title: Frequency-comb-based interferometer for profilometry and tomography.
abstract: A novel interferometry technique using a frequency-comb light source is proposed for surface profilometry and tomography of discontinuous objects. Surface profile measurement is performed by sweeping the comb interval frequency without mechanical scanning. Step heights of 0.5 and 1.0 mm are successfully measured by use of the scheme with 9 mum accuracy.
authors.affiliation: Department of Technology, Tokyo University of Agriculture and Technology, Koganei-shi, Tokyo, Japan. samuel@cc.tuat.ac.jp
authors.forename: Samuel
authors.initials: S
authors.lastname: Choi
authors.forename: Mitsufumi
authors.initials: M
authors.lastname: Yamamoto
authors.forename: Daisuke
authors.initials: D
authors.lastname: Moteki
authors.forename: Tatsutoshi
authors.initials: T
authors.lastname: Shioda
authors.forename: Yosuke
authors.initials: Y
authors.lastname: Tanaka
authors.forename: Takashi
authors.initials: T
authors.lastname: Kurokawa
mesh_terms: D000465:Algorithms; D004867:Equipment Design; D019544:Equipment Failure Analysis; D007089:Image Enhancement / Q000295:instrumentation* / Q000379:methods; D007090:Image Interpretation, Computer-Assisted / Q000295:instrumentation* / Q000379:methods; D021621:Imaging, Three-Dimensional / Q000295:instrumentation* / Q000379:methods; D007368:Interferometry / Q000295:instrumentation* / Q000379:methods; D019047:Phantoms, Imaging; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D041623:Tomography, Optical Coherence / Q000295:instrumentation* / Q000379:methods