title: Fabrication of three-dimensional structures by three-photon polymerization.
abstract: We report the fabrication of three-dimensional structures of submicrometer resolution by three-photon polymerization. This resolution has been achieved by polymerizing ORMOCER, a UV photocurable organic-inorganic hybrid material, with an ultrafast laser irradiation at 1028 nm. To our knowledge, this is the first demonstration of three-photon polymerization, a process that may allow the fabrication of components of very high resolution.
authors.affiliation: Institute of Electronic Structure and Laser, Foundation for Research and Technology-Hellas, Heraklion, Crete, Greece. mfarsari@iesl.forth.gr
authors.forename: M
authors.initials: M
authors.lastname: Farsari
authors.forename: G
authors.initials: G
authors.lastname: Filippidis
authors.forename: C
authors.initials: C
authors.lastname: Fotakis