Scalable multichannel micromachining with pseudo-nondiffracting vacuum ultraviolet beam arrays generated by thin-film axicons.
Scalable multichannel microstructuring was demonstrated by multiplexing a focused molecular fluorine laser beam with cylindrical nanolayer microaxicons into an array of converging pseudo-nondiffracting subbeams. The axicons were fabricated by shadow-mask vapor deposition of magnesium fluoride onto substrates of identical material. Long-period surface gratings of variable pitch were generated on poly(methyl methacrylate) by varying the target position within the converging periodic focal lines.
Grunwald
Ruediger
R
Max-Born-Institut für Nichtlineare Optik und Kurzzeitspektroskopie, Berlin, Germany. grunwald@mbi-berlin.de
Neumann
Uwe
U
Rosenfeld
Arkadi
A
Li
Jianzhao
J
Herman
Peter R
PR