title: Fabrication of small complex-shaped optics by plasma chemical vaporization machining with a microelectrode.
abstract: We have developed plasma chemical vaporization machining by using a microelectrode for the fabrication of small complex-shaped optical surfaces. In this method, a 0.5 mm diameter pipe microelectrode, from which processing gas is drawn in, generates a small localized plasma that is scanned over a workpiece under numerical computer control to shape a desired surface. A 12 mm x 12 mm nonaxisymmetric mirror with a maximum depth of approximately 3 microm was successfully fabricated with a peak-to-valley shape accuracy of 0.04 microm in an area excluding the edges of the mirror. The average surface roughness was 0.58 nm, which is smooth enough for optical use.
authors.affiliation: Nikon Corporation, Kanagawa, Japan. takino@nikongw.nikon.co.jp
authors.forename: Hideo
authors.initials: H
authors.lastname: Takino
authors.forename: Norio
authors.initials: N
authors.lastname: Shibata
authors.forename: Hiroshi
authors.initials: H
authors.lastname: Itoh
authors.forename: Teruki
authors.initials: T
authors.lastname: Kobayashi
authors.forename: Koshichi
authors.initials: K
authors.lastname: Nemoto
authors.forename: Takashi
authors.initials: T
authors.lastname: Fujii
authors.forename: Naohiko
authors.initials: N
authors.lastname: Goto
authors.forename: Kazuya
authors.initials: K
authors.lastname: Yamamura
authors.forename: Yasuhisa
authors.initials: Y
authors.lastname: Sano
authors.forename: Yuzo
authors.initials: Y
authors.lastname: Mori