title: Modeling, simulation, and open-loop control of a continuous facesheet MEMS deformable mirror.
abstract: We introduce a coupled system of nonlinear partial differential equations (PDEs) to model a particular microelectromechanical systems (MEMS) deformable mirror consisting of a continuous facesheet coupled with electrostatic plate-driven actuators. To make the problem computationally tractable, we reduced the system to a single linear PDE for the facesheet coupled with nonlinear algebraic constraints for each of the actuators. We also introduce a nonlinearly constrained quadratic optimization problem for open-loop control of the MEMS mirror. Numerical simulation and control results are presented, and shortcomings of the model are discussed.
authors.affiliation: Department of Mathematical Sciences, Montana State University, Bozeman, 59717, USA. vogel@math.montana.edu
authors.forename: Curtis R
authors.initials: CR
authors.lastname: Vogel
authors.forename: Qiang
authors.initials: Q
authors.lastname: Yang