title: Wavelength- and energy-dispersive Electron Probe Microanalysis (EPMA) measurements with non-perpendicular incidence of the electron beam.
abstract: A database of 416 wavelength- and energy-dispersive EPMA measurements on tilted specimens of NiAl, TiO(2) and Ti(3)Al is presented. The analyses were performed between 10 and 30 kV and the tilt angles were varied between 0 degrees and 60 degrees in seven steps. The necessary hardware modifications for the specimen holder are discussed, as well as the various focusing techniques used in the measurements. A comparison between the experimental data, the calculations of our proza96t program and the results of Monte Carlo simulations shows that up to 50 degrees tilt the predictions of our software are more than satisfactory. At larger tilt angles some deviations become noticeable. The Monte Carlo simulations appear to produce deviations at a somewhat earlier stage already, for reasons as yet unknown.
authors.affiliation: Laboratory of Solid State and Materials Chemistry, University of Technology, PO Box 513, NL-5600 MB Eindhoven, the Netherlands. G.F.Bastin@tue.nl
authors.forename: G F
authors.initials: GF
authors.lastname: Bastin
authors.forename: P J T L
authors.initials: PJ
authors.lastname: Oberndorff
authors.forename: H J M
authors.initials: HJ
authors.lastname: Heijligers
authors.forename: J M
authors.initials: JM
authors.lastname: Dijkstra