Characteristics of (1010) and (1120) textured ZnO piezofilms for a shear mode resonator in the VHF-UHF frequency ranges.
This paper reports the fabrication and characterization of ZnO piezoelectric thin films in which the crystallite c-axis is unidirectionally aligned in the plane. The films were deposited by a conventional radio frequency (RF) magnetron sputtering apparatus without epitaxy. We have measured reflection coefficient S11 of the ZnO film/glass substrate composite shear mode resonator and confirmed that the resonator excites shear wave only in the very high frequency to ultra high frequency ranges (VHF-UHF). The crystallites c-axis orientation and alignment were determined by x-ray diffraction (XRD) patterns, phi-scan pole figure analysis, omega-scan rocking curves, and atomic force microscope (AFM) measurement. The transduction of the shear wave showed good agreement with properties of the crystallite alignment in the film.
Yanagitani
Takahiko
T
Faculty of Engineering, Doshisha University, 1-3 Miyakodani, Tatara, Kyotanabe, Kyoto, 610-0321 Japan.
Nohara
Takuya
T
Matsukawa
Mami
M
Watanabe
Yoshiaki
Y
Otani
Takahiko
T
D002516:Ceramics / Q000737:chemistry / Q000528:radiation effects; D003198:Computer Simulation; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008567:Membranes, Artificial; D008962:Models, Theoretical; D011846:Radio Waves; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D033081:Shear Strength; D013314:Stress, Mechanical; D014159:Transducers; D014463:Ultrasonography / Q000295:instrumentation* / Q000379:methods; D015034:Zinc Oxide / Q000737:chemistry* / Q000528:radiation effects
D008567:Membranes, Artificial; D015034:Zinc Oxide