title: Regular arrays of monodisperse platinum/erbium disilicide core-shell nanowires and nanoparticles on Si(001) via a self-assembled template.
abstract: We have developed a process for fabricating monodisperse noble metal/rare earth disilicide core-shell nanoparticles and nanowires in regular arrays on Si(001) with a density of 5 x 10(10) / cm2, and over areas > 1 mm2. Pt deposited via physical vapor deposition on a self-assembled rare earth disilicide nanowire template combined with reactive ion etching produces arrays of nanostructures. SEM images demonstrate the ability to select nanowires or nanoparticles as a function of Pt coverage. Statistical analysis of images of Pt nanoparticle arrays yield a mean feature size of 8 nm with a size variation of +/- 0.9 nm and interparticle spacing of approximately 15 nm.
authors.affiliation: Department of Chemical Engineering and Materials Science, University of California, Irvine, California 92697, USA.
authors.forename: Jiun Pyng
authors.initials: JP
authors.lastname: You
authors.forename: Ju H
authors.initials: JH
authors.lastname: Choi
authors.forename: Sehun
authors.initials: S
authors.lastname: Kim
authors.forename: Xuema
authors.initials: X
authors.lastname: Li
authors.forename: R Stanley
authors.initials: RS
authors.lastname: Williams
authors.forename: Regina
authors.initials: R
authors.lastname: Ragan
mesh_terms: D003460:Crystallization / Q000379:methods*; D004871:Erbium / Q000737:chemistry*; D008422:Materials Testing; D008968:Molecular Conformation; D049329:Nanostructures / Q000737:chemistry* / Q000648:ultrastructure*; D036103:Nanotechnology / Q000379:methods*; D010316:Particle Size; D010984:Platinum / Q000737:chemistry*; D012825:Silicon / Q000737:chemistry*; D013499:Surface Properties
chemical_list: D010984:Platinum; D004871:Erbium; D012825:Silicon