High-precision methods and devices for in situ measurements of thermally induced aberrations in optical elements.
An optical system that comprises two devices for remote measurements, a broadband optical interferometer and a scanning Hartmann sensor, is described. The results of simultaneous measurements with both devices and the results of numerical modeling of sample surface heating are presented.
Zelenogorsky
Victor V
VV
Institute of Applied Physics of the Russian Academy of Science, Novgorod, Russia. vvmailv@mail.ru
Solovyov
Alexander A
AA
Kozhevatov
Ilya E
IE
Kamenetsky
Eugene E
EE
Rudenchik
Eugene A
EA
Palashov
Oleg V
OV
Silin
Dmitry E
DE
Khazanov
Efim A
EA