Deterministic positioning of three-dimensional structures on a substrate by film growth.
A process to fabricate three-dimensional crystalline structures at controlled locations on a substrate during film growth and annealing is demonstrated. Low-energy electron microscopy reveals that silver is transported to regions on a tungsten surface with closely spaced atomic steps. By controlling the substrate topography using a focused ion beam to machine small holes, this general mechanism produces an array of cylinders as a silver film dewets the substrate.
McCarty
Kevin F
KF
Sandia National Laboratories, Livermore, California 94550, USA. mccarty@sandia.gov
D003460:Crystallization / Q000379:methods*; D008422:Materials Testing; D008567:Membranes, Artificial; D008968:Molecular Conformation; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure*; D012834:Silver / Q000032:analysis / Q000737:chemistry*; D013499:Surface Properties; D014414:Tungsten / Q000032:analysis / Q000737:chemistry*
D008567:Membranes, Artificial; D012834:Silver; D014414:Tungsten