Ion beam sputtering coatings on large substrates: toward an improvement of the mechanical and optical performances.
Large mirrors (ø350 mm) having extremely low optical loss (absorption, scattering, wavefront) were coated for the VIRGO interferometer. The new generation of mirrors needs to have a better wavefront and lower mechanical loss. To improve the component wavefront, the corrective coating technique was used. By doping the tantalum pentoxide layers, we improved, for the first time to our knowledge, the multilayer mechanical loss. The first results are discussed.
Cimma
Bernard
B
Laboratoire des Matériaux Avancés, Université Clande Bernard Lyon I, 22 Boulevard Niels Bohr, 69622 Villeurbanne Cedex, France.
Forest
Danièle
D
Ganau
Patrick
P
Lagrange
Bernard
B
Mackowski
Jean-Marie
JM
Michel
Christophe
C
Montorio
Jean-Luc
JL
Morgado
Nazario
N
Pignard
Renée
R
Pinard
Laurent
L
Remillieux
Alban
A