X-ray topography analysis of acoustic wave fields in the SAW-resonator structures.
The formation of fields of standing surface acoustic waves (SAW) in LiNbO3 and La3Ga5SiO14 (LGS) crystals was studied by high-resolution topography method on a laboratory X-ray source. The fields of standing SAW were formed using SAW-resonator structures consisting of interdigital transducer (IDT) and reflecting gratings. The SAW amplitudes and power flow angles were measured by X-ray topography, diffraction in acoustic beam was visualized, and the SAW interaction with the crystal structure defects was studied.
Roshchupkin
Dmitry V
DV
Institute of Microelectronics Technology and High Purity Materials, Russian Academy of Sciences, Laboratory of X-ray Acoustooptics, Chernogolovka, Russian Federation. rochtch@ipmt-hpm.ac.ru
Roshchupkina
Helen D
HD
Irzhak
Dmitry V
DV