High frequency broadband PZT thick film ultrasonic transducers for medical imaging applications.
A modified sol-gel method is used to prepare PZT thick film on Pt-coated silicon substrate. A new method of vacuum filling sol-gel precursor solution is introduced to improve film quality. The effects of the filling on PZT thick film structure and ferroelectric properties are discussed. The fabrication of a high frequency transducer with the PZT film as the actuating layer is described. The performance of the transducer is measured and results show that the transducer backed by E-Solder without a matching layer has a center frequency of 103 MHz and a bandwidth of 70%. Beam profile measurements show that the transducer has an axial resolution of 9.2 microm and a lateral resolution of 33 microm.
Zhang
Q Q
QQ
Geospace Research Inc., El Segundo, CA 90245, USA.
Djuth
F T
FT
Zhou
Q F
QF
Hu
C H
CH
Cha
J H
JH
Shung
K K
KK
D055590:Electromagnetic Phenomena / Q000295:instrumentation* / Q000379:methods; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008567:Membranes, Artificial; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D014159:Transducers; D014463:Ultrasonography / Q000295:instrumentation* / Q000379:methods
D008567:Membranes, Artificial