Bulk acoustic resonator based on piezoelectric ZnO belts.
In this paper, a bulk acoustic resonator based on ZnO belts is demonstrated. This device shows a great deal of promise in applications as an electronic filter and as a mass sensor. The fabricated device was characterized using vector network analysis, and both the first and third harmonics of resonance were observed at approximately 247 and 754 MHz, respectively. A one-dimensional Krimholt-Leedom-Matthaei model was utilized to predict the resonant frequency of the device and confirm the observed behavior.
Buchine
Brent A
BA
School of Materials Science and Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332-0245, USA.
Hughes
William L
WL
Degertekin
F Levent
FL
Wang
Zhong L
ZL
D000162:Acoustics; D004563:Electrochemistry / Q000295:instrumentation* / Q000379:methods; D004566:Electrodes; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008422:Materials Testing; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure*; D010316:Particle Size; D014159:Transducers; D014732:Vibration; D015034:Zinc Oxide / Q000737:chemistry*
D015034:Zinc Oxide