Oriented mesoporous organosilicate thin films.
Coassemblies of block copolymers and inorganic precursors offer a path to ordered inorganic nanostructures. In thin films, these materials combined with domain alignment provide highly robust nanoscopic templates. We report a simple path to control the morphology, scaling, and orientation of ordered mesopores in organosilicate thin films through the coassembly of a diblock copolymer, poly(styrene-b-ethylene oxide) (PS-b-PEO), and an oligomeric organosilicate precursor that is selectively miscible with PEO. Continuous films containing cylindrical or spherical pores are generated by varying the mixing composition of symmetric PS-b-PEO and an organosilicate precursor. Tuning interfacial energy at both air/film and film/substrate interfaces allows the control of cylindrical pore orientation normal to the supported film surfaces. Our method provides well-ordered mesoporous structures within organosilicate thin films that find broad applications as highly stable nanotemplates.
Freer
Erik M
EM
IBM Research Division, Almaden Research Center, 650 Harry Road, San Jose, CA 95120-6099, USA.
Krupp
Leslie E
LE
Hinsberg
William D
WD
Rice
Philip M
PM
Hedrick
James L
JL
Cha
Jennifer N
JN
Miller
Robert D
RD
Kim
Ho-Cheol
HC