A flexible instrument control and image acquisition system for a scanning electron microscope.
We have developed an instrument control and image acquisition system for use with scanning electron microscopes. By making the system flexible over a wide range of operating voltages, scan generation and image acquisition modes can be easily accommodated to a wide range of instruments. We show the implementation of this system for use with a custom-built low-voltage scanning electron microscope. We then explore the simple modifications that are required for control of two instruments intended for use as free electron lasers.
Kapp
O H
OH
Enrico Fermi Institute, University of Chicago, 5640 S. Ellis Ave., Chicago Il 60637, USA. bud@midway.uchicago.edu
Smith
D R
DR
Jendraszkiewicz
G
G
Gorodezky
I
I
Kim
Kwang-Je
KJ
Crewe
A V
AV