Micromachined oxygen gas sensors for microscopic energy consumption measurement systems.
Although the indirect calorimeter is a useful tool, its size and expense mean that it is seldom used in hospitals. Furthermore, its flow-through measurement technique dilutes respiratory variations, so they can only be detected with some form of high-precision instrumentation. This study employs MEMS techniques to develop an oxygen sensor as one part of a microscopic energy consumption measurement system, which measures respiration dynamics in a real time manner. The oxygen sensor comprises a polysilicon resistor and a Li-doped (2 wt%) tin-oxide sensing film attached to a thermally isolated silicon-nitride membrane. The power consumption of the sensor is less than 25 mW at an operating temperature of 150 degrees C. Furthermore, it measures oxygen concentrations between 25 and 85% with a linear output response. These characteristics render the proposed sensor suitable for use within a microscopic energy consumption measurement system in either hospital or homecare environments.
Wu
C-C
CC
Department of Electrical Engineering, National Cheng Kung University, Tainan, 701, Taiwan.
Lee
G-B
GB
Chen
M-H
MH
Luo
C-H
CH
D000818:Animals; D015374:Biosensing Techniques / Q000295:instrumentation* / Q000379:methods; D002151:Calorimetry / Q000295:instrumentation* / Q000379:methods; D004563:Electrochemistry / Q000295:instrumentation* / Q000379:methods; D004867:Equipment Design; D019544:Equipment Failure Analysis; D005740:Gases / Q000032:analysis; D006801:Humans; D008904:Miniaturization / Q000379:methods; D010092:Oximetry / Q000295:instrumentation* / Q000379:methods; D010100:Oxygen / Q000032:analysis*; D010101:Oxygen Consumption / Q000502:physiology*; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D014173:Transistors, Electronic
D005740:Gases; D010100:Oxygen