Characterization of microlenses by digital holographic microscopy.
We demonstrate the use of digital holographic microscopy (DHM) as a metrological tool in micro-optics testing. Measurement principles are compared with those performed with Twyman-Green, Mach-Zehnder, and white-light interferometers. Measurements performed on refractive microlenses with reflection DHM are compared with measurements performed with standard interferometers. Key features of DHM such as digital focusing, measurement of shape differences with respect to a perfect model, surface roughness measurements, and optical performance evaluation are discussed. The capability of imaging nonspherical lenses without any modification of the optomechanical setup is a key advantage of DHM compared with conventional measurement tools and is demonstrated on a cylindrical microlens and a square lens array.
Charrière
Florian
F
Ecole Polytechnique Fédérale de Lausanne, Imaging and Applied Optics Institute, CH-1015 Lausanne, Switzerland. florian.charriere@a3.epfl.ch
Kühn
Jonas
J
Colomb
Tristan
T
Montfort
Frédéric
F
Cuche
Etienne
E
Emery
Yves
Y
Weible
Kenneth
K
Marquet
Pierre
P
Depeursinge
Christian
C