title: Fabrication and characterization of microstructures with optical quality surfaces in fused silica glass using femtosecond laser pulses and chemical etching.
abstract: We present a study of the sidewall surface quality inside microchannels fabricated in fused silica glass by femtosecond laser pulses and chemical etching. Multiple combinations of laser exposure and etching solution parameters were examined. Results of scanning electron microscopy, atomic force microscopy, and optical reflection analyses of the surfaces are presented. The results obtained demonstrate the feasibility of optical quality surface fabrication, which in turn demonstrates the feasibility of fabricating complex integrated devices containing microfluidic channels and optical waveguides in the glass substrates.
authors.affiliation: Kettering University, Flint, Michigan 48504, USA. ysikorski@kettering.edu
authors.forename: Yuri
authors.initials: Y
authors.lastname: Sikorski
authors.forename: Corneliu
authors.initials: C
authors.lastname: Rablau
authors.forename: Mark
authors.initials: M
authors.lastname: Dugan
authors.forename: Ali A
authors.initials: AA
authors.lastname: Said
authors.forename: Philippe
authors.initials: P
authors.lastname: Bado
authors.forename: Lars Guenter
authors.initials: LG
authors.lastname: Beholz