Fabrication of microelectrodes using the lift-off technique.
The lift-off technique is one of the most prevalent methods for fabricating microelectrodes on a flat surface (e.g., a silicon [Si] wafer). It represents an alternative for metal-etching techniques that often utilize hazardous chemicals in order to define a pattern. This chapter presents an example of patterning gold electrodes on an Si wafer.
Park
Benjamin Y
BY
Department of Mechanical Engineering, University of California-Irvine, USA.
Zaouk
Rabih
R
Madou
Marc J
MJ
D006046:Gold; D008839:Microelectrodes; D046210:Microfluidic Analytical Techniques / Q000295:instrumentation* / Q000379:methods*; D012825:Silicon
D006046:Gold; D012825:Silicon