title: Nanoscale scanning transmission electron tomography.
abstract: Electron tomography enables the study of complex three-dimensional objects with nanometre resolution. In materials science, scanning transmission electron microscopy provides images with minimal coherent diffraction effects and with high atomic number contrast that makes them ideal for electron tomographic reconstruction. In this study, we reviewed the topic of scanning transmission electron microscopy-based tomography and illustrated the power of the technique with a number of examples with critical dimensions at the nanoscale.
authors.affiliation: Department of Materials Science and Metallurgy, University of Cambridge, Pembroke Street, Cambridge CB2 3QZ, UK. pam33@cam.ac.uk
authors.forename: P A
authors.initials: PA
authors.lastname: Midgley
authors.forename: M
authors.initials: M
authors.lastname: Weyland
authors.forename: T J V
authors.initials: TJ
authors.lastname: Yates
authors.forename: I
authors.initials: I
authors.lastname: Arslan
authors.forename: R E
authors.initials: RE
authors.lastname: Dunin-Borkowski
authors.forename: J M
authors.initials: JM
authors.lastname: Thomas