Improved rate control for electron-beam evaporation and evaluation of optical performance improvements.
A new deposition-rate-control and electron-beam-gun (e-gun) strategy was developed that significantly reduces the growth-rate variations for e-beam-deposited SiO2 coatings. The resulting improvements in optical performance are evaluated for multilayer bandpass filters. The adverse effect of uneven silica-source depletion on coating spectral performances during long deposition runs is discussed.
Manufacturing Engineering, Boston University, 15 Saint Mary's Street, Brookline, Massachusetts 02446, USA.
Michael
M
Gevelber
Bing
B
Xu
Douglas
D
Smith