Photonic devices based on preferential etching.
We introduce a design concept of optical waveguides characterized by a practical and reproducible process based on preferential etching of crystalline silicon substrates. Low-loss waveguides, spot-size converters, and power dividers have been obtained with polymers. We have also aligned liquid crystals in the waveguides and demonstrated guided propagation. Therefore this technology is a suitable platform for soft-matter photonics and heterogeneous integration.
Bellini
Bob
B
Department of Electronics Engineering, University of Rome, La Sapienza, Via Eudossiana 18, 00185 Rome, Italy. bob.bellini@gmail.com
Larchanché
Jean-François
JF
Vilcot
Jean-Pierre
JP
Decoster
Didier
D
Beccherelli
Romeo
R
d'Alessandro
Antonio
A