title: Combined surface-focused acoustic microscopy in transmission and scanning ultrasonic holography.
abstract: Employment of ultrasound techniques in nondestructive testing may require identification of the acoustic modes contributing to imaging. Such identification can be achieved, with some restrictions, by time-of-flight analysis. Another approach is acoustic holography that reveals the propagation properties of any selected mode. In anisotropic media, the propagation features are distinct and allow for a reliable classification of the selected mode. Both techniques were applied for classification of bonded, disbonded, and weakly bonded areas in directly bonded semiconductor wafers.
authors.affiliation: University of Leipzig, Institute of Experimental Physics II, D-04103 Leipzig, Germany. twerdowski@physik.uni-leipzig.de <twerdowski@physik.uni-leipzig.de>
authors.forename: Evgeny
authors.initials: E
authors.lastname: Twerdowski
authors.forename: Moritz
authors.initials: M
authors.lastname: von Buttlar
authors.forename: Nasser
authors.initials: N
authors.lastname: Razek
authors.forename: Reinhold
authors.initials: R
authors.lastname: Wannemacher
authors.forename: Axel
authors.initials: A
authors.lastname: Schindler
authors.forename: Wolfgang
authors.initials: W
authors.lastname: Grill
mesh_terms: D004867:Equipment Design; D019544:Equipment Failure Analysis; D006696:Holography / Q000379:methods*; D007089:Image Enhancement / Q000295:instrumentation* / Q000379:methods*; D033401:Microscopy, Acoustic / Q000295:instrumentation* / Q000379:methods*; D018613:Microscopy, Confocal / Q000295:instrumentation* / Q000379:methods*; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D018511:Systems Integration