title: Nano-electromechanical displacement sensing based on single-walled carbon nanotubes.
abstract: We present a nano-electromechanical system based on an individual single-walled carbon nanotube (SWNT) demonstrating their potential use for future displacement sensing at the nanoscale. The fabrication and characterization of the proposed nanoscaled transducer, consisting of a suspended metal cantilever mounted on top of the center of a suspended SWNT, is presented and discussed. The displacement of the nanoscale cantilever is detected via the electromechanically induced change in conductance of the strained SWNT. A relative differential resistance sensitivity (for a metallic SWNT) of up to 27.5%/nm was measured and a piezoresistive gauge factor of a SWNT of up to 2900 was extracted.
authors.affiliation: Micro and Nanosystems, ETH Zurich, Switzerland. christoph.stampfer@micro.mavt.ethz.ch
authors.forename: C
authors.initials: C
authors.lastname: Stampfer
authors.forename: A
authors.initials: A
authors.lastname: Jungen
authors.forename: R
authors.initials: R
authors.lastname: Linderman
authors.forename: D
authors.initials: D
authors.lastname: Obergfell
authors.forename: S
authors.initials: S
authors.lastname: Roth
authors.forename: C
authors.initials: C
authors.lastname: Hierold
mesh_terms: D004563:Electrochemistry; D008855:Microscopy, Electron, Scanning; D037742:Nanotubes, Carbon / Q000737:chemistry*; D013314:Stress, Mechanical
chemical_list: D037742:Nanotubes, Carbon