title: Measurement of the spatial response of a detector pixel.
abstract: In order to measure the internal spatial response of a pixel in a detector, it is scanned by a beam smaller than its size. This becomes difficult as the wave length grows and becomes comparable to the pixel size, such as in the infra red. To overcome this difficulty, a special phase mask which makes the beam narrower was designed, constructed, and tested successfully. The mask was made from five alternating transparent rings, where the rings had half a wave phase difference between them. The beam was scanned with and without the mask in two dimensions in fine steps by a much smaller detector and its response was taken. The spot width dropped by 19% at half its height and by 42% at tenth its height, a significant narrowing. The scan was repeated with the full detector pixel. That beam scan served as a deconvolution kernel and allowed us to find the pixel point spread function (spatial response), the pixel modulation transfer function and the optical cross talk between the pixels.
authors.affiliation: SemiConductor Devices (SCD), P.O. Box 2250, Haifa 31021, Israel.
authors.forename: Y
authors.initials: Y
authors.lastname: Zabar
authors.forename: E N
authors.initials: EN
authors.lastname: Ribak
authors.forename: S G
authors.initials: SG
authors.lastname: Lipson