A novel, single-mode piezoceramic plate actuator for ultrasonic linear motors.
A new type of piezoelectric plate actuator for ultrasonic linear motors has been developed. These new piezoelectric actuators use the principle of asymmetric resonant excitation of the piezoceramic plate in a special resonant mode consisting of a standing two-dimensional extensional wave in a piezoceramic plate. The behavior of the actuator has been simulated with finite-element method (FEM) software and the simulation results checked with single-point contact measurements on the surface of the actuator. This paper describes this work and closes by describing the new ultrasonic translation stages based on this design.
Vyshnevskyy
Oleksiy
O
Physik Instrumente GmbH & Co. KG, auf der Roemerstrasse 1, D-76228 Karlsruhe, Germany.
Kovalev
Sergej
S
Wischnewskiy
Wladimir
W
D002516:Ceramics / Q000737:chemistry* / Q000528:radiation effects; D003198:Computer Simulation; D017076:Computer-Aided Design; D004563:Electrochemistry / Q000295:instrumentation* / Q000379:methods; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008962:Models, Theoretical; D009038:Motion; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D014159:Transducers; D014463:Ultrasonography / Q000295:instrumentation* / Q000379:methods