X-ray microfocussing combined with microfluidics for on-chip X-ray scattering measurements.
This work describes the fabrication of thin microfluidic devices in Kapton (polyimide). These chips are well-suited to perform X-ray scattering experiments using intense microfocussed beams, as Kapton is both relatively resistant to the high intensities generated by a synchrotron, and almost transparent to X-rays. We show networks of microchannels obtained using laser ablation of Kapton films, and we also present a simple way to perform fusion bonding between two Kapton films. The possibilities offered using such devices are illustrated with X-ray scattering experiments. These experiments demonstrate that structural measurements in the 1 A-20 nm range can be obtained with spatial resolutions of a few microns in a microchannel.
ESRF, 6 rue Jules Horowitz, BP220, 38043 Grenoble Cedex, France.
Ray
R
Barrett
Marc
M
Faucon
John
J
Lopez
Galder
G
Cristobal
Fanny
F
Destremaut
Arash
A
Dodge
Pierre
P
Guillot
Philippe
P
Laval
Chloé
C
Masselon
Jean-Baptiste
JB
Salmon
D046228:Microarray Analysis / Q000295:instrumentation / Q000379:methods*; D046210:Microfluidic Analytical Techniques / Q000295:instrumentation / Q000379:methods*; D012117:Resins, Synthetic / Q000737:chemistry; D014961:X-Ray Diffraction / Q000295:instrumentation / Q000379:methods
D012117:Resins, Synthetic; C029945:polyimide resin