title: Synthesis of ordered mesoporous zirconium phosphate films by spin coating and vapor treatments.
abstract: Ordered mesoporous zirconium phosphate films were prepared on a silicon substrate by spin coating using a mixture of zirconium isopropoxide, triethyl phosphate, Pluronic P123 triblock copolymer, nitric acid, ethanol, and water. The spin-on film was consecutively treated with vapors of phosphoric acid and ammonia. The post-vapor treatments effectively enhanced the thermal stability of an ordered mesostructure when heated to 500 degrees C. XRD and TEM analyses show that the calcined zirconium phosphate film has a hexagonal structure with straight channels parallel to the film surface. The zirconium phosphate film exhibited high proton conductivity of 0.02 S/cm parallel to the film surface at 80% RH and 25 degrees C.
authors.affiliation: Division of Chemical Engineering, Graduate School of Engineering Science, Osaka University, 1-3 Machikaneyama, Toyonaka, Osaka 560-8531, Japan.
authors.forename: Yuko
authors.initials: Y
authors.lastname: Nishiyama
authors.forename: Shunsuke
authors.initials: S
authors.lastname: Tanaka
authors.forename: Hugh W
authors.initials: HW
authors.lastname: Hillhouse
authors.forename: Norikazu
authors.initials: N
authors.lastname: Nishiyama
authors.forename: Yasuyuki
authors.initials: Y
authors.lastname: Egashira
authors.forename: Korekazu
authors.initials: K
authors.lastname: Ueyama