Concave reflective SU-8 photoresist gratings for flat-field integrated spectrometers.
On-chip spectrometry will play a leading role in the development of micro-optofluidic systems for analytical chemistry. Integrated spectrometers fabricated using a polymer-on-silicon platform have been designed, fabricated, and characterized. Reflective grating designs have been implemented using a recursive algorithm to calculate the facet positions as described by McGreer [Appl. Opt. 35, 5904 (1996)]. It is shown that the free spectral range, the output focal plane geometry, and the linear dispersion can be selected with a high degree of control independently of the chosen grating order. The polymer-on-silicon platform facilitates integration with microfluidic circuits and cost-efficient batch fabrication.
Zauner
Dan A
DA
Department of Micro and Nanotechnology, Technical University of Denmark, Denmark. dza@ignis.com
Jorgensen
Anders M
AM
Anhoj
Thomas A
TA
Hübner
Jörg
J