Mesoporous silicon oxynitride thin films.
Highly-ordered, pore-modified with amine groups, and glass-like mesoporous silicon oxynitride thin films were prepared by heat treatment of as-synthesized mesoporous silica thin films in a flowing ammonia environment at high temperatures.
State Key Laboratory of High Performance Ceramics and Superfine Microstructure, Shanghai Institute of Ceramics, 1295 Dingxi Road, Shanghai 200050, PR China.
Jiacheng
J
Wang
Qian
Q
Liu