Transmission phase gratings for EUV interferometry.
The performance of the recently developed EUV phase-shifting point diffraction interferometer (PS/PDI) depends heavily on the characteristics of the grating beamsplitter used in the implementation. Ideally, such a grating should provide throughput of better than 25% and diffraction efficiency, defined as the ratio of the first-diffracted-order power to the zero-order power, variable in the range from approximately 10 to 500. The optimal method for achieving these goals is by way of a phase grating. Also, PS/PDI system implementation issues favor the use of transmission gratings over reflection gratings. Here, the design, fabrication, and characterization of a recently developed transmission phase grating developed for use in EUV interferometry is described.
Naulleau
P P
PP
Center for X-ray Optics, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA. pnaulleau@lbl.gov
Cho
C H
CH
Gullikson
E M
EM
Bokor
J
J