Combined surface-focused acoustic microscopy in transmission and scanning ultrasonic holography.
Employment of ultrasound techniques in nondestructive testing may require identification of the acoustic modes contributing to imaging. Such identification can be achieved, with some restrictions, by time-of-flight analysis. Another approach is acoustic holography that reveals the propagation properties of any selected mode. In anisotropic media, the propagation features are distinct and allow for a reliable classification of the selected mode. Both techniques were applied for classification of bonded, disbonded, and weakly bonded areas in directly bonded semiconductor wafers.
Twerdowski
Evgeny
E
University of Leipzig, Institute of Experimental Physics II, D-04103 Leipzig, Germany. twerdowski@physik.uni-leipzig.de <twerdowski@physik.uni-leipzig.de>
von Buttlar
Moritz
M
Razek
Nasser
N
Wannemacher
Reinhold
R
Schindler
Axel
A
Grill
Wolfgang
W
D004867:Equipment Design; D019544:Equipment Failure Analysis; D006696:Holography / Q000379:methods*; D007089:Image Enhancement / Q000295:instrumentation* / Q000379:methods*; D033401:Microscopy, Acoustic / Q000295:instrumentation* / Q000379:methods*; D018613:Microscopy, Confocal / Q000295:instrumentation* / Q000379:methods*; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D018511:Systems Integration