Z-probing of optical multilayers: theory.
A single optical technique is presented that allows direct and selective probing or imaging in the thickness of multilayers. It is based on tunable interferences of polarized light. Adequate vertical resolution is provided with this method.
Amra
Claude
C
Institut Fresnel Marseille, UMR CNRSTIC, Université Paul Cézanne, Ecole Génealiste Ingénieurs Marseille, Cedex, France. claude.amra@fresnel.fr
Deumie
Carole
C