title: Model-independent method for the determination of guiding thin-film optical parameters.
abstract: A method for the determination of the optical constants of thin films based on the combination of a waveguide measurement procedure with the spectroscopic measurements made from the UV to the IR is presented. As a test material AlN thin film on sapphire substrates is investigated.
authors.affiliation: Department of Electrical and Computer Engineering, Wayne State University, Detroit, Michigan 48202, USA. ildar@eng.wayne.edu
authors.forename: Ildar
authors.initials: I
authors.lastname: Salakhutdinov
authors.forename: Yuriy
authors.initials: Y
authors.lastname: Danylyuk
authors.forename: Kalyani
authors.initials: K
authors.lastname: Chaganti
authors.forename: Ivan
authors.initials: I
authors.lastname: Avrutsky
authors.forename: Gregory
authors.initials: G
authors.lastname: Auner