Effect of critical dimension variation on SAW correlator energy.
The effect of critical dimension (CD) variation and metallization ratio on the efficiency of energy conversion of a surface acoustic wave (SAW) correlator is examined. We find that a 10% variation in the width of finger electrodes predicts only a 1% decrease in the efficiency of energy conversion. Furthermore, our model predicts that a metallization ratio of 0.74 represents an optimum value for energy extraction from the SAW by the interdigitated transducer (IDT).
Skinner
J L
JL
Cardinale
G F
GF
Talin
A A
AA
Brocato
R W
RW
D000162:Acoustics / Q000295:instrumentation*; D015374:Biosensing Techniques / Q000295:instrumentation*; D004735:Energy Transfer; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008839:Microelectrodes; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D014159:Transducers