Synthesis of ordered mesoporous zirconium phosphate films by spin coating and vapor treatments.
Ordered mesoporous zirconium phosphate films were prepared on a silicon substrate by spin coating using a mixture of zirconium isopropoxide, triethyl phosphate, Pluronic P123 triblock copolymer, nitric acid, ethanol, and water. The spin-on film was consecutively treated with vapors of phosphoric acid and ammonia. The post-vapor treatments effectively enhanced the thermal stability of an ordered mesostructure when heated to 500 degrees C. XRD and TEM analyses show that the calcined zirconium phosphate film has a hexagonal structure with straight channels parallel to the film surface. The zirconium phosphate film exhibited high proton conductivity of 0.02 S/cm parallel to the film surface at 80% RH and 25 degrees C.
Nishiyama
Yuko
Y
Division of Chemical Engineering, Graduate School of Engineering Science, Osaka University, 1-3 Machikaneyama, Toyonaka, Osaka 560-8531, Japan.
Tanaka
Shunsuke
S
Hillhouse
Hugh W
HW
Nishiyama
Norikazu
N
Egashira
Yasuyuki
Y
Ueyama
Korekazu
K