Exact and approximate analysis of surface acoustic waves in an infinite elastic plate with a thin metal layer.
For an accurate approximation of the effect of a thin layer over a finite substrate, we consider the displacements are continuous across the interface, while the stress components are obtained from derivatives of displacements. As a result, the stress boundary conditions are transformed to a relationship between stresses in the vicinity of the interface of two layers and density of the metal layer. Through this approximation, we eventually have four equations to solve for the surface acoustic wave dispersion relation of the two-layer structure. The approximate and accurate results are compared with good agreement for small thickness of the metal layer. These results are intended for periodic structures with separate solutions for electroded and unelectroded regions, which can be connected by the continuity boundary conditions for the analysis of the complete structure of typical surface acoustic wave resonators.
Wang
Ji
J
Mechanics and Materials Science Research Center, School of Engineering, Ningbo University, 818 Fenghua Road, Ningbo, Zhejiang 315211, PR China. wangji@nbu.edu.cn <wangji@nbu.edu.cn>
Du
Jianke
J
Lu
Wenqiong
W
Mao
Huimin
H
D000162:Acoustics / Q000295:instrumentation*; D016880:Anisotropy; D003198:Computer Simulation; D004548:Elasticity; D004566:Electrodes; D055590:Electromagnetic Phenomena / Q000295:instrumentation*; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008567:Membranes, Artificial; D008670:Metals / Q000737:chemistry*; D008962:Models, Theoretical; D013499:Surface Properties; D014732:Vibration
D008567:Membranes, Artificial; D008670:Metals