High-performance coatings for micromechanical mirrors.
High-performance coatings for micromechanical mirrors were developed. The high-reflective metal systems can be integrated into the technology of MOEMS, such as spatial light modulators and microscanning mirrors from the near-infrared down to the vacuum-ultraviolet spectral regions. The reported metal designs permit high optical performances to be merged with suitable mechanical properties and fitting complementary metal-oxide semiconductor compatibility.
Gatto
Alexandre
A
Fraunhofer Institut für Angewandte Optik und Feinmechanik, Albert Einstein Strasse 7, Jena 07745, Germany. a.gatto@zeiss.de
Yang
Minghong
M
Kaiser
Norbert
N
Heber
Jörg
J
Schmidt
Jan Uwe
JU
Sandner
Thilo
T
Schenk
Harald
H
Lakner
Hubert
H