title: Photoconductive optically driven deformable membrane for spatial light modulator applications utilizing GaAs substrates.
abstract: The fabrication and characterization of an optically addressable deformable mirror for a spatial light modulator is described. Device operation utilizes an electrostatically driven pixellated aluminized polymeric membrane mirror supported above an optically controlled photoconductive GaAs substrate. A 5 microm thick grid of patterned photoresist supports the 2 microm thick aluminized Mylar membrane. A conductive ZnO layer is placed on the back side of the GaAs wafer. A standard Michelson interferometer is used to measure mirror deformation data as a function of illumination, applied voltage, and frequency. A simplified analysis of device operation is also presented.
authors.affiliation: Department of Physics and Electrical and Computer Engineering, University of Massachusetts, Lowell 01854, USA.
authors.forename: Bahareh
authors.initials: B
authors.lastname: Haji-Saeed
authors.forename: Rathna
authors.initials: R
authors.lastname: Kolluru
authors.forename: Dana
authors.initials: D
authors.lastname: Pyburn
authors.forename: Roberto
authors.initials: R
authors.lastname: Leon
authors.forename: Sandip K
authors.initials: SK
authors.lastname: Sengupta
authors.forename: Markus
authors.initials: M
authors.lastname: Testorf
authors.forename: William
authors.initials: W
authors.lastname: Goodhue
authors.forename: Jed
authors.initials: J
authors.lastname: Khoury
authors.forename: Alvin
authors.initials: A
authors.lastname: Drehman
authors.forename: Charles L
authors.initials: CL
authors.lastname: Woods
authors.forename: John
authors.initials: J
authors.lastname: Kierstead