Analytical solutions of the azimuthal deviation of a polarizer and an analyzer by polarizer-sample-analyzer ellipsometry.
The analytical solutions of the azimuthal deviation of a polarizer and an analyzer were obtained by polarizer-sample-analyzer ellipsometry with a three-intensity measurement technique. By performing two sets of this three-intensity measurement with the polarizer's azimuth set at 45 degrees and at -45 degrees , we were able to obtain a set of ellipsometric parameters free from the azimuthal deviations of the polarizer and the analyzer.
Chao
Yu Faye
YF
Department of Photonics, Institute of Electro-Optical Engineering, National Chiao Tung University, Hsinchu, Taiwan. yfchao@mail.nctu.edu.tw
Lee
Kan Yan
KY
Lin
Yi De
YD