Microfabricated quadrupole ion trap for mass spectrometer applications.
An array of miniaturized cylindrical quadrupole ion traps, with a radius of 20 microm, is fabricated using silicon micromachining using phosphorus doped polysilicon and silicon dioxide for the purpose of creating a mass spectrometer on a chip. We have operated the array for mass-selective ion ejection and mass analysis using Xe ions at a pressure of 10(-4). The scaling rules for the ion trap in relation to operating pressure, voltage, and frequency are examined.
Pau
S
S
The University of Arizona, Tucson, Arizona 85721, USA.
Pai
C S
CS
Low
Y L
YL
Moxom
J
J
Reilly
P T A
PT
Whitten
W B
WB
Ramsey
J M
JM