Submicrometer digital in-line holographic microscopy at 32 nm with high-order harmonics.
Soft-x-ray digital in-line microscopic holography is achieved using a fully coherent high-order harmonic source emitting at 32 nm. Combination of commercial-grade soft-x-ray optics and a back-illuminated CCD detector allows a compact and versatile holographic setup. Different experimental geometries have been tested by imaging calibrated 50 nm tips and 1 microm wires. Spatial resolution of 800 nm is measured with magnifications ranging from 30 to 110 and a numerical aperture around 0.01. Finally, the potentiality of three-dimensional numerical reconstruction from a single hologram acquisition is shown experimentally.
Morlens
Anne-Sophie
AS
Laboratoire d'Optique Appliquée, Ecole Nationale Supérieure de Techniques Avancées, Ecole Polytechnique, CNRS UMR7639, Chemin de la Hunière, F-91761 Palaiseau Cedex, France. anne-sophie.morlens@ensta.fr
Gautier
Julien
J
Rey
Gilles
G
Zeitoun
Philippe
P
Caumes
Jean-Pascal
JP
Kos-Rosset
Marylène
M
Merdji
Hamed
H
Kazamias
Sophie
S
Cassou
Kevin
K
Fajardo
Marta
M