Characterization of thin films based on reflectance and transmittance measurements at oblique angles of incidence.
The optical parameters of a SiO2 thin-film coating determined from the spectral reflectance and transmittance measurements at various incidence angles, including the normal incidence and the Brewster's angle, are compared in this paper. The high-accuracy measurements were carried out through visible-near-infrared spectral regions by using our purpose-built instruments. The optical parameters obtained from the reflectance and the transmittance data are consistent over the angles of incidence and agree within 0.2%. The effect of important systematic factors in the oblique-incidence spectrophotometric measurements is also discussed.
Metrology Research Institute, Helsinki University of Technology, P.O. Box 3000, FI-02015 TKK, Finland. antti.lamminpaa@tkk.fi
Antti
A
Lamminpää
Saulius
S
Nevas
Farshid
F
Manoocheri
Erkki
E
Ikonen