Design of precursors for the CVD of inorganic thin films.
Applications of inorganic thin films in the electronics industry have spurred activity in the area of chemical vapor deposition (CVD). This article discusses the increasingly sophisticated design strategies for precursor complexes through a series of case studies on CVD of metal oxide and metal nitride films.
McElwee-White
Lisa
L
Department of Chemistry, University of Florida, Gainesville, FL 32611-7200, USA. lmwhite@chem.ufl.edu