Calcium copper-titanate thin film growth: tailoring of the operational conditions through nanocharacterization and substrate nature effects.
A novel approach based on a molten multicomponent precursor source has been applied for the MOCVD fabrication of high-quality CaCu(3)Ti(4)O(12) (CCTO) thin films on various substrates. The adopted in situ strategy involves a molten mixture consisting of Ca(hfa)(2).tetraglyme, Ti(tmhd)(2)(O-iPr)(2), and Cu(tmhd)(2) [Hhfa = 1,1,1,5,5,5-hexafluoro-2,4-pentanedione; tetraglyme = 2,5,8,11,14-pentaoxapentadecane; Htmhd = 2,2,6,6-tetramethyl-3,5-heptandione; O-iPr = isopropoxide] precursors. Film structural and morphological characterizations have been carried out by several techniques [X-ray diffraction (XRD), scanning electron microscopy (SEM), transmission electron microscopy (TEM)], and in particular the energy filtered TEM mapping and X-ray energy dispersive (EDX) analysis in TEM mode provided a suitable correlation between nanostructural properties of CCTO films and deposition conditions and/or the substrate nature. Correlation between the nanostructure and optical/dielectric properties has been investigated exploiting spectroscopic ellipsometry.
Lo Nigro
Raffaella
R
Institute for Microelectronics and Microsystems, IMM-CNR, Stradale Primosole n 50, 95121 Catania, Italy. raffaella.lonigro@imm.cnr.it
Toro
Roberta G
RG
Malandrino
Graziella
G
Fragalà
Ignazio L
IL
Losurdo
Maria
M
Giangregorio
Michelaria M
MM
Bruno
Giovanni
G
Raineri
Vito
V
Fiorenza
Patrick
P