Highly reflecting aluminum-protected optical coatings for the vacuum-ultraviolet spectral range.
We discuss the approaches to preserve the high-reflectance aluminum mirror for the vacuum-ultraviolet spectral region. Single fluoride and oxide layers, a homogeneous multilayer, and hybrid multilayer solutions are put forward. Single fluoride and oxide materials have achieved reflectance above 90% at 193 nm. Multilayer capping can provide reflectance of 93.4% at 193 nm, and a hybrid multilayer of fluoride and oxide can achieve reflectance above 90% to 160 nm.
Yang
Minghong
M
Fraunhofer-Institut für Angewandte Optik und Feinmechanik, Albert Einstein Strasse 7, Jena 07745, Germany. minghong.yang@iof.fraunhofer.de
Gatto
Alexandre
A
Kaiser
Norbert
N