title: Poisson's ratio for polycrystalline silicon used in disk-shaped microresonators.
abstract: Integrated circuit technology has been used to fabricate miniature disk resonators of polycrystalline silicon that operate at frequencies above 100 MHz. The ratios of low-order resonant frequencies in these resonators can be used to determine the value of Poisson's ratio and to confirm assumptions regarding homogeneity and isotropy.
authors.forename: Allen H
authors.initials: AH
authors.lastname: Meitzler
mesh_terms: D003198:Computer Simulation; D003460:Crystallization / Q000379:methods*; D004548:Elasticity; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008956:Models, Chemical; D012825:Silicon / Q000737:chemistry* / Q000528:radiation effects*; D013314:Stress, Mechanical; D014159:Transducers; D014732:Vibration
chemical_list: D012825:Silicon