Angular-interrogation attenuated total reflection metrology system for plasmonic sensors.
We develop an angular-interrogation attenuated total reflection (ATR) metrology system for three different plasmonic sensors, namely, a conventional surface plasmon resonance (SPR) device, a coupled-waveguide SPR device, and a nanoparticle-enhanced SPR device. The proposed metrology system is capable of measuring the reflectivity spectra of the transverse magnetic mode and the transverse electric mode simultaneously. Through the optimal control of the fabrication process and use of sophisticated system instrumentation, the experimental results confirm that the developed ATR system is capable of measuring the resonant angle with an angular accuracy of 10(-4) deg.
Yih
Jenq-Nan
JN
Institute of Optical Sciences, National Central University, Chung-Li 320, Taiwan.
Chien
Fan-Ching
FC
Lin
Chun-Yun
CY
Yau
Hon-Fai
HF
Chen
Shean-Jen
SJ