title: Submicrometer digital in-line holographic microscopy at 32 nm with high-order harmonics.
abstract: Soft-x-ray digital in-line microscopic holography is achieved using a fully coherent high-order harmonic source emitting at 32 nm. Combination of commercial-grade soft-x-ray optics and a back-illuminated CCD detector allows a compact and versatile holographic setup. Different experimental geometries have been tested by imaging calibrated 50 nm tips and 1 microm wires. Spatial resolution of 800 nm is measured with magnifications ranging from 30 to 110 and a numerical aperture around 0.01. Finally, the potentiality of three-dimensional numerical reconstruction from a single hologram acquisition is shown experimentally.
authors.affiliation: Laboratoire d'Optique Appliquée, Ecole Nationale Supérieure de Techniques Avancées, Ecole Polytechnique, CNRS UMR7639, Chemin de la Hunière, F-91761 Palaiseau Cedex, France. anne-sophie.morlens@ensta.fr
authors.forename: Anne-Sophie
authors.initials: AS
authors.lastname: Morlens
authors.forename: Julien
authors.initials: J
authors.lastname: Gautier
authors.forename: Gilles
authors.initials: G
authors.lastname: Rey
authors.forename: Philippe
authors.initials: P
authors.lastname: Zeitoun
authors.forename: Jean-Pascal
authors.initials: JP
authors.lastname: Caumes
authors.forename: Marylène
authors.initials: M
authors.lastname: Kos-Rosset
authors.forename: Hamed
authors.initials: H
authors.lastname: Merdji
authors.forename: Sophie
authors.initials: S
authors.lastname: Kazamias
authors.forename: Kevin
authors.initials: K
authors.lastname: Cassou
authors.forename: Marta
authors.initials: M
authors.lastname: Fajardo