title: Ultrahigh-quality photonic crystal cavity in GaAs.
abstract: Membrane-based photonic crystal GaAs cavities with a double-heterostructure design were investigated. They show the highest quality factors for GaAs photonic crystal cavities to date, exhibiting quality factors higher than 10(5). The resonances of these cavities were fine-tuned in steps smaller than 2 nm by digital etching.
authors.affiliation: Lehrstuhl für Technische Physik, Universität Würzburg, Würzburg, Germany.
authors.forename: Rafael
authors.initials: R
authors.lastname: Herrmann
authors.forename: Thomas
authors.initials: T
authors.lastname: Sünner
authors.forename: Tobias
authors.initials: T
authors.lastname: Hein
authors.forename: Andreas
authors.initials: A
authors.lastname: Löffler
authors.forename: Martin
authors.initials: M
authors.lastname: Kamp
authors.forename: Alfred
authors.initials: A
authors.lastname: Forchel