Ultrahigh-quality photonic crystal cavity in GaAs.
Membrane-based photonic crystal GaAs cavities with a double-heterostructure design were investigated. They show the highest quality factors for GaAs photonic crystal cavities to date, exhibiting quality factors higher than 10(5). The resonances of these cavities were fine-tuned in steps smaller than 2 nm by digital etching.
Herrmann
Rafael
R
Lehrstuhl für Technische Physik, Universität Würzburg, Würzburg, Germany.
Sünner
Thomas
T
Hein
Tobias
T
Löffler
Andreas
A
Kamp
Martin
M
Forchel
Alfred
A