A high-sensitivity, dual-plate, thickness-shear mode pressure sensor.
We propose a dual-plate pressure sensor operating with pressure-induced frequency shifts of thickness-shear modes of a crystal plate resonator. Under an applied normal pressure. The dual-plate structure causes flexure in the crystal plate rather than circumferential compression in usual thickness-shear pressure sensors. This suggests higher sensitivity because a plate responds to a normal pressure more than to a circumferential compression, which is shown by a theoretical analysis using the theory for small fields superposed on initial fields.
Hu
Yuantai
Y
Yang
Jiashi
J
Zeng
Yun
Y
Jiang
Qing
Q
D000162:Acoustics / Q000295:instrumentation*; D004867:Equipment Design; D019544:Equipment Failure Analysis; D008365:Manometry / Q000295:instrumentation* / Q000379:methods; D015203:Reproducibility of Results; D012680:Sensitivity and Specificity; D033081:Shear Strength; D013314:Stress, Mechanical; D014160:Transducers, Pressure