F2-laser-machined submicrometer gratings in thin dielectric films for resonant grating waveguide applications.
Surface-relief gratings with submicrometer modulation periods were ablated by F2-laser radiation in thin metal-oxide films to produce resonant grating waveguide structures. For 150 nm films of Nb2O5, grating amplitudes in the range of 5-50 nm could be reproducibly excised with a controlled exposure of a laser energy density and a number of pulses within a narrow processing window. Resonant coupling of 800 nm ultrashort pulsed laser light into the resulting grating waveguide structure is verified with reflection and transmission spectra and satisfactorily modeled by coupled-mode theory. The laser-fabricated grating waveguides are attractive for high damage threshold reflectors and biosensor applications.
Bader
Mark Andreas
MA
Laser-Laboratorium Göttingen e.V., Nonlinear Optics, Germany. mbader@llg.gwdg.de
Kappel
Christoph
C
Selle
André
A
Ihlemann
Jürgen
J
Ng
Mi Li
ML
Herman
Peter R
PR