title: High frequency broadband PZT thick film ultrasonic transducers for medical imaging applications.
abstract: A modified sol-gel method is used to prepare PZT thick film on Pt-coated silicon substrate. A new method of vacuum filling sol-gel precursor solution is introduced to improve film quality. The effects of the filling on PZT thick film structure and ferroelectric properties are discussed. The fabrication of a high frequency transducer with the PZT film as the actuating layer is described. The performance of the transducer is measured and results show that the transducer backed by E-Solder without a matching layer has a center frequency of 103 MHz and a bandwidth of 70%. Beam profile measurements show that the transducer has an axial resolution of 9.2 microm and a lateral resolution of 33 microm.
authors.affiliation: Geospace Research Inc., El Segundo, CA 90245, USA.
authors.forename: Q Q
authors.initials: QQ
authors.lastname: Zhang
authors.forename: F T
authors.initials: FT
authors.lastname: Djuth
authors.forename: Q F
authors.initials: QF
authors.lastname: Zhou
authors.forename: C H
authors.initials: CH
authors.lastname: Hu
authors.forename: J H
authors.initials: JH
authors.lastname: Cha
authors.forename: K K
authors.initials: KK
authors.lastname: Shung
mesh_terms: D055590:Electromagnetic Phenomena / Q000295:instrumentation* / Q000379:methods; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008567:Membranes, Artificial; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D014159:Transducers; D014463:Ultrasonography / Q000295:instrumentation* / Q000379:methods
chemical_list: D008567:Membranes, Artificial