title: Characterization of microlenses by digital holographic microscopy.
abstract: We demonstrate the use of digital holographic microscopy (DHM) as a metrological tool in micro-optics testing. Measurement principles are compared with those performed with Twyman-Green, Mach-Zehnder, and white-light interferometers. Measurements performed on refractive microlenses with reflection DHM are compared with measurements performed with standard interferometers. Key features of DHM such as digital focusing, measurement of shape differences with respect to a perfect model, surface roughness measurements, and optical performance evaluation are discussed. The capability of imaging nonspherical lenses without any modification of the optomechanical setup is a key advantage of DHM compared with conventional measurement tools and is demonstrated on a cylindrical microlens and a square lens array.
authors.affiliation: Ecole Polytechnique Fédérale de Lausanne, Imaging and Applied Optics Institute, CH-1015 Lausanne, Switzerland. florian.charriere@a3.epfl.ch
authors.forename: Florian
authors.initials: F
authors.lastname: Charrière
authors.forename: Jonas
authors.initials: J
authors.lastname: Kühn
authors.forename: Tristan
authors.initials: T
authors.lastname: Colomb
authors.forename: Frédéric
authors.initials: F
authors.lastname: Montfort
authors.forename: Etienne
authors.initials: E
authors.lastname: Cuche
authors.forename: Yves
authors.initials: Y
authors.lastname: Emery
authors.forename: Kenneth
authors.initials: K
authors.lastname: Weible
authors.forename: Pierre
authors.initials: P
authors.lastname: Marquet
authors.forename: Christian
authors.initials: C
authors.lastname: Depeursinge