title: Topography characterization of a deep grating using near-field imaging.
abstract: Using near-field optical microscopy at the wavelength of 633 nm, we image light intensity distributions at several distances above an approximately 2-microm-deep and a 1-microm-period glass grating illuminated from below under the condition of total internal reflection. The intensity distributions are numerically modeled, and an inversion procedure based on a least-squares-fit optimization is employed to extract the grating geometry from the optical images.
authors.affiliation: Research Center COM, NanoDTU, Technical University of Denmark, Building 345V, DK-2800 Kgs. Lyngby, Denmark. ngr@com.dtu.dk
authors.forename: Niels
authors.initials: N
authors.lastname: Gregersen
authors.forename: Bjarne
authors.initials: B
authors.lastname: Tromborg
authors.forename: Valentyn S
authors.initials: VS
authors.lastname: Volkov
authors.forename: Sergey I
authors.initials: SI
authors.lastname: Bozhevolnyi
authors.forename: Johan
authors.initials: J
authors.lastname: Holm