miscible with PEO. Continuous films containing cylindrical or spherical pores are generated by varying the mixing composition of symmetric PS-b-PEO and an organosilicate precursor. Tuning interfacial energy at both air/film and film/substrate interfaces allows the control of cylindrical pore orientation normal to the supported film surfaces. Our method provides well-ordered mesoporous structures within organosilicate thin films that find broad applications as highly stable nanotemplates.
authors.affiliation: IBM Research Division, Almaden Research Center, 650 Harry Road, San Jose, CA 95120-6099, USA.
authors.forename: Erik M
authors.initials: EM
authors.lastname: Freer
authors.forename: Leslie E
authors.initials: LE
authors.lastname: Krupp
authors.forename: William D
authors.initials: WD
authors.lastname: Hinsberg
authors.forename: Philip M
authors.initials: PM
authors.lastname: Rice
authors.forename: James L
authors.initials: JL
authors.lastname: Hedrick
authors.forename: Jennifer N
authors.initials: JN
authors.lastname: Cha
authors.forename: Robert D
authors.initials: RD
authors.lastname: Miller
authors.forename: Ho-Cheol
authors.initials: HC
authors.lastname: Kim