title: Calcium copper-titanate thin film growth: tailoring of the operational conditions through nanocharacterization and substrate nature effects.
abstract: A novel approach based on a molten multicomponent precursor source has been applied for the MOCVD fabrication of high-quality CaCu(3)Ti(4)O(12) (CCTO) thin films on various substrates. The adopted in situ strategy involves a molten mixture consisting of Ca(hfa)(2).tetraglyme, Ti(tmhd)(2)(O-iPr)(2), and Cu(tmhd)(2) [Hhfa = 1,1,1,5,5,5-hexafluoro-2,4-pentanedione; tetraglyme = 2,5,8,11,14-pentaoxapentadecane; Htmhd = 2,2,6,6-tetramethyl-3,5-heptandione; O-iPr = isopropoxide] precursors. Film structural and morphological characterizations have been carried out by several techniques [X-ray diffraction (XRD), scanning electron microscopy (SEM), transmission electron microscopy (TEM)], and in particular the energy filtered TEM mapping and X-ray energy dispersive (EDX) analysis in TEM mode provided a suitable correlation between nanostructural properties of CCTO films and deposition conditions and/or the substrate nature. Correlation between the nanostructure and optical/dielectric properties has been investigated exploiting spectroscopic ellipsometry.
authors.affiliation: Institute for Microelectronics and Microsystems, IMM-CNR, Stradale Primosole n 50, 95121 Catania, Italy. raffaella.lonigro@imm.cnr.it
authors.forename: Raffaella
authors.initials: R
authors.lastname: Lo Nigro
authors.forename: Roberta G
authors.initials: RG
authors.lastname: Toro
authors.forename: Graziella
authors.initials: G
authors.lastname: Malandrino
authors.forename: Ignazio L
authors.initials: IL
authors.lastname: Fragalà
authors.forename: Maria
authors.initials: M
authors.lastname: Losurdo
authors.forename: Michelaria M
authors.initials: MM
authors.lastname: Giangregorio
authors.forename: Giovanni
authors.initials: G
authors.lastname: Bruno
authors.forename: Vito
authors.initials: V
authors.lastname: Raineri
authors.forename: Patrick
authors.initials: P
authors.lastname: Fiorenza