Modeling and design optimization of large-deflection piezoelectric folded cantilever microactuators.
This paper presents a novel, large-deflection piezoelectric folded cantilever microactuator (PFCM). A multimorph model for the large-deflection PFCM is derived, in which unified formulas for deflection angle and vertical displacement of N-level PFCM are obtained. Based on the model, multilayer PFCMs using PZT film are designed and optimized. The large-deflection PFCM is extensively applicable to micro-devices or microsystem applications such as micro-optical switches, microelectromechanical systems (MEMS) scanners, and so forth.
Huajun
H
Fang
Litian
L
Liu
Tianling
T
Ren
D003198:Computer Simulation; D017076:Computer-Aided Design; D004548:Elasticity; D004563:Electrochemistry / Q000295:instrumentation* / Q000379:methods; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008904:Miniaturization / Q000379:methods; D008962:Models, Theoretical; D009038:Motion; D013314:Stress, Mechanical; D014159:Transducers; D014463:Ultrasonography / Q000295:instrumentation*