Extreme-ultraviolet spectral purity and magnetic ion debris mitigation by use of low-density tin targets.
We investigate the extreme-ultraviolet (EUV) emission from targets that contain tin as an impurity and the advantages of using these targets for ion debris mitigation by use of a magnetic field. The EUV spectral features were characterized by a transmission grating spectrograph. The in-band EUV emission energy was measured with a calorimeter of absolute calibration. The ion flux coming from the plume was measured with a Faraday cup. Our studies indicate that 0.5% Sn density is necessary to obtain a conversion efficiency very close to that of full-density Sn. The use of Sn-doped low-Z targets provides a narrower unresolved transition array and facilitates better control of energetic ions in the presence of a moderate magnetic field of 0.64 T.
Harilal
S S
SS
Center for Energy Research, University of California, San Diego, La Jolla 92093-0438, USA. sharilal@ucsd.edu
Tillack
M S
MS
Tao
Y
Y
O'Shay
B
B
Paguio
R
R
Nikroo
A
A