Near common-path optical fiber interferometer for potentially fast on-line microscale-nanoscale surface measurement.
We introduce a new surface measurement method for potential online application. Compared with our previous research, the new design is a significant improvement. It also features high stability because it uses a near common-path configuration. The method should be of great benefit to advanced manufacturing, especially for quality and process control in ultraprecision manufacturing and on the production line. Proof-of-concept experiments have been successfully conducted by measuring the system repeatability and the displacements of a mirror surface.
Jiang
Xiangqian
X
Centre for Precision Technologies, University of Huddersfield, Huddersfield, UK. x.jiang@hud.ac.uk
Wang
Kaiwei
K
Martin
Haydn
H