Nano-electromechanical displacement sensing based on single-walled carbon nanotubes.
We present a nano-electromechanical system based on an individual single-walled carbon nanotube (SWNT) demonstrating their potential use for future displacement sensing at the nanoscale. The fabrication and characterization of the proposed nanoscaled transducer, consisting of a suspended metal cantilever mounted on top of the center of a suspended SWNT, is presented and discussed. The displacement of the nanoscale cantilever is detected via the electromechanically induced change in conductance of the strained SWNT. A relative differential resistance sensitivity (for a metallic SWNT) of up to 27.5%/nm was measured and a piezoresistive gauge factor of a SWNT of up to 2900 was extracted.
Stampfer
C
C
Micro and Nanosystems, ETH Zurich, Switzerland. christoph.stampfer@micro.mavt.ethz.ch
Jungen
A
A
Linderman
R
R
Obergfell
D
D
Roth
S
S
Hierold
C
C
D004563:Electrochemistry; D008855:Microscopy, Electron, Scanning; D037742:Nanotubes, Carbon / Q000737:chemistry*; D013314:Stress, Mechanical
D037742:Nanotubes, Carbon