title: Sub-38 nm resolution tabletop microscopy with 13 nm wavelength laser light.
abstract: We have acquired images with a spatial resolution better than 38 nm by using a tabletop microscope that combines 13 nm wavelength light from a high-brightness tabletop laser and Fresnel zone plate optics. These results open a gateway to the development of compact and widely available extreme-ultraviolet imaging tools capable of inspecting samples in a variety of environments with a 15-20 nm spatial resolution and a picosecond time resolution.
authors.affiliation: National Science Foundation Engineering Research Center for Extreme Ultraviolet Science and Technology, Colorado, USA. vaschen@engr.colostate.edu
authors.forename: G
authors.initials: G
authors.lastname: Vaschenko
authors.forename: C
authors.initials: C
authors.lastname: Brewer
authors.forename: F
authors.initials: F
authors.lastname: Brizuela
authors.forename: Y
authors.initials: Y
authors.lastname: Wang
authors.forename: M A
authors.initials: MA
authors.lastname: Larotonda
authors.forename: B M
authors.initials: BM
authors.lastname: Luther
authors.forename: M C
authors.initials: MC
authors.lastname: Marconi
authors.forename: J J
authors.initials: JJ
authors.lastname: Rocca
authors.forename: C S
authors.initials: CS
authors.lastname: Menoni
authors.forename: E H
authors.initials: EH
authors.lastname: Anderson
authors.forename: W
authors.initials: W
authors.lastname: Chao
authors.forename: B D
authors.initials: BD
authors.lastname: Harteneck
authors.forename: J A
authors.initials: JA
authors.lastname: Liddle
authors.forename: Y
authors.initials: Y
authors.lastname: Liu
authors.forename: D T
authors.initials: DT
authors.lastname: Attwood