title: Analytical solutions of the azimuthal deviation of a polarizer and an analyzer by polarizer-sample-analyzer ellipsometry.
abstract: The analytical solutions of the azimuthal deviation of a polarizer and an analyzer were obtained by polarizer-sample-analyzer ellipsometry with a three-intensity measurement technique. By performing two sets of this three-intensity measurement with the polarizer's azimuth set at 45 degrees and at -45 degrees , we were able to obtain a set of ellipsometric parameters free from the azimuthal deviations of the polarizer and the analyzer.
authors.affiliation: Department of Photonics, Institute of Electro-Optical Engineering, National Chiao Tung University, Hsinchu, Taiwan. yfchao@mail.nctu.edu.tw
authors.forename: Yu Faye
authors.initials: YF
authors.lastname: Chao
authors.forename: Kan Yan
authors.initials: KY
authors.lastname: Lee
authors.forename: Yi De
authors.initials: YD
authors.lastname: Lin