Photoconductive optically driven deformable membrane for spatial light modulator applications utilizing GaAs substrates.
The fabrication and characterization of an optically addressable deformable mirror for a spatial light modulator is described. Device operation utilizes an electrostatically driven pixellated aluminized polymeric membrane mirror supported above an optically controlled photoconductive GaAs substrate. A 5 microm thick grid of patterned photoresist supports the 2 microm thick aluminized Mylar membrane. A conductive ZnO layer is placed on the back side of the GaAs wafer. A standard Michelson interferometer is used to measure mirror deformation data as a function of illumination, applied voltage, and frequency. A simplified analysis of device operation is also presented.
Haji-Saeed
Bahareh
B
Department of Physics and Electrical and Computer Engineering, University of Massachusetts, Lowell 01854, USA.
Kolluru
Rathna
R
Pyburn
Dana
D
Leon
Roberto
R
Sengupta
Sandip K
SK
Testorf
Markus
M
Goodhue
William
W
Khoury
Jed
J
Drehman
Alvin
A
Woods
Charles L
CL
Kierstead
John
J