title: Scalable multichannel micromachining with pseudo-nondiffracting vacuum ultraviolet beam arrays generated by thin-film axicons.
abstract: Scalable multichannel microstructuring was demonstrated by multiplexing a focused molecular fluorine laser beam with cylindrical nanolayer microaxicons into an array of converging pseudo-nondiffracting subbeams. The axicons were fabricated by shadow-mask vapor deposition of magnesium fluoride onto substrates of identical material. Long-period surface gratings of variable pitch were generated on poly(methyl methacrylate) by varying the target position within the converging periodic focal lines.
authors: Max-Born-Institut für Nichtlineare Optik und Kurzzeitspektroskopie, Berlin, Germany. grunwald@mbi-berlin.de
authors: Ruediger
authors: R
authors: Grunwald
authors: Uwe
authors: U
authors: Neumann
authors: Arkadi
authors: A
authors: Rosenfeld
authors: Jianzhao
authors: J
authors: Li
authors: Peter R
authors: PR
authors: Herman