title: High-temperature stability multilayers for extreme-ultraviolet condenser optics.
abstract: We investigate the thermal stability of Mo/SiC multilayer coatings at elevated temperatures. Transmission electron microscopy and x-ray diffraction studies show that, upon annealing, a thermally induced structural relaxation occurs that transforms the polycrystalline Mo and amorphous SiC layers in as-deposited multilayers into an amorphous Mo-Si-C alloy and crystalline SiC, respectively. After this relaxation process is complete, the multilayer is stable at temperatures up to 400 degrees C.
authors.affiliation: Lawrence Livermore National Laboratory, 7000 East Avenue, Livermore, California 94550, USA. bajt@llnl.gov
authors.forename: Sasa
authors.initials: S
authors.lastname: Bajt
authors.forename: Daniel G
authors.initials: DG
authors.lastname: Stearns