Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light.
We have acquired images with a spatial resolution better than 38 nm by using a tabletop microscope that combines 13 nm wavelength light from a high-brightness tabletop laser and Fresnel zone plate optics. These results open a gateway to the development of compact and widely available extreme-ultraviolet imaging tools capable of inspecting samples in a variety of environments with a 15-20 nm spatial resolution and a picosecond time resolution.
Vaschenko
G
G
National Science Foundation Engineering Research Center for Extreme Ultraviolet Science and Technology, Colorado, USA. vaschen@engr.colostate.edu
Brewer
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Brizuela
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Wang
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Larotonda
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Luther
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Marconi
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Menoni
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Anderson
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Chao
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Attwood
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