[Determination of mean electron energy in O2 non-equilibrium plasma by relative spectrum line intensity].
The process of O2 non-equilibrium plasma is simulated by Monte Carlo method. The electron drift velocity as a function of E/N is given, which is in good agreement with experimental result. The variations of mean electron energy and the number density of electronic excitation states of O2 with the reduced field E/N are simulated. A method to determine the mean electron energy by relative spectrum line intensity is proposed, which is of great importance to the applications of non-equilibrium plasma in many fields such as material preparation, laser application, micro-electronics technology and so on.
Dong
Li-fang
LF
College of Physics Science and Technology, Hebei University, Baoding 071002, China.
Yin
Yan
Y
D000465:Algorithms; D004583:Electrons; D004735:Energy Transfer; D007700:Kinetics; D009010:Monte Carlo Method; D010084:Oxidation-Reduction; D010100:Oxygen / Q000737:chemistry*; D013057:Spectrum Analysis / Q000295:instrumentation / Q000379:methods*
D010100:Oxygen