Femtosecond laser microprocessing with three-dimensionally isotropic spatial resolution using crossed-beam irradiation.
We describe the use of a crossed-beam irradiation system in three-dimensional femtosecond laser microprocessing to obtain three-dimensionally isotropic spatial resolution. In the crossed-beam geometry, two orthogonal objective lenses are arranged to share a common focal point. The synthesized focal spot produces an isotropic illumination volume. We demonstrate that microfluidic channels with substantially circular cross-sectional shapes can be directly fabricated inside glass by using the crossed-beam irradiation system.
Sugioka
Koji
K
RIKEN, The Institute of Physical and Chemical Research, Wako, Saitama, Japan. ksugioka@riken.jp
Cheng
Ya
Y
Midorikawa
Katsumi
K
Takase
Fumihiro
F
Takai
Hiroshi
H