X-ray diffraction on Si single crystal with a W-shaped longitudinal groove.
The measurement of the sagittal deviation of an X-ray beam diffracted on the inclined surface of an Si(111) single crystal was performed on beamline BM5 at the ESRF, with lambda = 0.1 nm and an inclination angle, beta, of 70 degrees . The measured value agrees with the theory developed in previous papers. The topographic picture of the longitudinal edge shows a structure that can be explained in terms of the properties of inclined diffraction.
Artemiev
N
N
Institute of Physics, Academy of Sciences of the Czech Republic, Na Slovance 2, 18221 Praha 8, Czech Republic.
Busetto
E
E
Hrdý
J
J
Pacherová
O
O
Snigirev
A
A
Suvorov
A
A