Model-independent method for the determination of guiding thin-film optical parameters.
A method for the determination of the optical constants of thin films based on the combination of a waveguide measurement procedure with the spectroscopic measurements made from the UV to the IR is presented. As a test material AlN thin film on sapphire substrates is investigated.
Salakhutdinov
Ildar
I
Department of Electrical and Computer Engineering, Wayne State University, Detroit, Michigan 48202, USA. ildar@eng.wayne.edu
Danylyuk
Yuriy
Y
Chaganti
Kalyani
K
Avrutsky
Ivan
I
Auner
Gregory
G