Ion beam sputtering coatings on large substrates: toward an improvement of the mechanical and optical performances.
Large mirrors (ø350 mm) having extremely low optical loss (absorption, scattering, wavefront) were coated for the VIRGO interferometer. The new generation of mirrors needs to have a better wavefront and lower mechanical loss. To improve the component wavefront, the corrective coating technique was used. By doping the tantalum pentoxide layers, we improved, for the first time to our knowledge, the multilayer mechanical loss. The first results are discussed.
Laboratoire des Matériaux Avancés, Université Clande Bernard Lyon I, 22 Boulevard Niels Bohr, 69622 Villeurbanne Cedex, France.
Bernard
B
Cimma
Danièle
D
Forest
Patrick
P
Ganau
Bernard
B
Lagrange
Jean-Marie
JM
Mackowski
Christophe
C
Michel
Jean-Luc
JL
Montorio
Nazario
N
Morgado
Renée
R
Pignard
Laurent
L
Pinard
Alban
A
Remillieux