A single electron transistor on an atomic force microscope probe.
We report fabrication as well as proof-of-concept experiments of a noninvasive sensor of weak nanoscale electric fields. The sensor is a single electron transistor (SET) placed at the tip of a noncontact atomic force microscope (AFM). This is a general technology to make any nanometer-sized lithography pattern at edges or tips of a cantilever. The height control of the AFM allows the SET to hover a few nanometers above the substrate, improving both the electric field sensitivity and lateral resolution of the electrometer. Our AFM-SET sensor is prepared by a scalable technology. It means that the probe can be routinely fabricated and replaced, if broken.
Brenning
Henrik T A
HT
Microtechnology and Nanoscience, Chalmers University of Technology, SE-412 96, Gothenburg, Sweden. henrik.brenning@mc2.chalmers.se
Kubatkin
Sergey E
SE
Erts
Donats
D
Kafanov
Sergey G
SG
Bauch
Thilo
T
Delsing
Per
P