title: Hard X-ray microbeam experiment at the Tristan main ring test beamline of the KEK.
abstract: A hard X-ray microbeam with zone-plate optics has been tested at the MR-BW-TL beamline on the Tristan main ring of the KEK, and preliminary experiments on scanning microscopy have also been performed. A sputtered-sliced Fresnel zone plate with an Au core and Ag/C multilayer is used as an X-ray focusing device. The outermost zone width of the zone plate is 0.25 microm. A focused spot size of approximately 0.5 mum has been achieved at an X-ray energy of 8.54 keV. In a scanning X-ray microscopy experiment, test patterns with submicrometer fine structure have been clearly resolved.
authors.affiliation: Advanced Research Laboratory, Hitachi Ltd, Hatoyama, Saitama 350-03, Japan.
authors.forename: Y
authors.initials: Y
authors.lastname: Suzuki
authors.forename: N
authors.initials: N
authors.lastname: Kamijo
authors.forename: S
authors.initials: S
authors.lastname: Tamura
authors.forename: K
authors.initials: K
authors.lastname: Handa
authors.forename: A
authors.initials: A
authors.lastname: Takeuchi
authors.forename: S
authors.initials: S
authors.lastname: Yamamoto
authors.forename: H
authors.initials: H
authors.lastname: Sugiyama
authors.forename: K
authors.initials: K
authors.lastname: Ohsumi
authors.forename: M
authors.initials: M
authors.lastname: Ando