Statistical approach to choosing a strategy of monochromatic monitoring of optical coating production.
We presents what we believe to be a new approach to choosing a sequence of monitoring wavelengths for monochromatic monitoring of optical coating production. The new approach is based on a preproduction estimation of expected levels of errors in thickness of layers of a deposited coating. It is demonstrated that the proposed monitoring strategy reduces the effect of accumulation of thickness errors. An advantage of the new monitoring strategy becomes especially noticeable when the number of monitored layers is equal to several dozens.
Tikhonravov
A V
AV
Research Computing Center, Moscow State University, Leninskie Gory, Moscow, Russia. tikh@srcc.msu.su
Trubetskov
M K
MK
Amotchkina
T V
TV