Inverted mesa-type quartz crystal resonators fabricated by deep-reactive ion etching.
In this letter, we present experimental data showing Q change versus thickness for a quartz-crystal resonator fabricated with deep-reactive ion etching. Measurements show that Q increases as etch depth increases, and further that Q can be optimized as a function of etch depth and diameter of the resonator.
Abe
Takashi
T
Hung
Vu Ngoc
VN
Esashi
Masayoshi
M