Regular arrays of monodisperse platinum/erbium disilicide core-shell nanowires and nanoparticles on Si(001) via a self-assembled template.
We have developed a process for fabricating monodisperse noble metal/rare earth disilicide core-shell nanoparticles and nanowires in regular arrays on Si(001) with a density of 5 x 10(10) / cm2, and over areas > 1 mm2. Pt deposited via physical vapor deposition on a self-assembled rare earth disilicide nanowire template combined with reactive ion etching produces arrays of nanostructures. SEM images demonstrate the ability to select nanowires or nanoparticles as a function of Pt coverage. Statistical analysis of images of Pt nanoparticle arrays yield a mean feature size of 8 nm with a size variation of +/- 0.9 nm and interparticle spacing of approximately 15 nm.
You
Jiun Pyng
JP
Department of Chemical Engineering and Materials Science, University of California, Irvine, California 92697, USA.
Choi
Ju H
JH
Kim
Sehun
S
Li
Xuema
X
Williams
R Stanley
RS
Ragan
Regina
R
D003460:Crystallization / Q000379:methods*; D004871:Erbium / Q000737:chemistry*; D008422:Materials Testing; D008968:Molecular Conformation; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure*; D036103:Nanotechnology / Q000379:methods*; D010316:Particle Size; D010984:Platinum / Q000737:chemistry*; D012825:Silicon / Q000737:chemistry*; D013499:Surface Properties
D010984:Platinum; D004871:Erbium; D012825:Silicon