Self-assembling of submicrometer three-dimensional photonic crystals in concave microzones etched on silicon substrates.
By vertical sedimentation and oblique titration, silica microspheres were grown in different shapes of concave microzones that were etched on a (100) p-silicon substrate. Through scanning electron microscope observation and optical reflective spectra measurement, sedimentation of microspheres in those microzones was compared. An index was introduced to judge the efficiency of sedimentation. The comparison demonstrates that regular hexagons and triangles facilitate the growth of photonic crystals the most.
Ye
Zhicheng
Z
Institute of Semiconductors, The Chinese Academy of Sciences, Bejing, China. yzhch@red.semi.ac.cn
Han
Peide
P
Zhao
Chunhua
C
Quan
Yujun
Y
Lu
Xiaodong
X
Wu
Li
L