Collisionless heating in capacitive discharges enhanced by dual-frequency excitation.
We discuss collisionless electron heating in capacitive discharges excited by a combination of two disparate frequencies. By developing an analytical model, we find, contrary to expectation, that the net heating in this case is much larger than the sum of the effects occurring when the two frequencies act separately. This prediction is substantiated by kinetic simulations, which are also in excellent general quantitative agreement with the model for discharge parameters that are typical of recent experiments.
Turner
M M
MM
School of Physical Sciences and National Centre for Plasma Science and Technology, Dublin City University, Dublin 9, Ireland. miles.turner@dcu.ie
Chabert
P
P