Surface acoustic wave velocity in single-crystal AlN substrates.
The surface acoustic wave velocity has been measured on a-plane (c-propagation) and c-plane oriented bulk aluminum nitride (AlN) single crystals using the S11-parameter method in the frequency range 160-360 MHz. The SAW velocity is 5760 m/s for both orientations. From comparison of this value with the simulations using various elastic constants of AlN available in literature, we estimated the elastic constant C44 to be 122 +/- 1 GPa.
Gang
G
Bu
Daumantas
D
Ciplys
Michael
M
Shur
Leo J
LJ
Schowalter
Sandra
S
Schujman
Remis
R
Gaska