Solidly mounted ZnO shear mode film bulk acoustic resonators for sensing applications in liquids.
Solidly mounted film bulk acoustic resonators (FBAR) operating at 850 MHz in the shear vibration mode have been fabricated. C-axis inclined zinc oxide (ZnO) thin films realized by modified reactive magnetron sputtering were used: Coupling factors k2 of 1.7% and Q-factors of 312 were determined in air. Q-factors of 192 were measured in water, making these devices attractive for sensing applications in liquids, e.g., biosensing.
Link
Mathias
M
Schreiter
Matthias
M
Weber
Jan
J
Primig
Robert
R
Pitzer
Dana
D
Gabl
Reinhard
R
D015374:Biosensing Techniques / Q000295:instrumentation* / Q000379:methods*; D045424:Complex Mixtures / Q000032:analysis*; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008567:Membranes, Artificial; D012996:Solutions; D014159:Transducers; D015034:Zinc Oxide / Q000737:chemistry*
D045424:Complex Mixtures; D008567:Membranes, Artificial; D012996:Solutions; D015034:Zinc Oxide