title: Chemomechanical nanolithography: nanografting on silicon and factors impacting linewidth.
abstract: We present a two-fold extension of previous work on Atomic Force Microscope-based chemomechanical functionalization: (1) chemomechanical nanografting, which extends chemomechanical functionalization to a more stable initial surface, and (2) linewidth studies that show the impact of force and Atomic Force Microscope probe tip wear on patterning resolution. Alkene, alcohol, and alkyl halide molecules were nanografted to silicon and imaged with in situ atomic force microscopy, time-of-flight secondary ion mass spectrometry with Automated eXpert Spectrum Image Analysis, and scanning electron microscopy. Chemomechanical nanografting demonstrated linewidths down to 50 nm. Lines written on hydrogen-terminated silicon were used to explore the impact of tip radius and tip wear on linewidth when using Si3N4 coated tips.
authors.affiliation: Department of Chemistry and Biochemistry, Brigham Young University, Provo, UT 84602, USA.
authors.forename: Michael V
authors.initials: MV
authors.lastname: Lee
authors.forename: Melinda Tonks
authors.initials: MT
authors.lastname: Hoffman
authors.forename: Katherine
authors.initials: K
authors.lastname: Barnett
authors.forename: John-Mark
authors.initials: JM
authors.lastname: Geiss
authors.forename: Vincent S
authors.initials: VS
authors.lastname: Smentkowski
authors.forename: Matthew R
authors.initials: MR
authors.lastname: Linford
authors.forename: Robert C
authors.initials: RC
authors.lastname: Davis
mesh_terms: D020099:Coated Materials, Biocompatible / Q000737:chemistry; D018625:Microscopy, Atomic Force; D008855:Microscopy, Electron, Scanning; D049329:Nanostructures / Q000737:chemistry / Q000648:ultrastructure; D036103:Nanotechnology / Q000379:methods*; D012825:Silicon / Q000737:chemistry*; D018629:Spectrometry, Mass, Secondary Ion; D013499:Surface Properties
chemical_list: D020099:Coated Materials, Biocompatible; D012825:Silicon