title: Phase noise in capacitively coupled micromechanical oscillators.
abstract: Phase noise in capacitively coupled microresonator-based oscillators is investigated. A detailed analysis of noise mixing mechanisms in the resonator is presented, and the capacitive transduction is shown to be the dominant mechanism for low-frequency 1/f-noise mixing into the carrier sidebands. Thus, the capacitively coupled micromechanical resonators are expected to be more prone to the 1/f-noise aliasing than piezoelectrically coupled resonators. The analytical work is complemented with simulations, and a highly efficient and accurate simulation method for a quantitative noise analysis in closed-loop oscillator applications is presented. Measured phase noise for a microresonator-based oscillator is found to agree with the developed analytical and simulated noise models.
authors.affiliation: VTT Technical Research Centre of Finland, VTT Information Technology, Espoo, Finland. ville.kaajakari@vtt.fi
authors.forename: Ville
authors.initials: V
authors.lastname: Kaajakari
authors.forename: Jukka K
authors.initials: JK
authors.lastname: Koskinen
authors.forename: Tomi
authors.initials: T
authors.lastname: Mattila