title: Optimization of the gain-bandwidth product of capacitive micromachined ultrasonic transducers.
abstract: Capacitive micromachined ultrasonic transducers (cMUT) have large bandwidths, but they typically have low conversion efficiencies. This paper defines a performance measure in the form of a gain-bandwidth product and investigates the conditions in which this performance measure is maximized. A Mason model corrected with finite-element simulations is used for the purpose of optimizing parameters. There are different performance measures for transducers operating in transmit, receive, or pulse-echo modes. Basic parameters of the transducer are optimized for those operating modes. Optimized values for a cMUT with silicon nitride membrane and immersed in water are given. The effect of including an electrical matching network is considered. In particular, the effect of a shunt inductor in the gain-bandwidth product is investigated. Design tools are introduced, which are used to determine optimal dimensions of cMUTs with the specified frequency or gain response.
authors.affiliation: Electrical and Electronics Engineering Department, Bilkent University, Ankara Turkey. selim@ee.bilkent.edu.tr
authors.forename: Selim
authors.initials: S
authors.lastname: Olcum
authors.forename: Muhammed N
authors.initials: MN
authors.lastname: Senlik
authors.forename: Abdullah
authors.initials: A
authors.lastname: Atalar
mesh_terms: D003198:Computer Simulation; D017076:Computer-Aided Design; D025802:Electric Capacitance; D004582:Electronics, Medical; D004867:Equipment Design; D019544:Equipment Failure Analysis; D020342:Finite Element Analysis; D016014:Linear Models; D008567:Membranes, Artificial; D008904:Miniaturization; D011786:Quality Control; D014159:Transducers; D014463:Ultrasonography / Q000295:instrumentation* / Q000379:methods
chemical_list: D008567:Membranes, Artificial