title: Nanometer-scale ablation with a table-top soft x-ray laser.
abstract: Ablation of holes with diameters as small as 82 nm and very clean walls was obtained in poly(methyl methacrylate) focusing pulses from a Ne-like Ar 46.9 nm compact capillary-discharge laser with a freestanding Fresnel zone plate diffracting into third order. These results demonstrate the feasibility of using focused soft x-ray laser beams for the direct nanoscale patterning of materials and the development of new nanoprobes.
authors.affiliation: NSF ERC for Extreme Ultraviolet Science and Technology and Department of Electrical and Computeer Engineering, Colorado State University, Fort Collins, Colorado 80523, USA.
authors.forename: G
authors.initials: G
authors.lastname: Vaschenko
authors.forename: A Garcia
authors.initials: AG
authors.lastname: Etxarri
authors.forename: C S
authors.initials: CS
authors.lastname: Menoni
authors.forename: J J
authors.initials: JJ
authors.lastname: Rocca
authors.forename: O
authors.initials: O
authors.lastname: Hemberg
authors.forename: S
authors.initials: S
authors.lastname: Bloom
authors.forename: W
authors.initials: W
authors.lastname: Chao
authors.forename: E H
authors.initials: EH
authors.lastname: Anderson
authors.forename: D T
authors.initials: DT
authors.lastname: Attwood
authors.forename: Y
authors.initials: Y
authors.lastname: Lu
authors.forename: B
authors.initials: B
authors.lastname: Parkinson