Micro-molding for poly(dimethylsiloxane) microchips.
In the present chapter, some basic definitions about the photolithography process are explained and then the standard preparation of the silicon wafer, the fabrication of the mold, and the preparation and assembly of poly(dimethylsiloxane) (PDMS)-based microchips are discussed. The purpose of this chapter is to describe the most used techniques for preparation of PDMS microchips. A list of tips is included in order to provide a troubleshooting guide for the most common difficulties found during the fabrication process. Some recent alternative approaches to microfabrication are also discussed.
García
Carlos D
CD
Department of Chemistry, University of Texas-San Antonio, San Antonio, TX, USA.
Henry
Charles S
CS
D004129:Dimethylpolysiloxanes; D046209:Electrophoresis, Microchip / Q000295:instrumentation* / Q000379:methods*; D004867:Equipment Design; D006358:Hot Temperature; D010781:Photography; D012828:Silicones
D004129:Dimethylpolysiloxanes; D012828:Silicones; C013830:baysilon