Current-free double-layer formation in inductively coupled plasma in a uniform magnetic field.
The axial profiles of plasma parameters for low and moderate pressures, such as the plasma potential, electron temperature, and number density, have been evaluated in magnetized inductively coupled plasma. The experimental results revealed in both cases the existence of a genuine current-free double-layer structure, separating two plasma regions with different properties. Based on the experimental results, a physical scenario for the self-assembling of the double layer is proposed. Also, the axial profile of the electron number density downstream is analyzed, emphasizing the role of neutral metastable ionization, and a simple analytical model is developed to fit the experimental data. The model allows the estimation of neutral metastable number density downstream and the recombination rate coefficient.
Popescu
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S
Department of Electrical and Electronic Engineering, Saga University, Honjo-machi 1, Saga 840-8502, Japan. seba@ep.ee.saga-u.ac.jp
Ohtsu
Y
Y
Fujita
H
H