Development of a gas injection/specimen heating holder for use with transmission electron microscope.
A new gas injection/specimen heating holder is developed for the purpose of in situ observation of gas reaction of materials at high temperatures in a transmission electron microscope at near-atomic resolution. A fine tungsten wire is employed as a heating element of the holder and a battery is used as the power source. Gas was injected onto specimens in the form of particles lying on the heating element via a nozzle. The maximum pressure near specimens was middle of 10(-2) Pa, while the pressure in the electron-gun chamber was kept to 2 x 10(-4) Pa. This gas injection/specimen heating holder was applied to observe solid-gas reactions. The reactions observed include oxidation of pure In into In2O3, reduction of SiO2 into Si and re-oxidation of Si into SiO2.
Kamino
Takeo
T
Hitachi High Technologies Corporation Hitachinaka Ibaraki 312-0057, Japan. kamino-takeo@naka.hitachi-hitec.com
Yaguchi
Toshie
T
Konno
Mitsuru
M
Watabe
Akira
A
Marukawa
Tomotaka
T
Mima
Takayuki
T
Kuroda
Kotaro
K
Saka
Hiroyasu
H
Arai
Shigeo
S
Makino
Hiroshi
H
Suzuki
Yoshinao
Y
Kishita
Keisuke
K