Laser micromachining of goldblack coatings.
Goldblack deposits have been used as high-absorption coatings for thermal infrared detectors for a number of years, principally on large single, or few pixel detectors. We present a new technique that allows the benefits of goldblack to be applied to the current generation of small pixel silicon micromachined thermal infrared detectors.
Nelms
N
N
Space Research Centre, University of Leicester, UK. nin@star.le.ac.uk
Dowson
J
J
Rizvi
N
N
Rohr
T
T