High-performance coatings for micromechanical mirrors.
High-performance coatings for micromechanical mirrors were developed. The high-reflective metal systems can be integrated into the technology of MOEMS, such as spatial light modulators and microscanning mirrors from the near-infrared down to the vacuum-ultraviolet spectral regions. The reported metal designs permit high optical performances to be merged with suitable mechanical properties and fitting complementary metal-oxide semiconductor compatibility.
Fraunhofer Institut für Angewandte Optik und Feinmechanik, Albert Einstein Strasse 7, Jena 07745, Germany. a.gatto@zeiss.de
Alexandre
A
Gatto
Minghong
M
Yang
Norbert
N
Kaiser
Jörg
J
Heber
Jan Uwe
JU
Schmidt
Thilo
T
Sandner
Harald
H
Schenk
Hubert
H
Lakner