title: Experimental study of phase noise in FBAR resonators.
abstract: Phase noise of micromachined bulk acoustic wave resonators is investigated. A measurement bench, able to characterize the phase noise of a single resonator on-wafer, is set up. The experimental data demonstrate the existence of a 1/f phase noise component, the amplitude of which is strongly dependent on the resonator geometry. Particularly, the apodized resonators have shown the best phase noise performance, with no degradation of the Q factor.
authors.affiliation: LAAS-CNRS, Toulouse, France. gribaldo@laas.fr
authors.forename: Sébastien
authors.initials: S
authors.lastname: Gribaldo
authors.forename: Cyril
authors.initials: C
authors.lastname: Chay
authors.forename: Eric
authors.initials: E
authors.lastname: Tournier
authors.forename: Olivier
authors.initials: O
authors.lastname: Llopis