title: Glow discharge spectroscopy for depth profile analysis: from micrometer to sub-nanometer layers.
authors.affiliation: Laboratory of Inorganic Chemistry, ETH Zurich, Hoenggerberg, HCI G141, Wolfgang Pauli-Strasse 10, 8083, Zurich, Switzerland. jorge.pisonero@inorg.chem.ethz.ch
authors.forename: Jorge
authors.initials: J
authors.lastname: Pisonero