Pulsed laser deposition chamber for in situ X-ray diffraction.
A sample chamber has been constructed for studying the growth of thin films by pulsed laser deposition in situ with surface X-ray diffraction. The achievable temperature ranges from room temperature to 1073 K in a controlled oxygen environment. The partial pressure of the oxygen background gas covers the range from 0.1 to 10(5) Pa. The first results, showing intensity oscillations in the diffracted signal during homoepitaxial deposition of SrTiO(3), are presented.
Vonk
Vedran
V
European Synchrotron Radiation Facility, 38043 Grenoble, France.
Konings
Stan
S
Barthe
Laurent
L
Gorges
Bernard
B
Graafsma
Heinz
H