title: High-efficiency stepwise contraction and adsorption nanolithography.
abstract: A new miniaturization protocol is demonstrated using stretching and relaxation of an elastomer substrate. A designed microstructure is formed on the stretched substrate and subsequently becomes miniaturized when the substrate relaxes. More importantly, the miniaturized structures can be transferred onto a new substrate for further miniaturization or can be utilized as stamps for nanolithography of designated materials. As an example of this approach, an elastic mold was first cast from a Si mold containing periodic line arrays of 1.5-microm line width. Upon relaxation, line width is reduced to 240 nm. The new elastomer may be used as stamps for micro- and nanofabrication of materials such as proteins. The polymer surface roughness or wrinkling behavior at nanoscale is found to follow classic stability model in solid mechanics. This observation provides means to design and control the surface roughness to meet specific requirements.
authors.affiliation: Department of Chemistry, University of California, One Shields Avenue, Davis, California 95616, USA.
authors.forename: Li
authors.initials: L
authors.lastname: Tan
authors.forename: Zhenqian
authors.initials: Z
authors.lastname: Ouyang
authors.forename: Maozi
authors.initials: M
authors.lastname: Liu
authors.forename: John
authors.initials: J
authors.lastname: Ell
authors.forename: Jun
authors.initials: J
authors.lastname: Hu
authors.forename: Timothy E
authors.initials: TE
authors.lastname: Patten
authors.forename: Gang-Yu
authors.initials: GY
authors.lastname: Liu
mesh_terms: D000180:Acrylic Resins / Q000737:chemistry; D000327:Adsorption; D001709:Biotechnology / Q000379:methods*; D004548:Elasticity; D020724:Elastomers / Q000737:chemistry*; D018625:Microscopy, Atomic Force; D008904:Miniaturization; D036103:Nanotechnology / Q000379:methods*; D012408:Rubber / Q000737:chemistry; D012826:Silicone Elastomers / Q000737:chemistry; D012996:Solutions / Q000737:chemistry; D013499:Surface Properties
chemical_list: D000180:Acrylic Resins; D020724:Elastomers; D012826:Silicone Elastomers; D012996:Solutions; C006903:carbopol 940; D012408:Rubber