title: Femtosecond laser microprocessing with three-dimensionally isotropic spatial resolution using crossed-beam irradiation.
abstract: We describe the use of a crossed-beam irradiation system in three-dimensional femtosecond laser microprocessing to obtain three-dimensionally isotropic spatial resolution. In the crossed-beam geometry, two orthogonal objective lenses are arranged to share a common focal point. The synthesized focal spot produces an isotropic illumination volume. We demonstrate that microfluidic channels with substantially circular cross-sectional shapes can be directly fabricated inside glass by using the crossed-beam irradiation system.
authors.affiliation: RIKEN, The Institute of Physical and Chemical Research, Wako, Saitama, Japan. ksugioka@riken.jp
authors.forename: Koji
authors.initials: K
authors.lastname: Sugioka
authors.forename: Ya
authors.initials: Y
authors.lastname: Cheng
authors.forename: Katsumi
authors.initials: K
authors.lastname: Midorikawa
authors.forename: Fumihiro
authors.initials: F
authors.lastname: Takase
authors.forename: Hiroshi
authors.initials: H
authors.lastname: Takai