title: Inverted mesa-type quartz crystal resonators fabricated by deep-reactive ion etching.
abstract: In this letter, we present experimental data showing Q change versus thickness for a quartz-crystal resonator fabricated with deep-reactive ion etching. Measurements show that Q increases as etch depth increases, and further that Q can be optimized as a function of etch depth and diameter of the resonator.
authors.forename: Takashi
authors.initials: T
authors.lastname: Abe
authors.forename: Vu Ngoc
authors.initials: VN
authors.lastname: Hung
authors.forename: Masayoshi
authors.initials: M
authors.lastname: Esashi