title: Microfabricated quadrupole ion trap for mass spectrometer applications.
abstract: An array of miniaturized cylindrical quadrupole ion traps, with a radius of 20 microm, is fabricated using silicon micromachining using phosphorus doped polysilicon and silicon dioxide for the purpose of creating a mass spectrometer on a chip. We have operated the array for mass-selective ion ejection and mass analysis using Xe ions at a pressure of 10(-4). The scaling rules for the ion trap in relation to operating pressure, voltage, and frequency are examined.
authors.affiliation: The University of Arizona, Tucson, Arizona 85721, USA.
authors.forename: S
authors.initials: S
authors.lastname: Pau
authors.forename: C S
authors.initials: CS
authors.lastname: Pai
authors.forename: Y L
authors.initials: YL
authors.lastname: Low
authors.forename: J
authors.initials: J
authors.lastname: Moxom
authors.forename: P T A
authors.initials: PT
authors.lastname: Reilly
authors.forename: W B
authors.initials: WB
authors.lastname: Whitten
authors.forename: J M
authors.initials: JM
authors.lastname: Ramsey