Microfabricated porous glass channels for electrokinetic separation devices.
Electrically insulated porous SiO2 channels for electrokinetic separation devices were fabricated based on a mask-less etching process for creation of high aspect ratio needles in silicon. The silicon needles are converted to SiO2 by oxidation and integrated within the interior of a fluidic channel network. The channels are about 5 microm high with a pore size of 0.5+/-0.2 microm. An electrophoretic separation of a mixture of fluorescein and 5-carboxyfluorescein using epi-fluorescence detection was performed to verify proper electrokinetic transport in the porous channels. The plate height was about 170,000 m-1 for a field strength of 170 V cm-1. In the near future, it is intended to extend the fabrication scheme to include an array of porous pillars for capillary electrochromatography experiments.
Cezar de Andrade Costa
Reges
R
MIC-Department of Micro and Nanotechnology, Technical University of Denmark, 2800 Kgs Lyngby, Denmark.
Mogensen
Klaus Bo
KB
Kutter
Jörg Peter
JP
D020374:Chromatography, Micellar Electrokinetic Capillary; D005898:Glass; D046210:Microfluidic Analytical Techniques / Q000295:instrumentation* / Q000379:methods*; D008855:Microscopy, Electron, Scanning; D016062:Porosity