Surface microanalysis with slow electrons.
Microanalysis on the 10-nm level using imaging, diffraction, and spectroscopy of slow photo-emitted and reflected electrons is discussed. The instrumentation that uses a cathode lens is briefly reviewed, and a number of applications illustrate the power of this microanalysis method.
Bauer
Ernst G
EG
Department of Physics and Astronomy, Arizona State University, Tempe, AZ 85287-1504, USA. ernst.bauer@asu.edu