Monitoring small defects on surface microstructures through backscattering measurements.
The detection and characterization of small defects on particles or structures of a size comparable with the incident wavelength and located on flat substrates is numerically analyzed. For metallic scattering systems, calculations based on the extinction theorem of physical optics show that geometrical information about a small Gaussian defect can be obtained by partially integrating the backscattering patterns.
Albella
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P
Grupo de Optica, Departamento de Física Aplicada, Universidad de Cantabria, Spain. albellap@unican.es
Moreno
F
F
Saiz
J M
JM
González
F
F