Light stamping lithography: microcontact printing without inks.
We report a new patterning method, called light-stamping lithography (LSL), that uses UV-induced adhesion of poly(dimethylsiloxane) (PDMS). LSL is based on the direct transfer of the contact surface of the PDMS stamp to a substrate via a UV (254 nm)-induced surface bonding between the stamp and the substrate. This procedure can be adopted in automated printing machines that generate patterns with a wide range of feature sizes on diverse substrates. To demonstrate its usefulness, the LSL method was applied to prepare several PDMS patterns on a variety of substrates. The PDMS patterns were then used as templates for selective deposition of TiO2 thin film using atomic layer deposition as well as resists for selective wet etching.
Park
Kyung S
KS
Department of Chemistry, Kookmin University,Chongnung-dong, Songbuk-ku, Seoul 136-702, Korea.
Seo
Eun K
EK
Do
Young R
YR
Kim
Kwan
K
Sung
Myung M
MM