Poisson's ratio for polycrystalline silicon used in disk-shaped microresonators.
Integrated circuit technology has been used to fabricate miniature disk resonators of polycrystalline silicon that operate at frequencies above 100 MHz. The ratios of low-order resonant frequencies in these resonators can be used to determine the value of Poisson's ratio and to confirm assumptions regarding homogeneity and isotropy.
Meitzler
Allen H
AH
D003198:Computer Simulation; D003460:Crystallization / Q000379:methods*; D004548:Elasticity; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008956:Models, Chemical; D012825:Silicon / Q000737:chemistry* / Q000528:radiation effects*; D013314:Stress, Mechanical; D014159:Transducers; D014732:Vibration
D012825:Silicon