Ellipsometry of reflected and scattered fields for the analysis of substrate optical quality.
Specular ellipsometry is a well-known and efficient technique to characterize surfaces and coatings. This technique has been extended to the measurement of scattered light. We present an experimental setup, using a polarization modulator, which permits us to characterize transition layers and roughness without a calibration procedure. Experimental results are presented concerning transition layers for damage threshold applications and for rough surfaces or bulks.
Institut Fresnel, Ecole Généraliste d'Ingénieurs de Marseille, Université Paul Cézanne Aix-Marseille III, Université de Provence Aix-Marseille I, Domaine Universitaire de St. Jérôme, France. carole.deumie@fresnel.fr
Carole
C
Deumié
Oliver
O
Gilbert
Gaelle
G
Georges
Laurent
L
Arnaud
Claude
C
Amra