Frequency-comb-based interferometer for profilometry and tomography.
A novel interferometry technique using a frequency-comb light source is proposed for surface profilometry and tomography of discontinuous objects. Surface profile measurement is performed by sweeping the comb interval frequency without mechanical scanning. Step heights of 0.5 and 1.0 mm are successfully measured by use of the scheme with 9 mum accuracy.
Choi
Samuel
S
Department of Technology, Tokyo University of Agriculture and Technology, Koganei-shi, Tokyo, Japan. samuel@cc.tuat.ac.jp
Yamamoto
Mitsufumi
M
Moteki
Daisuke
D
Shioda
Tatsutoshi
T
Tanaka
Yosuke
Y
Kurokawa
Takashi
T
D000465:Algorithms; D004867:Equipment Design; D019544:Equipment Failure Analysis; D007089:Image Enhancement / Q000295:instrumentation* / Q000379:methods; D007090:Image Interpretation, Computer-Assisted / Q000295:instrumentation* / Q000379:methods; D021621:Imaging, Three-Dimensional / Q000295:instrumentation* / Q000379:methods; D007368:Interferometry / Q000295:instrumentation* / Q000379:methods; D019047:Phantoms, Imaging; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D041623:Tomography, Optical Coherence / Q000295:instrumentation* / Q000379:methods