title: Solidly mounted ZnO shear mode film bulk acoustic resonators for sensing applications in liquids.
abstract: Solidly mounted film bulk acoustic resonators (FBAR) operating at 850 MHz in the shear vibration mode have been fabricated. C-axis inclined zinc oxide (ZnO) thin films realized by modified reactive magnetron sputtering were used: Coupling factors k2 of 1.7% and Q-factors of 312 were determined in air. Q-factors of 192 were measured in water, making these devices attractive for sensing applications in liquids, e.g., biosensing.
authors.forename: Mathias
authors.initials: M
authors.lastname: Link
authors.forename: Matthias
authors.initials: M
authors.lastname: Schreiter
authors.forename: Jan
authors.initials: J
authors.lastname: Weber
authors.forename: Robert
authors.initials: R
authors.lastname: Primig
authors.forename: Dana
authors.initials: D
authors.lastname: Pitzer
authors.forename: Reinhard
authors.initials: R
authors.lastname: Gabl
mesh_terms: D015374:Biosensing Techniques / Q000295:instrumentation* / Q000379:methods*; D045424:Complex Mixtures / Q000032:analysis*; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008567:Membranes, Artificial; D012996:Solutions; D014159:Transducers; D015034:Zinc Oxide / Q000737:chemistry*
chemical_list: D045424:Complex Mixtures; D008567:Membranes, Artificial; D012996:Solutions; D015034:Zinc Oxide