Controllable fabrication of two-dimensional compound photonic crystals by single-exposure holographic lithography.
We demonstrate an approach of single-exposure holographic lithography for controllable fabrication of large-scale two-dimensional square and hexagonal compound photonic crystals. In the sublattices, both circular and elliptical micropores on a 100 nm scale can be achieved. Theoretical analysis reveals that the inverse structure of a sample possesses a unique complete photonic bandgap pair in high frequency regions. This method is very robust for the general fabrication of complex periodic microstructures on the optical scale.
Mao
Weidong
W
State Key Laboratory of Optoelectronic Materials and Technologies, Zhongsham (Sun Yat-sen), University, China.
Liang
Guanquan
G
Zou
Hui
H
Wang
Hezhou
H