title: Mechanical and dielectric properties of pure-silica-zeolite low-k materials.
authors.affiliation: Department of Chemical and Environmental Engineering, University of California, Riverside, CA 92521, USA.
authors.forename: Zijian
authors.initials: Z
authors.lastname: Li
authors.forename: Mark C
authors.initials: MC
authors.lastname: Johnson
authors.forename: Minwei
authors.initials: M
authors.lastname: Sun
authors.forename: E Todd
authors.initials: ET
authors.lastname: Ryan
authors.forename: David J
authors.initials: DJ
authors.lastname: Earl
authors.forename: Wolfgang
authors.initials: W
authors.lastname: Maichen
authors.forename: Jeremy I
authors.initials: JI
authors.lastname: Martin
authors.forename: Shuang
authors.initials: S
authors.lastname: Li
authors.forename: Christopher M
authors.initials: CM
authors.lastname: Lew
authors.forename: Junlan
authors.initials: J
authors.lastname: Wang
authors.forename: Michael W
authors.initials: MW
authors.lastname: Deem
authors.forename: Mark E
authors.initials: ME
authors.lastname: Davis
authors.forename: Yushan
authors.initials: Y
authors.lastname: Yan
mesh_terms: D018360:Crystallography, X-Ray; D025802:Electric Capacitance; D004581:Electronics; D008854:Microscopy, Electron; D012822:Silicon Dioxide / Q000737:chemistry*; D017641:Zeolites / Q000737:chemistry*
chemical_list: D017641:Zeolites; D012822:Silicon Dioxide