Analysis of a micropolarizer array-based simultaneous phase-shifting interferometer.
Recent technological innovations have enabled the development of a new class of dynamic (vibration-insensitive) interferometer based on a CCD pixel-level phase-shifting approach. We present theoretical and experimental results for an interferometer based on this pixelated phase-shifting technique. Analyses of component errors and instrument functionality are presented. We show that the majority of error sources cause relatively small magnitude peak-to-valley errors in measurement of the order of 0.002-0.005lambda. These errors are largely mitigated by high-rate data acquisition and consequent data averaging.
Novak
Matt
M
Optical Sciences Center, University of Arizona, Tucson, Arizona 85721, USA. mnovak@optics.arizona.edu
Millerd
James
J
Brock
Neal
N
North-Morris
Michael
M
Hayes
John
J
Wyant
James
J