Charging compensation of alumina samples by using an oxygen microinjector in the environmental scanning electron microscope.
A gas microinjector system was set up in an environmental scanning electron microscope (ESEM) to create an oxygen atmosphere around the alumina samples for the charging compensation under a pressure between 2 x 10(-5) Pa approximately 2 x 10(-2) Pa. At low pressures, the skirt effect of the electron scattering can be degraded, which results in improvement of the imaging contrast and increase of the signal/noise ratio. The sample current (I(SC)) and the Duane-Hunt limit were measured to evaluate the charging effect.
Quan
Xueling
X
Institute of Microstructure and Property of Advanced Materials, Beijing University of Technology, Beijing, China.
Ji
Yuan
Y
Zhang
Hong
H
Zhang
Yinqi
Y
Xu
Xuedong
X
Zhong
Taoxing
T