Chemomechanical nanolithography: nanografting on silicon and factors impacting linewidth.
We present a two-fold extension of previous work on Atomic Force Microscope-based chemomechanical functionalization: (1) chemomechanical nanografting, which extends chemomechanical functionalization to a more stable initial surface, and (2) linewidth studies that show the impact of force and Atomic Force Microscope probe tip wear on patterning resolution. Alkene, alcohol, and alkyl halide molecules were nanografted to silicon and imaged with in situ atomic force microscopy, time-of-flight secondary ion mass spectrometry with Automated eXpert Spectrum Image Analysis, and scanning electron microscopy. Chemomechanical nanografting demonstrated linewidths down to 50 nm. Lines written on hydrogen-terminated silicon were used to explore the impact of tip radius and tip wear on linewidth when using Si3N4 coated tips.
Lee
Michael V
MV
Department of Chemistry and Biochemistry, Brigham Young University, Provo, UT 84602, USA.
Hoffman
Melinda Tonks
MT
Barnett
Katherine
K
Geiss
John-Mark
JM
Smentkowski
Vincent S
VS
Linford
Matthew R
MR
Davis
Robert C
RC
D020099:Coated Materials, Biocompatible / Q000737:chemistry; D018625:Microscopy, Atomic Force; D008855:Microscopy, Electron, Scanning; D049329:Nanostructures / Q000737:chemistry / Q000648:ultrastructure; D036103:Nanotechnology / Q000379:methods*; D012825:Silicon / Q000737:chemistry*; D018629:Spectrometry, Mass, Secondary Ion; D013499:Surface Properties
D020099:Coated Materials, Biocompatible; D012825:Silicon