Demonstration of fiber-laser-produced plasma source and application to efficient extreme UV light generation.
Efficient generation of extreme UV (EUV) light at lambda = 13.5 nm from a bulk Sn target has been demonstrated by using a fiber laser. The conversion efficiency from the 1064 nm IR to the EUV was measured to be around 0.9% into 2pi steradians within a 2% bandwidth. To the best of our knowledge, this is the first time an all-fiber system was used to generate EUV or soft x rays.
Mordovanakis
Aghapi G
AG
Center for Ultrafast Optical Science, University of Michigan, Ann Arbor, Michigan 48109, USA. amordova@umich.edu
Hou
Kai-Chung
KC
Chang
Yu-Chung
YC
Cheng
Ming-Yuan
MY
Nees
John
J
Hou
Bixue
B
Maksimchuk
Anatoly
A
Mourou
Gerard
G
Galvanauskas
Almantas
A
Lafontaine
Bruno
B