title: Charging compensation of alumina samples by using an oxygen microinjector in the environmental scanning electron microscope.
abstract: A gas microinjector system was set up in an environmental scanning electron microscope (ESEM) to create an oxygen atmosphere around the alumina samples for the charging compensation under a pressure between 2 x 10(-5) Pa approximately 2 x 10(-2) Pa. At low pressures, the skirt effect of the electron scattering can be degraded, which results in improvement of the imaging contrast and increase of the signal/noise ratio. The sample current (I(SC)) and the Duane-Hunt limit were measured to evaluate the charging effect.
authors.affiliation: Institute of Microstructure and Property of Advanced Materials, Beijing University of Technology, Beijing, China.
authors.forename: Xueling
authors.initials: X
authors.lastname: Quan
authors.forename: Yuan
authors.initials: Y
authors.lastname: Ji
authors.forename: Hong
authors.initials: H
authors.lastname: Zhang
authors.forename: Yinqi
authors.initials: Y
authors.lastname: Zhang
authors.forename: Xuedong
authors.initials: X
authors.lastname: Xu
authors.forename: Taoxing
authors.initials: T
authors.lastname: Zhong