Nanometer-scale ablation with a table-top soft x-ray laser.
Ablation of holes with diameters as small as 82 nm and very clean walls was obtained in poly(methyl methacrylate) focusing pulses from a Ne-like Ar 46.9 nm compact capillary-discharge laser with a freestanding Fresnel zone plate diffracting into third order. These results demonstrate the feasibility of using focused soft x-ray laser beams for the direct nanoscale patterning of materials and the development of new nanoprobes.
Vaschenko
G
G
NSF ERC for Extreme Ultraviolet Science and Technology and Department of Electrical and Computeer Engineering, Colorado State University, Fort Collins, Colorado 80523, USA.
Etxarri
A Garcia
AG
Menoni
C S
CS
Rocca
J J
JJ
Hemberg
O
O
Bloom
S
S
Chao
W
W
Anderson
E H
EH
Attwood
D T
DT
Lu
Y
Y
Parkinson
B
B