Fabrication of alignment structures for a fiber resonator by use of deep-ultraviolet lithography.
We present a novel method to mount and align an optical-fiber-based resonator on the flat surface of an atom chip with ultrahigh precision. The structures for mounting a pair of fibers, which constitute the fiber resonator, are produced by a spin-coated SU-8 photoresist technique by use of deep-UV lithography. The design and production of the SU-8 structures are discussed. From the measured finesses we calculate the coupling loss of the SU-8 structures acting as a kind of fiber splice to be smaller than 0.013 dB.
Liu
Xiyuan
X
Lehrstuhl für Optoelektronik, Universität Mannheim, B6 23-29, D-68131 Mannheim, Germany. xiyuanl@rumms.uni-mannheim.de
Brenner
Karl-Heinz
KH
Wilzbach
Marco
M
Schwarz
Michael
M
Fernholz
Thomas
T
Schmiedmayer
Jörg
J