Inductive heating and E to H transitions in capacitive discharges.
Capacitive discharges have classically been modeled in the electrostatic approximation. However, electromagnetic effects become significant if the excitation wavelength lambda and the plasma skin depth delta are not infinite. An electromagnetic model valid in the entire range of lambda and delta of practical interest is solved. We find that the plasma may either be sustained by the usual capacitive (E) field or by an inductive (H) field, and that the discharge experiences E to H transitions as the voltage between the electrodes is raised.
Chabert
P
P
LPTP, Ecole Polytechnique, 91128 Palaiseau, France. chabert@lptp.polytechnique.fr
Raimbault
J-L
JL
Levif
P
P
Rax
J-M
JM
Lieberman
M A
MA