Mechanical and dielectric properties of pure-silica-zeolite low-k materials.
Li
Zijian
Z
Department of Chemical and Environmental Engineering, University of California, Riverside, CA 92521, USA.
Johnson
Mark C
MC
Sun
Minwei
M
Ryan
E Todd
ET
Earl
David J
DJ
Maichen
Wolfgang
W
Martin
Jeremy I
JI
Li
Shuang
S
Lew
Christopher M
CM
Wang
Junlan
J
Deem
Michael W
MW
Davis
Mark E
ME
Yan
Yushan
Y
D018360:Crystallography, X-Ray; D025802:Electric Capacitance; D004581:Electronics; D008854:Microscopy, Electron; D012822:Silicon Dioxide / Q000737:chemistry*; D017641:Zeolites / Q000737:chemistry*
D017641:Zeolites; D012822:Silicon Dioxide